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1.发明申请ADAPTABLE ILLUMINATING APPARATUS, SYSTEM, AND METHOD FOR EXTREME ULTRA-VIOLET LIGHT 有权适用于超紫外灯的适应性照明设备，系统和方法公开(公告)号：US20140175308A1
公开(公告)日：2014-06-26
申请号：US14109457
申请日：2013-12-17
Applicant: KLA-Tencor Corporation
Inventor： Damon Kvamme , Yanming Zhao
CPC classification number: G01N21/9501 , G02B5/0891 , G02B17/0621 , G02B27/0988 , G02B27/0994
Abstract: An apparatus for focusing light in a semi-conductor inspection system, including: a first mirror arranged to reflect extreme ultra-violet (EUV) generated by a plasma source; and a second mirror arranged to focus the EUV light, reflected from the first mirror, onto a first intermediate focus plane. A homogenizing tunnel, including: a first aperture having a first shape and a first size and arranged to receive extreme ultra-violet (EUV) light; a second aperture having a second shape and a second size; and a passageway connecting the first and second apertures and arranged to homogenize the EUV light received by the first aperture. The first shape is different from the second shape or the first size is different from the second size.
Abstract translation: 一种用于将光聚焦在半导体检查系统中的装置，包括：第一反射镜，被布置成反射由等离子体源产生的极紫外（EUV）; 以及布置成将从第一反射镜反射的EUV光聚焦到第一中间焦平面上的第二反射镜。 一种均质隧道，包括：具有第一形状和第一尺寸的第一孔，并且布置成接收极紫外（EUV）光; 具有第二形状和第二尺寸的第二孔; 以及连接第一孔和第二孔并设置成使由第一孔接收的EUV光均匀化的通道。 第一形状与第二形状不同，或者第一尺寸与第二尺寸不同。
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公开(公告)号：US09516733B1
公开(公告)日：2016-12-06
申请号：US14814636
申请日：2015-07-31
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Yanming Zhao , Gildardo R. Delgado
IPC: H01J1/02 , H05H1/24 , H01J61/09 , H01J23/033
CPC classification number: H05H1/24 , H01J1/025 , H01J23/033 , H01J61/09 , H01J61/28 , H01J61/52 , H01J61/54 , H01J61/545 , H01J65/042
Abstract: A method for producing a laser sustained plasma light by directing at least one laser into a gas volume and igniting a plasma that produces a light. Heated portions of the gas volume are removed from the plasma and cooled. The cooled portions of the gas volume are returned to the plasma in a laminar flow. The light is collected with a reflector and provided to a desired location.
Abstract translation: 一种通过将至少一个激光引入气体体积并点燃产生光的等离子体来产生激光持续等离子体光的方法。 从等离子体中除去气体体积的加热部分并冷却。 气体体积的冷却部分以层流返回到等离子体。 光被反射器收集并提供到期望的位置。
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3.发明授权Adaptable illuminating apparatus, system, and method for extreme ultra-violet light 有权适用于极紫外光的照明装置，系统和方法公开(公告)号：US09046500B2
公开(公告)日：2015-06-02
申请号：US14109457
申请日：2013-12-17
Applicant: KLA-Tencor Corporation
Inventor： Damon Kvamme , Yanming Zhao
CPC classification number: G01N21/9501 , G02B5/0891 , G02B17/0621 , G02B27/0988 , G02B27/0994
Abstract: An apparatus for focusing light in a semi-conductor inspection system, including: a first mirror arranged to reflect extreme ultra-violet (EUV) generated by a plasma source; and a second mirror arranged to focus the EUV light, reflected from the first mirror, onto a first intermediate focus plane. A homogenizing tunnel, including: a first aperture having a first shape and a first size and arranged to receive extreme ultra-violet (EUV) light; a second aperture having a second shape and a second size; and a passageway connecting the first and second apertures and arranged to homogenize the EUV light received by the first aperture. The first shape is different from the second shape or the first size is different from the second size.
Abstract translation: 一种用于将光聚焦在半导体检查系统中的装置，包括：第一反射镜，被布置成反射由等离子体源产生的极紫外（EUV）; 以及布置成将从第一反射镜反射的EUV光聚焦到第一中间焦平面上的第二反射镜。 一种均质隧道，包括：具有第一形状和第一尺寸的第一孔，并且布置成接收极紫外（EUV）光; 具有第二形状和第二尺寸的第二孔; 以及连接第一孔和第二孔并设置成使由第一孔接收的EUV光均匀化的通道。 第一形状与第二形状不同，或者第一尺寸与第二尺寸不同。
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公开(公告)号：US09526158B1
公开(公告)日：2016-12-20
申请号：US14814622
申请日：2015-07-31
Applicant: KLA-Tencor Corporation
Inventor： Ilya Bezel , Anatoly Shchemelinin , Yanming Zhao , Gildardo R. Delgado
IPC: H02J1/02 , H05H1/24 , H01J61/09 , H01J1/02 , H01J23/033
CPC classification number: H05H1/24 , H01J1/025 , H01J23/033 , H01J61/09 , H01J61/28 , H01J61/52 , H01J61/54 , H01J61/545 , H01J65/042
Abstract: A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.
Abstract translation: 一种激光持续等离子体光源，其具有包含在电池内的气体体积的电池。 至少一个激光器被引导到气体体积中，用于维持等离子体产生光的气体体积内的等离子体。 提供了用于在层流中连续地向等离子体提供气体体积的装置。 反射器收集光并将光提供到期望的位置。
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