公开(公告)号：US20240013033A1

公开(公告)日：2024-01-11

申请号：US18163603

申请日：2023-02-02

Applicant: NVIDIA Corp.

Inventor： Haoyu Yang ,  Haoxing Ren

IPC: G06N3/0464 ,  G03F1/36

CPC classification number: G06N3/0464 ,  G03F1/36

Abstract: A circuit mask optimizer utilizes a Convolutional Fourier Neural Operator (CFNO) to efficiently learn layout tile dependencies, enabling stitch-less largescale mask optimization with limited intervention of legacy tools. Litho-guided self training via a trained machine learning model provides non-convex optimization, enabling iterative model and dataset refinements at a substantial performance improvement over conventional solutions.