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公开(公告)号：US20170001881A1
公开(公告)日：2017-01-05
申请号：US15202150
申请日：2016-07-05
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： NORIMITSU ABE , TAKESHI IDE , SHINJI KOBAYASHI , AKIHIKO SHIROTA , KENJI TAKEUCHI
CPC classification number: C02F1/008 , B01J19/12 , C02F1/325 , C02F1/685 , C02F1/76 , C02F2201/3227 , C02F2201/326 , C02F2209/006 , C02F2209/40 , C02F2303/04
Abstract: A liquid processing system has: processing units of n stages in which each processing unit includes one or a plurality of processing lines, each processing line includes an ultraviolet ray irradiating unit, and the number of processing lines of an m-th stage processing unit is larger than the number of processing lines of an m+1-th stage processing unit; and adjusting section which adjusts an output of an ultraviolet ray irradiating unit provided to a processing unit of a predetermined stage. An output of an ultraviolet ray irradiating unit provided to a processing unit of a stage other than the predetermined stage is each fixed, and the adjusting section adjusts the output of the let ray irradiating unit provided to the processing unit of the predetermined stage such that a liquid processed in an n-th stage processing unit of a final stage is in a desired processing state.
Abstract translation: 液体处理系统具有：处理单元，其中每个处理单元包括一个或多个处理线，每个处理线包括紫外线照射单元，第m级处理单元的处理线数为 大于第m + 1级处理单元的处理线数; 以及调整部，其调节设置在预定阶段的处理单元的紫外线照射单元的输出。 设置在除了规定级之外的台的处理单元的紫外线照射单元的输出各自固定，调整部调整设置在规定阶段的处理单元中的放射线照射单元的输出，使得 在最终级的第n级处理单元中处理的液体处于期望的处理状态。
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公开(公告)号：US20170283276A9
公开(公告)日：2017-10-05
申请号：US15202150
申请日：2016-07-05
Applicant: KABUSHIKI KAISHA TOSHIBA
Inventor： NORIMITSU ABE , TAKESHI IDE , SHINJI KOBAYASHI , AKIHIKO SHIROTA , KENJI TAKEUCHI
CPC classification number: C02F1/008 , B01J19/12 , C02F1/325 , C02F1/685 , C02F1/76 , C02F2201/3227 , C02F2201/326 , C02F2209/006 , C02F2209/40 , C02F2303/04
Abstract: A liquid processing system has: processing units of n stages in which each processing unit includes one or a plurality of processing lines, each processing line includes an ultraviolet ray irradiating unit, and the number of processing lines of an m-th stage processing unit is larger than the number of processing lines of an m+1-th stage processing unit; and adjusting section which adjusts an output of an ultraviolet ray irradiating unit provided to a processing unit of a predetermined stage. An output of an ultraviolet ray irradiating unit provided to a processing unit of a stage other than the predetermined stage is each fixed, and the adjusting section adjusts the output of the let ray irradiating unit provided to the processing unit of the predetermined stage such that a liquid processed in an n-th stage processing unit of a final stage is in a desired processing state.
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