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公开(公告)号:US09212424B1
公开(公告)日:2015-12-15
申请号:US14721171
申请日:2015-05-26
Applicant: nGimat Co.
Inventor: Andrew Tye Hunt , Stephen Johnson , Ganesh Venugopal
IPC: H01L21/326 , C23C24/08 , H01L21/02
CPC classification number: C23C24/082 , C23C24/087 , H01J37/248 , H01J37/32027 , H01J37/32036 , H01J37/32064 , H01J37/32449 , H01J2237/332 , H01J2237/336 , H01L21/0237 , H05H1/48
Abstract: The present disclosure is directed to an apparatus and method of sintering inorganic powder coatings on substrates, and includes a flame and an electric plasma. The method is capable of being used in an open atmospheric environment. The substrate is electrically conductive and is used as one electrode while the flame is used as the other electrode that is moved over the areas of the powder coating to be sintered. An electrical current is used to cause a plasma produced through the flame, resulting in a combined energy and temperature profile sufficient for inorganic powder-powder and powder-substrate bonding. This method is referred to as “flame-assisted flash sintering” (FAFS).
Abstract translation: 本公开涉及一种在基底上烧结无机粉末涂层的装置和方法,并且包括火焰和电等离子体。 该方法能够在开放的大气环境中使用。 基板是导电的,并且用作一个电极,而火焰用作在待烧结的粉末涂层的区域上移动的另一个电极。 使用电流来引起通过火焰产生的等离子体,从而产生足够的无机粉末粉末和粉末 - 基底粘合的能量和温度分布。 该方法称为“火焰辅助闪蒸烧结”(FAFS)。
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公开(公告)号:US20150361561A1
公开(公告)日:2015-12-17
申请号:US14721171
申请日:2015-05-26
Applicant: NGIMAT CO.
Inventor: Andrew Tye Hunt , Stephen Johnson , Ganesh Venugopal
CPC classification number: C23C24/082 , C23C24/087 , H01J37/248 , H01J37/32027 , H01J37/32036 , H01J37/32064 , H01J37/32449 , H01J2237/332 , H01J2237/336 , H01L21/0237 , H05H1/48
Abstract: The present disclosure is directed to an apparatus and method of sintering inorganic powder coatings on substrates, and includes a flame and an electric plasma. The method is capable of being used in an open atmospheric environment. The substrate is electrically conductive and is used as one electrode while the flame is used as the other electrode that is moved over the areas of the powder coating to be sintered. An electrical current is used to cause a plasma produced through the flame, resulting in a combined energy and temperature profile sufficient for inorganic powder-powder and powder-substrate bonding. This method is referred to as “flame-assisted flash sintering” (FAFS).
Abstract translation: 本公开涉及一种在基底上烧结无机粉末涂层的装置和方法,并且包括火焰和电等离子体。 该方法能够在开放的大气环境中使用。 基板是导电的,并且用作一个电极,而火焰用作在待烧结的粉末涂层的区域上移动的另一个电极。 使用电流来引起通过火焰产生的等离子体,从而产生足够的无机粉末粉末和粉末 - 基底粘合的能量和温度分布。 该方法称为“火焰辅助闪蒸烧结”(FAFS)。
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公开(公告)号:US20160348247A1
公开(公告)日:2016-12-01
申请号:US14931761
申请日:2015-11-03
Applicant: nGimat Co.
Inventor: Andrew Tye Hunt , Stephen Johnson , Ganesh Venugopal
IPC: C23C24/08 , H01J37/248 , H01J37/32
CPC classification number: C23C24/082 , C23C24/087 , H01J37/248 , H01J37/32027 , H01J37/32036 , H01J37/32064 , H01J37/32449 , H01J2237/332 , H01J2237/336 , H01L21/0237 , H05H1/48
Abstract: The present disclosure is directed to an apparatus and method of sintering inorganic powder coatings on substrates, and includes a flame and an electric plasma. The method is capable of being used in an open atmospheric environment. The substrate is electrically conductive and is used as one electrode while the flame is used as the other electrode that is moved over the areas of the powder coating to be sintered. An electrical current is used to cause a plasma produced through the flame, resulting in a combined energy and temperature profile sufficient for inorganic powder-powder and powder-substrate bonding. This method is referred to as “flame-assisted flash sintering” (FAFS).
Abstract translation: 本公开涉及一种在基底上烧结无机粉末涂层的装置和方法,并且包括火焰和电等离子体。 该方法能够在开放的大气环境中使用。 基板是导电的,并且用作一个电极,而火焰用作在待烧结的粉末涂层的区域上移动的另一个电极。 使用电流来引起通过火焰产生的等离子体,从而产生足够的无机粉末粉末和粉末 - 基底粘合的能量和温度分布。 该方法称为“火焰辅助闪蒸烧结”(FAFS)。
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