Systems for Off-Axis Imaging of a Surface of a Sample and Related Methods and Computer Program Products

    公开(公告)号:US20220125301A1

    公开(公告)日:2022-04-28

    申请号:US17424056

    申请日:2020-03-19

    Abstract: Systems for determining an apex of curvature In an image, obtained from, a sample are provided. The systems include—an imaging system configured to obtain a plurality of scans of a sample using a radial pattern; and a processor associated with the imaging system. The processor is configured to segment and curve fit each of the plurality of scans to a surface of the sample; determine an apex. for each curve associated with each of the plurality of scans; determine a true apex, among all determined apexes using a derivative of least value; calculate an XY offset based on the determined true apex; map the true apex to an origin where X and Y are equal to zero; and adjust the coordinates associated with remaining apexes not determined to be the true apex based on the calculated offset.

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