公开(公告)号：US20230307303A1

公开(公告)日：2023-09-28

申请号：US18205583

申请日：2023-06-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Kaoru KISHIGUI ,  Yoshihiro YOSHIDA

IPC: H01L23/053 ,  H01L23/10 ,  H01L23/31 ,  G01L19/14 ,  G01L9/00

CPC classification number: H01L23/053 ,  H01L23/10 ,  H01L23/3157 ,  G01L19/147 ,  G01L9/0041

Abstract: A semiconductor device includes a detector assembly mounted on a base substrate and including a detector to detect pressure, a resin package on the base substrate, and a tube supported by the resin package. The resin package includes a base portion on the base substrate and in which the detector assembly is embedded, and a projecting portion including an exposed hole that exposes the detector and projects from the base portion into the tube. The tube includes a tubular body portion and a lower flange portion supported by the base portion. The lower flange portion is inside an outer edge portion of the base portion in plan view. An outer side surface of the projecting portion is bonded to an inner circumferential surface of the tube.

公开(公告)号：US20230146158A1

公开(公告)日：2023-05-11

申请号：US18093354

申请日：2023-01-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Kaoru KISHIGUI ,  Koichi YOSHIDA

IPC: G01L9/00 ,  B81B7/00 ,  B81C1/00

CPC classification number: G01L9/0072 ,  B81B7/0048 ,  B81B7/0058 ,  B81B7/0064 ,  B81C1/00333 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/04 ,  B81C2201/016 ,  B81C2203/0118

Abstract: A pressure sensor structure includes a sensor body including a diaphragm plate that functions as a sense electrode, a base electrode that faces the diaphragm plate, and a sidewall layer maintaining a gap between the diaphragm plate and the base electrode, and a conductive guard substrate to support the sensor body. The sidewall layer includes a guard electrode layer and upper and lower electrically insulating layers to electrically insulate the guard electrode layer. An electrically insulating layer is between the guard substrate and the sensor body to electrically insulate the guard substrate. The guard substrate is electrically connected to the guard electrode layer to function as a guard electrode together with the guard electrode layer.