公开(公告)号：US20150132878A1

公开(公告)日：2015-05-14

申请号：US14348103

申请日：2013-05-09

Applicant: PANASONIC CORPORATION

Inventor： Yuko Kawanami ,  Takako Kurosawa ,  Haruka Kusukame

IPC: H01L51/00 ,  H01L51/50 ,  H01L27/32 ,  H01L51/56

CPC classification number: H01L51/0029 ,  H01L27/3244 ,  H01L51/001 ,  H01L51/0025 ,  H01L51/0059 ,  H01L51/5012 ,  H01L51/5056 ,  H01L51/56

Abstract: Method for manufacturing organic EL element, including: reducing internal pressure of vacuum chamber by vacuum pump connected thereto in state where substrate with applied film formed thereon is placed in vacuum chamber, applied film having been formed by applying material of organic light-emitting layer to substrate; and purifying applied film having passed through reducing the internal pressure of the vacuum chamber. Diphenylamine is used in portion of vacuum pump that is connected to inside of vacuum chamber. Reducing internal pressure of vacuum chamber is performed such that molecules of diphenylamine fly from vacuum pump into vacuum chamber and some of molecules are taken into applied film, and purifying is performed so that content of diphenylamine in applied film is in range from more than 0 nmol/cm3 to 13.8 nmol/cm3.

Abstract translation: 用于制造有机EL元件的方法包括：在其上形成有基底的基板放置在真空室中的状态下，通过与其连接的真空泵降低真空室的内部压力，通过施加有机发光层的材料形成的涂布膜 基质; 并通过减压真空室的内部压力净化所施加的膜。 二苯胺用于连接到真空室内部的真空泵部分。 进行真空室的内部压力的降低，使得二苯胺的分子从真空泵飞入真空室，将一些分子吸入涂膜中，进行净化，使得涂膜中二苯胺的含量在0nmol以上 cm 3至13.8nmol / cm 3。

公开(公告)号：US20150087098A1

公开(公告)日：2015-03-26

申请号：US14386543

申请日：2013-03-19

Applicant: PANASONIC CORPORATION

Inventor： Yuko Kawanami ,  Ryuuta Yamada

IPC: H01L51/00 ,  F17D3/00 ,  H01L51/56

CPC classification number: H01L51/0029 ,  B01J3/006 ,  C23C14/564 ,  F04B37/14 ,  F17D3/00 ,  H01L27/3211 ,  H01L51/001 ,  H01L51/0021 ,  H01L51/5056 ,  H01L51/56 ,  Y10T137/0379

Abstract: A method for reducing an internal pressure of a vacuum chamber while preventing impurity contamination within the vacuum chamber as much as possible. The method includes: rough pumping reducing an internal pressure of a vacuum chamber (1) by using a roughing pump (2), the roughing pump (2) being a mechanical pump that is capable of reducing the internal pressure of the vacuum chamber (1) to be less than 15 Pa; main pumping reducing the internal pressure of the vacuum chamber (1) by using a main pump (3) after the rough pumping, the main pump (3) being a non-mechanical pump. Transition from the rough pumping to the main pumping is performed when the internal pressure of the vacuum chamber (1) is no less than 15 Pa.

Abstract translation: 一种减少真空室内部压力的方法，同时尽可能地防止真空室内的杂质污染。 该方法包括：粗抽泵通过使用粗抽泵（2）减小真空室（1）的内部压力，粗抽泵（2）是能够降低真空室（1）的内部压力的机械泵 ）小于15Pa; 主泵在粗抽后通过使用主泵（3）减压真空室（1）的内部压力，主泵（3）是非机械泵。 当真空室（1）的内部压力不小于15Pa时，执行从粗泵送到主泵送的过渡。

公开(公告)号：US08822986B2

公开(公告)日：2014-09-02

申请号：US13659178

申请日：2012-10-24

Applicant: Panasonic Corporation

Inventor： Yuko Kawanami ,  Shinichiro Ishino ,  Tomoki Masuda ,  Hirotaka Nanno ,  Noriyuki Matsusue

IPC: H01L35/24

CPC classification number: H01L51/50 ,  H01L27/3246 ,  H01L51/0005 ,  H01L51/0007 ,  H01L51/5088 ,  H01L51/56

Abstract: A functional layer of an organic light-emitting element is formed by using an ink including a first solvent and a second solvent having equal or similar boiling points, and a functional material. The first solvent is such that an imitatively formed functional layer formed by replacing the second solvent with the first solvent, in a light-emitting region of an organic light-emitting element, is thicker at both end portions than at a central portion and top surfaces of the end portions are positioned higher than a top surface of the central portion. The second solvent is such that an imitatively formed functional layer formed by replacing the first solvent with the second solvent, in a light-emitting region of an organic light-emitting element, is thicker at a central portion than at both end portions and a top surface of the central portion is positioned higher than top surfaces of the end portions.

Abstract translation: 有机发光元件的功能层通过使用包含第一溶剂和具有相同或相似沸点的第二溶剂的油墨和功能材料形成。 第一溶剂使得通过用有机发光元件的发光区域中的第一溶剂替换第二溶剂而形成的模仿功能层在两个端部处比在中心部分处更厚，并且顶表面 的端部被定位成高于中心部分的顶表面。 第二溶剂使得在有机发光元件的发光区域中通过用第二溶剂替换第一溶剂而形成的模仿功能层在中心部分比在两个端部处更厚，顶部 中心部分的表面被定位成高于端部的顶表面。

公开(公告)号：US20140202848A1

公开(公告)日：2014-07-24

申请号：US14237928

申请日：2013-06-06

Applicant: PANASONIC CORPORATION

Inventor： Yuko Kawanami

IPC: H01L51/56

CPC classification number: H01L51/56 ,  C23C14/564 ,  H01L51/0025 ,  H01L51/0059 ,  H01L51/50

Abstract: A method for using a vacuum apparatus that includes a vacuum chamber and a pump, the vacuum chamber housing an object, the pump reducing an internal pressure of the vacuum chamber, the method including: ventilating inside the vacuum chamber by introducing a gas into the vacuum chamber and discharging the gas from the vacuum chamber by causing the pump to reduce the internal pressure of the vacuum chamber. In the ventilating, a discharge rate at which molecules of the gas per unit volume are discharged is at least 3.3×10−5 mol/(s·L), and the temperature in the vacuum chamber is at least 15° C. and at most 80° C.

Abstract translation: 一种使用包括真空室和泵的真空装置的方法，所述真空室容纳物体，所述泵减小所述真空室的内部压力，所述方法包括：通过将气体引入所述真空中来在所述真空室内通风 并通过使泵减小真空室的内部压力从真空室排出气体。 在通气中，每单位体积的气体分子排出量为3.3×10 -5 mol /（s·L）以上，真空室内的温度为15℃以上 最多80°C