公开(公告)号：US20160116425A1

公开(公告)日：2016-04-28

申请号：US14919563

申请日：2015-10-21

Applicant: KLA-Tencor Corporation

Inventor： Harsh SINHA ,  Dmitry SPIVAK ,  Huina XU ,  Hong XIAO ,  Rohit BOTHRA

IPC: G01N23/225 ,  H01J37/20 ,  H01J37/28

CPC classification number: G01N23/2252 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/22 ,  H01J2237/2806 ,  H01J2237/2807 ,  H01J2237/2817

Abstract: One embodiment relates to a method for automated review of defects detected in a defective die on the target substrate. The method includes: performing an automated review of the defects using an secondary electron microscope (SEM) so as to obtain electron-beam images of the defects; performing an automated classification of the defects into types based on morphology of the defects as determined from the electron-beam images; selecting defects of a specific type for automated energy-dispersive x-ray (EDX) review; and performing the automated EDX review on the defects of the specific type. In addition, automated techniques are disclosed for obtaining an accurate reference so as to improve the usefulness of the EDX results. Furthermore, an automated method of classifying the defects based on the EDX results is disclosed which provides a final pareto that combines both morphological and elemental information. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及一种用于自动检查在目标衬底上的缺陷管芯中检测到的缺陷的方法。 该方法包括：使用二次电子显微镜（SEM）对缺陷进行自动审查，以获得缺陷的电子束图像; 基于从电子束图像确定的缺陷的形态，将缺陷自动分类为类型; 选择特定类型的自动能量色散X射线（EDX）检查的缺陷; 并对特定类型的缺陷执行自动EDX审查。 此外，公开了用于获得精确参考以提高EDX结果的有用性的自动化技术。 此外，公开了一种基于EDX结果对缺陷进行分类的自动化方法，其提供结合形态和元素信息的最终帕累托。 还公开了其它实施例，方面和特征。