公开(公告)号：US20150226539A1

公开(公告)日：2015-08-13

申请号：US14691097

申请日：2015-04-20

Applicant: KLA-TENCOR CORPORATION

Inventor： Klaus-Dieter ROETH ,  Mohammad M. DANESHPANAH ,  Alexander BUETTNER ,  Apo SEZGINER ,  Mark WAGNER

IPC: G01B11/00 ,  G01N21/88

CPC classification number: G01B11/005 ,  G01N21/8806 ,  G01N2201/06113 ,  G01N2201/0691 ,  G01N2201/0697 ,  G03F1/22 ,  G03F1/84

Abstract: A system, a method and a coordinate measuring machine is disclosed for determining the position of defects on objects. An interface is provided so that alignment and coordinate information from the inspection device can be sent to the coordinate measuring machine. A special illumination and detection arrangement is used with a plurality of optical elements in order to obtain a signal from defects on the unpatterned object. The light source of the illumination and detection arrangement is a laser light source for providing a partially coherent light beam. A computer calculates from the data provides by the detector array and the alignment and coordinate information of the object from the inspection device a position of the defect on the object.

Abstract translation: 公开了一种用于确定物体上缺陷位置的系统，方法和坐标测量机。 提供了一个接口，使得来自检查装置的对准和坐标信息可以发送到坐标测量机。 与多个光学元件一起使用特殊的照明和检测装置，以便获得来自未图案化物体上的缺陷的信号。 照明和检测装置的光源是用于提供部分相干光束的激光光源。 计算机根据检测器阵列提供的数据和来自检查装置的物体的对准和坐标信息来计算物体上缺陷的位置。