公开(公告)号：US11656271B2

公开(公告)日：2023-05-23

申请号：US17699610

申请日：2022-03-21

Applicant: MPI CORPORATION

Inventor： Yi-Hsuan Cheng ,  Hung-I Lin ,  Po-Han Peng

IPC: G01R1/067 ,  G01R31/28

CPC classification number: G01R31/2865 ,  G01R1/06727

Abstract: A wafer inspection system includes a supporting device having electrically connected supporting and contact portions for supporting a wafer's back, and a probe device having a probe and elastic contact members. When a probe tip of the probe contacts the wafer's front, a contact tip of the elastic contact member is abutted against a contact surface of the contact portion. The contact tip is higher than the probe tip. The contact surface is higher than the wafer's front. Alternatively, the contact surface having a radius larger than or equal to twice the wafer's radius. The horizontal distance between the probe tip and the contact tip is larger than or equal to twice the wafer's radius. This satisfies the test requirement of short-pulse test signal and prevents the structural design and transmitting stability of the elastic contact members from being affected by the inspection temperature.

公开(公告)号：US12158493B2

公开(公告)日：2024-12-03

申请号：US18105103

申请日：2023-02-02

Applicant: MPI CORPORATION

Inventor： Yi-Hsuan Cheng ,  Hung-I Lin ,  Po-Han Peng

IPC: G01R31/28

Abstract: A wafer inspection system includes probe and supporting devices opposite to each other. The probe device includes a probe and an electrically conductive module for transmitting test signal of a driver IC. The supporting device includes a chuck, an annular elastic module detachably disposed on the chuck, and a carrier. The chuck has a supporting portion located correspondingly to a hollow portion of the annular elastic module, which is larger than or equal to the carrier in size on an imaginary horizontal plane, enabling the carrier carrying a wafer to be placed on the supporting portion to be electrically connected with the annular elastic module. When the wafer is contacted by the probe, the electrically conductive module is abutted against the annular elastic module to form a short-path test loop. As a result, it is convenient to pick and place the carrier and wafer, enhancing inspection efficiency.