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公开(公告)号:US20180207632A1
公开(公告)日:2018-07-26
申请号:US15745177
申请日:2016-04-14
Applicant: Korea Aerospace Research Institute
Inventor: Hyok Jin CHO , Hee Jun SEO , Sung Wook PARK , Guee Won MOON
CPC classification number: B01L1/02 , B01J20/0211 , B01J20/0292 , B01J20/04 , B01J20/20 , B01L2200/146 , B01L2200/147 , B01L2300/14 , B01L2300/1805 , F04B37/04 , G01L13/00
Abstract: Provided is a method for maintaining a preset air pressure of a low-pressure chamber. The method may comprise the steps of: measuring the inside air pressure of a low-pressure chamber; if the difference between the inside air pressure and a preset air pressure is the same or higher than a threshold value, adjusting the inside temperature of the low-pressure chamber by using a thermal conduction part disposed inside the low-pressure chamber; and by using a getter, making the difference to be below the threshold value by adsorbing or releasing molecules inside the low-pressure chamber according to the adjustment of the temperature
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公开(公告)号:US20200206728A1
公开(公告)日:2020-07-02
申请号:US16814080
申请日:2020-03-10
Applicant: Korea Aerospace Research Institute
Inventor: Hyok Jin CHO , Hee Jun SEO , Sung Wook PARK , Guee Won MOON
Abstract: Provided is a method of designing a low-pressure chamber that provides a preset air pressure corresponding to a predetermined altitude. The method may include the steps of: calculating a predetermined error range of the preset air pressure, and calculating an amount and types of materials of a getter to be inserted into the low-pressure chamber based on the error range and a total volume of the low-pressure chamber.
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公开(公告)号:US20180216610A1
公开(公告)日:2018-08-02
申请号:US15746526
申请日:2016-04-14
Applicant: Korea Aerospace Research Institute
Inventor: Hyok Jin CHO , Hee Jun SEO , Sung Wook PARK , Guee Won MOON
CPC classification number: F04B37/08 , B64G7/00 , B64G2007/005 , F04B37/14 , F04B39/06 , F04B49/02 , F04B2201/0801 , F28D20/028
Abstract: Provided is a cryopump enabling the maintaining of a preset temperature during a preset time, even when turned off. The cryopump may comprise: a displacer which adjusts outside temperature by compressing or expanding a refrigerant existing therein; a thermal conduction part which transfers heat outside the cryopump to the refrigerant; and a thermal conduction buffer part which, if the displacer is turned off, absorbs the heat outside that is transferred to the refrigerant, and uses same as energy for changing a phase.
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