公开(公告)号：US20220093360A1

公开(公告)日：2022-03-24

申请号：US17412775

申请日：2021-08-26

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi YASUI

IPC: H01J37/304

Abstract: In one embodiment, a data generation method is for calculating a coverage of a polygon in each of a plurality of pixels obtained by dividing a target to be irradiated with a charged particle beam into predetermined sizes. The method includes dividing a parametric curve that defines a pattern shape into a plurality of parametric curves, calculating, for each of the plurality of parametric curves, an area of a region surrounded by a segment connecting end points among control points of the parametric curve and the parametric curve, calculating positions of vertexes of a figure having an area equivalent to the calculated area and having, as one side thereof, the segment connecting the end points, and generating the polygon by using the vertexes.

公开(公告)号：US20150279617A1

公开(公告)日：2015-10-01

申请号：US14619281

申请日：2015-02-11

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi YASUI

IPC: H01J37/30 ,  H01J37/317

CPC classification number: H01J37/3005 ,  G03F1/84 ,  H01J37/3026 ,  H01J37/3174 ,  H01J2237/22 ,  H01J2237/3175 ,  H01J2237/31762 ,  H01J2237/31764 ,  H01J2237/31776 ,  H01J2237/31798

Abstract: A charged particle beam drawing apparatus of an embodiment includes: a graphic information file for storing graphic information for each of elements (for example, patterns) at a level underlying an element (for example, a cell) at a particular level in hierarchically-structured drawing data which has elements at each level; and an attribute information file for storing attribute information to be given to each of the elements at the underlying level in association with information (for example, an index number) on the element at the particular level.

Abstract translation: 实施例的带电粒子束描绘装置包括：图形信息文件，用于在分层结构化的特定级别的元素（例如，单元）的下层的级别存储用于每个元素（例如，图案）的图形信息 绘制在每个级别具有元素的数据; 以及属性信息文件，用于存储要在特定级别的元素上与信息（例如，索引号）相关联地提供给基础级别的每个元素的属性信息。

公开(公告)号：US20250014239A1

公开(公告)日：2025-01-09

申请号：US18668406

申请日：2024-05-20

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi YASUI

IPC: G06T11/20

Abstract: A drawing data examination method acquires coordinates representing the positions of a first control point group forming a B-spline curve; calculates a B-spline curve intersection ratio; converts the coordinates of the first control point group into the coordinates of a second control point group of a Bezier curve when the B-spline curve intersection ratio exceeds a threshold value, and determines whether the figure after the coordinate conversion has an intersection; and determines whether the figure of the drawing data has an intersection based on the first control point group when the B-spline curve intersection ratio is equal to or smaller than the threshold value, and converts the coordinates of the first control point group into the coordinates of the second control point group when the figure of the drawing data has an intersection, and determines whether the figure after the coordinate conversion has an intersection.

公开(公告)号：US20230369015A1

公开(公告)日：2023-11-16

申请号：US18299749

申请日：2023-04-13

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi YASUI ,  Yasuo KATO

IPC: H01J37/317 ,  H01J37/302 ,  H01J37/04

CPC classification number: H01J37/3177 ,  H01J37/3026 ,  H01J37/045 ,  H01J2237/31762

Abstract: In one embodiment, a coverage calculating method is for calculating a coverage of a pattern in each of pixel regions obtained by dividing a writing region onto which the pattern is to be written by irradiation with a charged particle beam. Each of the pixel regions has a predetermined size. The method includes generating a plurality of first pixel regions by virtually dividing the writing region, the first pixel regions each having a first size, calculating a coverage of a pattern in the first pixel region, generating a plurality of second pixel regions by virtually dividing the first pixel region, the second pixel regions each having a second size smaller than the first size, selecting a second pixel region approximating a pattern shape in the first pixel region, and calculating a coverage in the selected second pixel region.

公开(公告)号：US20160103945A1

公开(公告)日：2016-04-14

申请号：US14794060

申请日：2015-07-08

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi YASUI ,  Shigehiro HARA

IPC: G06F17/50 ,  H01J37/302 ,  H01J37/26 ,  H01J37/317

CPC classification number: G06F17/5081 ,  G06F17/5072 ,  H01J37/3026 ,  H01J37/3177 ,  H01J2237/31764

Abstract: In one embodiment, a method of generating write data generates write data for a multi charged particle beam writing apparatus. The method includes dividing a polygonal figure included in design data into a plurality of figure segments including trapezoids each having a pair of parallel opposite sides extending in a first direction, the trapezoids being connected in a second direction orthogonal to the first direction such that adjacent trapezoids share the side extending in the first direction as a common side, and generates the write data including position information of a common vertex of a first trapezoid and a second trapezoid next to the first trapezoid expressed by a displacement in the first and second directions from a position of a common vertex of the second trapezoid and a third trapezoid next to the second trapezoid.

Abstract translation: 在一个实施例中，生成写入数据的方法产生用于多带电粒子束写入装置的写入数据。 该方法包括将包括在设计数据中的多边形图形分成多个图形段，每个图形段包括梯形，每个梯形具有沿第一方向延伸的一对平行的相对侧，所述梯形沿与第一方向正交的第二方向连接，使得相邻的梯形 共享作为公共侧在第一方向上延伸的一侧，并且生成写入数据，其包括由第一和第二方向上的位移表示的第一梯形旁边的第一梯形和第二梯形的公共顶点的位置信息， 第二梯形的公共顶点的位置和与第二梯形相邻的第三梯形。

公开(公告)号：US20200278612A1

公开(公告)日：2020-09-03

申请号：US16646860

申请日：2018-08-03

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi YASUI ,  Noriaki NAKAYAMADA

IPC: G03F7/20 ,  H01J37/305 ,  H01J37/30

Abstract: A writing data generating method for generating writing data used in a multi charged particle beam writing apparatus, that can suppress a data amount and a calculation amount in a multi charged particle beam writing apparatus generated from design data including a figure having a curve. The method includes calculating a pair of curves each representing a curve portion of a figure included in design data, the curves each being defined by a plurality of control points, and generating the writing data by expressing a position of a second control point adjacent in a traveling direction of the curve to a first control point of the plurality of control points as a displacement from the first control point in the traveling direction of the curve and a displacement from the first control point in a direction orthogonal to the traveling direction.

公开(公告)号：US20160155609A1

公开(公告)日：2016-06-02

申请号：US14944718

申请日：2015-11-18

Applicant: NuFlare Technology, Inc.

Inventor： Shigehiro HARA ,  Kenichi YASUI ,  Yasuo KATO

IPC: H01J37/302 ,  H01J37/317

CPC classification number: H01J37/3026 ,  H01J2237/31764 ,  H01J2237/31774

Abstract: A method for generating writing data to be input to a writing apparatus, which writes a figure pattern on a target object by using a charged particle beam, includes generating the writing data, based on a data format that sequentially defines figure information on a figure pattern, and dose information which is defined before or after the figure information and indicates one of a dose and a dose modulation rate for modulating a dose, for a position of each of corner points of the figure pattern.

Abstract translation: 一种用于生成要输入到写入装置的写入数据的方法，该写入装置通过使用带电粒子束将图形模式写入目标对象，包括基于顺序地定义图形模式上的图形信息的数据格式生成写入数据 以及在图形信息之前或之后定义的剂量信息，并且指示用于调整剂量的剂量和剂量调制率之一，用于图形图案的每个角点的位置。

公开(公告)号：US20160110491A1

公开(公告)日：2016-04-21

申请号：US14819931

申请日：2015-08-06

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi YASUI

IPC: G06F17/50 ,  H01J37/302 ,  H01J37/317

CPC classification number: G06F17/5081 ,  H01J37/3026 ,  H01J37/3177 ,  H01J2237/31762 ,  H01J2237/31764

Abstract: In one embodiment, a writing data verification method is for verifying a conversion error due to data conversion from first writing data in a vector format based on design data to second writing data in a pixel format. The method includes converting the second writing data to third writing data in a vector format, performing an exclusive OR operation on the first writing data and the third writing data, enlarging a graphic of the first writing data to obtain an enlarged graphic and generating a tolerance region graphic from a difference between the enlarged graphic and the graphic of the first writing data, and detecting a defect by performing a mask process on a graphic generated by the exclusive OR operation with the tolerance region graphic.

Abstract translation: 在一个实施例中，写入数据验证方法用于基于设计数据从第一次以矢量格式写入数据，以像素格式写入数据来验证由于数据转换而导致的转换错误。 该方法包括将第二写入数据转换为向量格式的第三写入数据，对第一写入数据和第三写入数据执行异或运算，放大第一写入数据的图形以获得放大图形并产生公差 区域图形，根据第一写入数据的放大图形和图形之间的差异，以及通过对与公差区域图形进行异或运算生成的图形执行掩码处理来检测缺陷。

公开(公告)号：US20180366297A1

公开(公告)日：2018-12-20

申请号：US16000946

申请日：2018-06-06

Applicant: NuFlare Technology, Inc.

Inventor： Kenichi YASUI

IPC: H01J37/317 ,  H01J37/30

Abstract: In one embodiment, a data processing method is provided for generating writing data from design data and registering the writing data in a charged particle beam writing apparatus. The method includes generating the writing data by performing a plurality of conversion processes on a plurality of pieces of first frame data obtained through division of the design data corresponding to one chip, and performing a plurality of preprocessing processes on a plurality of pieces of second frame data obtained through division of the writing data of the chip, and registering the writing data of the chip in the charged particle beam writing apparatus. The plurality of conversion processes are performed in frame-basis pipeline processing, and the plurality of preprocessing processes are performed in frame-basis pipeline processing. The writing data is registered in the charged particle beam writing apparatus on a frame basis.

公开(公告)号：US20180060474A1

公开(公告)日：2018-03-01

申请号：US15691951

申请日：2017-08-31

Applicant: NuFlare Technology, Inc.

Inventor： Shigehiro HARA ,  Kenichi YASUI

IPC: G06F17/50

CPC classification number: G06F17/5045 ,  G03F1/78 ,  G06K9/4604 ,  G06K9/4647 ,  G06K9/52 ,  H01J37/3026 ,  H01J37/3177 ,  H01J2237/31762 ,  H01J2237/31764

Abstract: In one embodiment, a generating method of drawing data includes generating a pixel map that includes dose amount information on each of pixels obtained by dividing a drawing area on an object into a mesh, extracting, from the pixel map, an island-shaped pixel map which is a group of multiple pixels in which the dose amount information is not zero, determining an order of definition of the dose amount information on the pixels in the island-shaped pixel map, and generating a compressed pixel map including a size of the pixels, information indicating the order of definition, coordinates of a pixel which is first in the order of definition in the island-shaped pixel map, and the dose amount information on the pixels in the island-shaped pixel map, the dose amount information being continuously defined based on the order of definition.