METHOD OF MANUFACTURING CELLULAR ELECTROPHYSIOLOGY SENSOR CHIP
    2.
    发明申请
    METHOD OF MANUFACTURING CELLULAR ELECTROPHYSIOLOGY SENSOR CHIP 审中-公开
    细胞生物传感器芯片制造方法

    公开(公告)号:US20130102099A1

    公开(公告)日:2013-04-25

    申请号:US13713065

    申请日:2012-12-13

    CPC classification number: H01L21/02356 G01N33/48728

    Abstract: A cellular electrophysiology sensor is adapted to measure an electrical change of a test cell. A chip for the sensor includes a diaphragm, and a thermally-oxidized film mainly containing silicon dioxide on the diaphragm. The diaphragm includes a silicon layer and a silicon dioxide layer on an upper surface of the silicon layer. A through-hole passing through the silicon layer and the silicon dioxide layer is formed. The through-hole has an opening which opens at the silicon dioxide layer and is adapted to capture the test cell. The thermally-oxidized film is provided on an inner wall surface of the through-hole, and unified with the silicon dioxide layer at the opening of the through-hole. This cellular electrophysiology sensor chip can stably capture the test cell and provides a gigaseal stably even if test cells have different properties.

    Abstract translation: 细胞电生理学传感器适于测量测试电池的电气变化。 用于传感器的芯片包括隔膜以及在隔膜上主要含有二氧化硅的热氧化膜。 隔膜在硅层的上表面上包括硅层和二氧化硅层。 形成穿过硅层和二氧化硅层的通孔。 通孔具有在二氧化硅层处开口并且适于捕获测试电池的开口。 热氧化膜设置在通孔的内壁表面上,并且在通孔的开口处与二氧化硅层一体化。 这种细胞电生理学传感器芯片可以稳定地捕获测试细胞,并且即使测试细胞具有不同的性质也能稳定地提供gigaseal。

    FIBROUS PROJECTIONS STRUCTURE
    3.
    发明申请
    FIBROUS PROJECTIONS STRUCTURE 有权
    弹性投影结构

    公开(公告)号:US20130040094A1

    公开(公告)日:2013-02-14

    申请号:US13651103

    申请日:2012-10-12

    Abstract: A silicon structure of the present invention is provided with a silicon substrate (1) to become a base, and a plurality of fibrous projections (2) made of silicon dioxide and directly joined to a silicon-made surface (1a) of the silicon substrate (1). By arbitrarily constructing an area where these fibrous projections (2) are formed in a predetermined area, it is possible to render the area to have at least either hydrophilicity or water retentivity, so as to provide a silicon structure useful for a variety of devices.

    Abstract translation: 本发明的硅结构设置有成为基底的硅基板(1)和由二氧化硅制成的直接接合到硅基板的硅制表面(1a)的多个纤维突起(2) (1)。 通过任意构造这些纤维状突起(2)形成在预定区域的区域,可以使该区域具有至少亲水性或保水性,以提供可用于各种装置的硅结构。

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