公开(公告)号：US20250125139A1

公开(公告)日：2025-04-17

申请号：US18682040

申请日：2022-06-23

Applicant: NEXTIN, INC.

Inventor： Seoung-Ju NA ,  Heung-Gyoon PARK

IPC: H01J65/04 ,  H01J61/02 ,  H01J61/34

Abstract: An apparatus for removing static electricity of a semiconductor substrate, which removes static electricity embedded inside a thin film on the semiconductor substrate by emitting vacuum ultraviolet (VUV) light to the semiconductor substrate disposed inside a vacuum chamber. The apparatus includes: a VUV generator disposed at an upper side of the vacuum chamber and provided with a VUV lamp configured to emit small-area VUV light into an inside of the vacuum chamber; and a light diffusion unit disposed below the VUV generator and configured to diffuse incident VUV light into a wide area and output the diffused VUV light to the semiconductor substrate disposed below the light diffusion unit.