公开(公告)号：US20150087098A1

公开(公告)日：2015-03-26

申请号：US14386543

申请日：2013-03-19

Applicant: PANASONIC CORPORATION

Inventor： Yuko Kawanami ,  Ryuuta Yamada

IPC: H01L51/00 ,  F17D3/00 ,  H01L51/56

CPC classification number: H01L51/0029 ,  B01J3/006 ,  C23C14/564 ,  F04B37/14 ,  F17D3/00 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0021 ,  H01L51/5056 ,  H01L51/56 ,  Y10T137/0379

Abstract: A method for reducing an internal pressure of a vacuum chamber while preventing impurity contamination within the vacuum chamber as much as possible. The method includes: rough pumping reducing an internal pressure of a vacuum chamber (1) by using a roughing pump (2), the roughing pump (2) being a mechanical pump that is capable of reducing the internal pressure of the vacuum chamber (1) to be less than 15 Pa; main pumping reducing the internal pressure of the vacuum chamber (1) by using a main pump (3) after the rough pumping, the main pump (3) being a non-mechanical pump. Transition from the rough pumping to the main pumping is performed when the internal pressure of the vacuum chamber (1) is no less than 15 Pa.

Abstract translation: 一种减少真空室内部压力的方法，同时尽可能地防止真空室内的杂质污染。 该方法包括：粗抽泵通过使用粗抽泵（2）减小真空室（1）的内部压力，粗抽泵（2）是能够降低真空室（1）的内部压力的机械泵 ）小于15Pa; 主泵在粗抽后通过使用主泵（3）减压真空室（1）的内部压力，主泵（3）是非机械泵。 当真空室（1）的内部压力不小于15Pa时，执行从粗泵送到主泵送的过渡。

公开(公告)号：US08884276B2

公开(公告)日：2014-11-11

申请号：US13660291

申请日：2012-10-25

Applicant: Panasonic Corporation

Inventor： Takahiro Komatsu ,  Satoru Ohuchi ,  Ryuuta Yamada ,  Hirofumi Fujita ,  Shinya Fujimura ,  Seiji Nishiyama ,  Kenichi Nendai ,  Kou Sugano ,  Shuhei Yada

IPC: H01L35/24

CPC classification number: H01L27/3276 ,  H01L51/5088 ,  H05B33/26

Abstract: Provided is organic EL display panel and an organic EL display apparatus that can be driven at a low voltage and that exhibit excellent light-emitting efficiency. Included are a substrate, a first electrode, an auxiliary wiring, a hole injection layer, a functional layer, and a second electrode. The hole injection layer and the second electrode are formed to be continuous above the first electrode and above the auxiliary wiring. The second electrode and the auxiliary wiring are electrically connected by the hole injection layer in an organic EL display panel. The hole injection layer is a metal oxide film, and metal atoms constituting the metal oxide include both metal atoms at a maximum valence thereof and metal atoms at a valence less than the maximum valence. The metal oxide film includes a metal oxide crystal with a particle diameter on the order of nanometers.

Abstract translation: 提供了有机EL显示面板和可以以低电压驱动并且表现出优异的发光效率的有机EL显示装置。 包括衬底，第一电极，辅助布线，空穴注入层，功能层和第二电极。 空穴注入层和第二电极形成为在第一电极上方和辅助布线上方连续。 第二电极和辅助布线通过有机EL显示面板中的空穴注入层电连接。 空穴注入层是金属氧化物膜，构成金属氧化物的金属原子包含最高化合价的金属原子和小于最大化合价的金属原子。 金属氧化物膜包括粒径为约数量级的金属氧化物晶体。