公开(公告)号：US20220190230A1

公开(公告)日：2022-06-16

申请号：US17685436

申请日：2022-03-03

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yoshihiro YOSHIDA ,  Koichi YOSHIDA

IPC: H01L41/053 ,  H01L41/113 ,  H01L41/23

Abstract: A semiconductor device includes a base, a detector on the base and including a first surface on which a detection portion is provided, and a resin package on the base and including an exposure hole to externally expose the detection portion of the detector. At least a portion of an outer peripheral edge of the first surface of the detector is exposed in the exposure hole. The resin package includes a depressed portion along the portion of the outer peripheral edge that is exposed in the exposure hole.

公开(公告)号：US20200381371A1

公开(公告)日：2020-12-03

申请号：US16997984

申请日：2020-08-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yoshihiro YOSHIDA ,  Koichi YOSHIDA

IPC: H01L23/00 ,  G01L19/14 ,  H01L23/31

Abstract: A semiconductor device includes a base substrate, a detection device provided on the base substrate and including a detector, a first connector electrically connecting the base substrate and the detection device, and a resin package provided on the base substrate and embedded with the detection device and the first connector. The resin package includes an exposure hole exposing the detector of the detection device to the outside, and a concave-convex portion.

公开(公告)号：US20240167901A1

公开(公告)日：2024-05-23

申请号：US18423455

申请日：2024-01-26

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Mari OTA ,  Koichi YOSHIDA ,  Ryohei HAMAZAKI

IPC: G01L9/00

CPC classification number: G01L9/0072

Abstract: A pressure-sensing element includes a membrane, a substrate, a guard, and a base. The membrane includes a diaphragm. The substrate is opposite to the membrane in a thickness direction. The guard is between the membrane and the substrate and is bonded to the membrane and the substrate. The guard has a closed shape. The base is in an enclosed space defined by the membrane, the substrate, and the guard. The base is bonded to the membrane and is separated from the substrate and the guard. The base includes a first electrode opposed to the diaphragm with a pressure reference chamber between the first electrode and the diaphragm to provide electrostatic capacitance. The base except for the first electrode is bonded to the membrane. A trench extends in the thickness direction entirely through the membrane and partially through the guard.

公开(公告)号：US20230146158A1

公开(公告)日：2023-05-11

申请号：US18093354

申请日：2023-01-05

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Kaoru KISHIGUI ,  Koichi YOSHIDA

IPC: G01L9/00 ,  B81B7/00 ,  B81C1/00

CPC classification number: G01L9/0072 ,  B81B7/0048 ,  B81B7/0058 ,  B81B7/0064 ,  B81C1/00333 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81B2203/04 ,  B81C2201/016 ,  B81C2203/0118

Abstract: A pressure sensor structure includes a sensor body including a diaphragm plate that functions as a sense electrode, a base electrode that faces the diaphragm plate, and a sidewall layer maintaining a gap between the diaphragm plate and the base electrode, and a conductive guard substrate to support the sensor body. The sidewall layer includes a guard electrode layer and upper and lower electrically insulating layers to electrically insulate the guard electrode layer. An electrically insulating layer is between the guard substrate and the sensor body to electrically insulate the guard substrate. The guard substrate is electrically connected to the guard electrode layer to function as a guard electrode together with the guard electrode layer.

公开(公告)号：US20130249649A1

公开(公告)日：2013-09-26

申请号：US13900705

申请日：2013-05-23

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hiroshi KAWAI ,  Koichi YOSHIDA ,  Naoto YATANI ,  Makoto INAI

IPC: H03H9/54

CPC classification number: H03H9/547 ,  H03H3/04 ,  H03H9/0547 ,  H03H9/172

Abstract: A bulk acoustic wave resonator includes a substrate, a resonator section in which a piezoelectric film is sandwiched between a pair of electrodes, and a vibration region where the electrodes overlap when viewed in a film thickness direction is defined, an elastically deformable support section that connects the substrate and the resonator section, a membrane arranged between the resonator section and the substrate to face the vibration region of the resonator section and be fixed on the substrate with a space in between, and driver sections that are defined in the resonator section and the substrate adjacent to the vibration region and the membrane, and that move the resonator section toward and away from the substrate. The vibration region of the resonator section contacts the membrane when the driver sections move the resonator section close to the substrate.

Abstract translation: 一种体声波谐振器包括：基板，其中压电膜夹在一对电极之间的谐振器部分和当在膜厚度方向上观察时电极重叠的振动区域;可弹性变形的支撑部分，其连接 基板和谐振器部分，布置在谐振器部分和基板之间的膜，以面对谐振器部分的振动区域并且在其间具有空间而固定在基板上，并且在谐振器部分和 基板，邻近振动区域和膜，并且使谐振器部分朝向和远离基板移动。 当驱动器部分使谐振器部分靠近基板移动时，谐振器部分的振动区域接触膜。

公开(公告)号：US20210372876A1

公开(公告)日：2021-12-02

申请号：US17399228

申请日：2021-08-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Ryosuke NIWA ,  Koichi YOSHIDA

IPC: G01L9/00

Abstract: A pressure sensor includes a base substrate, a first insulating layer at the base substrate, a stationary electrode at the first insulating layer, a side-wall portion around the stationary electrode at the first insulating layer, and a membrane having electrical conductivity, facing the stationary electrode across a space, and supported by the side-wall portion. The side-wall portion includes a shield electrode on the first insulating layer and a second insulating layer on the shield electrode. A distance between the stationary electrode and the membrane is less than a distance between the shield electrode and the membrane.

公开(公告)号：US20150204744A1

公开(公告)日：2015-07-23

申请号：US14600240

申请日：2015-01-20

Applicant: MURATA MANUFACTURING CO., LTD.

Inventor： Heikki KUISMA ,  Koichi YOSHIDA

IPC: G01L9/00

CPC classification number: G01L9/0072 ,  G01L9/0041

Abstract: A microelectromechanical pressure sensor structure that comprises a planar base, a side wall layer and a diaphragm plate. The side wall layer forms side walls that extend away from the planar base into contact with the diaphragm plate. The side wall layer is formed of at least three layers, a first layer and a second layer of insulating material and a third layer of conductive material, wherein the third layer is between the first layer and the second layer. The conducting layer provides a shield electrode within the isolating side wall layer. This shield electrode is adapted to reduce undesired effects to the capacitive measurement results.

Abstract translation: 一种微机电压力传感器结构，其包括平面基座，侧壁层和隔膜板。 侧壁层形成从平面基部延伸离开与隔膜板接触的侧壁。 侧壁层由至少三层，第一层和第二绝缘材料层和第三导电材料层形成，其中第三层在第一层和第二层之间。 导电层在隔离侧壁层内提供屏蔽电极。 该屏蔽电极适于减少对电容测量结果的不期望的影响。