公开(公告)号：US20020038510A1

公开(公告)日：2002-04-04

申请号：US09968878

申请日：2001-10-03

Applicant: ORBOTECH, LTD

Inventor： Nissim Savareigo ,  Hila Shteinberg

IPC: H01L021/00 ,  H01L021/66 ,  G01R031/26

CPC classification number: G06T7/0004 ,  G01N21/8851 ,  G06T7/60 ,  G06T2207/30141 ,  Y10T29/49004 ,  Y10T29/49155

Abstract: An automated optical inspection method detects width defects by employing locally applied width information. A defect determination is based on proximal width information of nearby parts of a conductor. Automated optical inspection systems inspect the surfaces of patterned objects for line width defects, employing line width data that is at least partially obtained automatically from analyzing a reference image of a non-defective patterned object.

Abstract translation: 自动光学检测方法通过采用局部应用的宽度信息来检测宽度缺陷。 缺陷确定是基于导体附近部分的近端宽度信息。 自动光学检查系统检查图形对象的表面，以获得线宽缺陷，采用从分析无缺陷图案对象的参考图像至少部分地获得的线宽数据。

公开(公告)号：US20010028454A1

公开(公告)日：2001-10-11

申请号：US09825493

申请日：2001-04-03

Applicant: ORBOTECH LTD.

Inventor： Nissim Savareigo

IPC: G01N021/00

CPC classification number: G01R31/309 ,  G01N21/95692 ,  H05K1/0269 ,  H05K3/0035

Abstract: An automated optical inspection system including a source of electromagnetic radiation for delivering a radiation beam on an article to be inspected, a plurality of sensors arranged with respect to the radiation beam for sensing a plurality of radiation properties associated with the radiation beam impinging at least at a zone of impingement on a substance found on the article to be inspected, the plurality of sensors including a luminescence sensor for sensing luminescence of the substance due to the beam impinging thereon and a reflectance sensor for sensing reflectance of the beam from the substance the sensors transmitting information signals based on the radiation properties sensed by the sensors and a processor in communication with the sensors operative to receive the information signals for a plurality of zones of impingement, to combine the signals from the sensors and to analyze them, and to generate an output indicating the presence of defects based on the analysis.

Abstract translation: 一种自动光学检测系统，包括用于将辐射束传送到待检查物品上的电磁辐射源，相对于辐射束布置的多个传感器，用于感测与辐射束相关联的多个辐射特性，该辐射光束至少撞击 在待检查物品上发现的物质上的冲击区域，所述多个传感器包括用于感测由于入射到其上的物体的物质的发光的发光传感器和用于感测来自物质的光束的反射率的反射率传感器 基于由传感器感测的辐射特性和与传感器通信的处理器发送信息信号，该传感器可操作以接收多个冲击区域的信息信号，以组合来自传感器的信号并对其进行分析，并产生 输出指示基于分析的缺陷的存在。

公开(公告)号：US20030025907A1

公开(公告)日：2003-02-06

申请号：US10259666

申请日：2002-09-27

Applicant: ORBOTECH LTD.

Inventor： Nissim Savareigo

IPC: G01N021/88

CPC classification number: G01R31/309 ,  G01N21/95692 ,  H05K1/0269 ,  H05K3/0035

Abstract: An automated optical inspection system including a source of electromagnetic radiation for delivering a radiation beam on an article to be inspected, a plurality of sensors arranged with respect to the radiation beam for sensing a plurality of radiation properties associated with the radiation beam impinging at least at a zone of impingement on a substance found on the article to be inspected, the plurality of sensors including a luminescence sensor for sensing luminescence of the substance due to the beam impinging thereon and a reflectance sensor for sensing reflectance of the beam from the substance the sensors transmitting information signals based on the radiation properties sensed by the sensors and a processor in communication with the sensors operative to receive the information signals for a plurality of zones of impingement, to combine the signals from the sensors and to analyze them, and to generate an output indicating the presence of defects based on the analysis.

公开(公告)号：US20030020905A1

公开(公告)日：2003-01-30

申请号：US10032098

申请日：2001-12-31

Applicant: Orbotech Ltd.

Inventor： Nissim Savareigo ,  Igor Markov ,  Dan Zemer

IPC: G01N021/00

CPC classification number: G01N21/95684

Abstract: A first inspection functionality is provided to obtain information about a first attribute at a conductor location on an electrical circuit. A second inspection functionality is provided to obtain information about a second attribute at the conductor location. A combination of first attribute information and second attribute information is analyzed to determine an inspection attribute of the conductor at the conductor location. Attribute information may relate to one or more of: reflectance, fluorescence or height.

Abstract translation: 提供第一检查功能以获得关于电路上的导体位置处的第一属性的信息。 提供第二检查功能以获得关于导体位置处的第二属性的信息。 分析第一属性信息和第二属性信息的组合以确定导体位置处的导体的检查属性。 属性信息可以涉及以下中的一个或多个：反射率，荧光或高度。

公开(公告)号：US20020039182A1

公开(公告)日：2002-04-04

申请号：US09939682

申请日：2001-08-28

Applicant: ORBOTECH, LTD.

Inventor： Nissim Savareigo ,  Igor Markov

IPC: G01N021/00

CPC classification number: G01N21/95684

Abstract: Surface dimension and footprint dimension values are determined by scanning a printed circuit board with a laser. Exposed substrate parts of the printed circuit board fluoresce significantly, emitting detectable luminance, while conductors do not. Conductors reflect the laser light much more strongly than the exposed substrate, especially at the substantially flat part of the top surface. Luminescence and reflectivity collectors provide signals indicative of the footprint and surface dimensions. This cross-sectional information is used in making adjustment determinations in the manufacturing process, and also decisions relating to repair or discard operations.

Abstract translation: 通过用激光扫描印刷电路板来确定表面尺寸和尺寸尺寸值。 印刷电路板的暴露的基板部分显着发出荧光，发射可检测的亮度，而导体不发光。 导体比暴露的基板更强烈地反射激光，特别是在顶表面的基本上平坦的部分。 发光和反射率收集器提供指示占地面积和表面尺寸的信号。 该横截面信息用于在制造过程中进行调整确定，以及关于修理或丢弃操作的决定。

公开(公告)号：US20010035267A1

公开(公告)日：2001-11-01

申请号：US09824500

申请日：2001-04-02

Applicant: ORBOTECH LTD.

Inventor： Nissim Savareigo

IPC: G01L021/30

CPC classification number: G01N21/95684

Abstract: Apparatus and method for post etching inspection of electrical circuits including an optical inspection assembly viewing an electrical circuit at various regions thereon and providing output indications of etching characteristics of the electrical circuit at the various regions and output circuitry receiving the output indications of etching characteristics of the electrical circuit at the various regions and providing an output indication of variations in the etching characteristics between at least some of the various regions.

Abstract translation: 电路的后蚀刻检查装置和方法，包括在其各个区域上观察电路的光学检查组件，并且提供在各个区域处的电路的蚀刻特性的输出指示，以及输出电路，其接收所述电路的蚀刻特性的输出指示 电路，并且提供在各个区域中的至少一些之间的蚀刻特性的变化的输出指示。