公开(公告)号：US09846115B2

公开(公告)日：2017-12-19

申请号：US14917574

申请日：2013-09-09

Applicant: KOC UNIVERSITESI

Inventor： Hakan Urey ,  Goksenin Yaralioglu

IPC: B01L3/00 ,  G01N21/17 ,  G01N11/16 ,  G01N29/02 ,  G01N5/00 ,  G01N29/24

CPC classification number: G01N21/1702 ,  B01L3/502715 ,  B01L3/50273 ,  B01L3/502761 ,  B01L2300/06 ,  B01L2300/0654 ,  B01L2300/16 ,  B01L2300/18 ,  G01N5/00 ,  G01N11/16 ,  G01N29/022 ,  G01N29/2418 ,  G01N2201/06113 ,  G01N2201/062 ,  G01N2201/068 ,  G01N2201/08 ,  G01N2291/012 ,  G01N2291/0256 ,  G01N2291/02818 ,  G01N2291/0427

Abstract: The present invention relates generally to the field of chemical and biological sensors and in particular to micro electro-mechanical systems (MEMS) sensors for measuring fluid viscosity and detection of minute amounts of chemicals and biological agents in fluids. It is an object of the present invention to provide a sensor that will work in disposable cartridges with remote sensing that can measure dynamic changes of the functionalized cantilevers in liquid and gas environment.