公开(公告)号：US20170120282A1

公开(公告)日：2017-05-04

申请号：US15403974

申请日：2017-01-11

Applicant: LG Display Co., Ltd.

Inventor： Tae-Kyun JEONG ,  Kyong-Deuk JEONG ,  Jong-Ik PARK ,  Myung-Shik KIM ,  Hyoung-Won KIM ,  Dong-Ki SHIN ,  Jeong-Hak CHOI

IPC: B05B15/02 ,  G03F7/16 ,  B05C13/00 ,  B05D1/02 ,  B05B3/12

CPC classification number: B05B15/52 ,  B05B3/12 ,  B05B15/5223 ,  B05B15/55 ,  B05B15/70 ,  B05C3/09 ,  B05C3/10 ,  B05C11/11 ,  B05C13/00 ,  B05D1/005 ,  B05D1/02 ,  B05D1/26 ,  B41J2/16547 ,  C03C17/002 ,  G03F7/16 ,  G11B7/266 ,  H01L21/67051 ,  Y10S134/902 ,  Y10S135/902

Abstract: A coating apparatus includes: a nozzle having a nozzle front end configured to spray a coating solution and a head configured to store the coating solution; a movement axis configured to cause the nozzle to move back and forth in a straight line; a rotating connection member configured to connect the movement axis with the nozzle and allow the nozzle to rotate; a stage disposed under the movement axis; and a cleaning means disposed at an end of the movement axis, and having a nozzle front end insertion unit in a concave shape of the nozzle front end and a base fixing the insertion unit, wherein the nozzle is fixed in a normal direction of a surface of the stage by the movement axis, moves back and forth in an extension direction of the movement axis, and rotates with respect to the movement axis.