公开(公告)号：US12062525B2

公开(公告)日：2024-08-13

申请号：US17679900

申请日：2022-02-24

Applicant: PSK INC.

Inventor： Jong Chan Lee ,  Ju Young Park ,  Jun Young Cho ,  Hyeon Gyeong Shin

IPC: H01J37/32 ,  H01L21/687

CPC classification number: H01J37/32715 ,  H01J37/32568 ,  H01J37/32816 ,  H01L21/68742 ,  H01J2237/0206 ,  H01J2237/20235 ,  H01J2237/334

Abstract: A substrate treating apparatus includes a housing, treating space and support unit to support a substrate, dielectric plate, gas supply unit, and plasma source to generate a plasma and including a top edge electrode above the edge region supported by the support unit and bottom edge electrode below the edge region supported by the support unit, which includes a support plate having an inner space and vacuum hole that communicates with the inner space and sucking the substrate on the top surface. A lift pin assembly can transfer the substrate between an outside transfer unit and the support plate. A decompression unit can apply negative pressure to the inner space. The lift pin assembly includes a base plate and through hole penetrating the base plate to provide negative pressure in a region under the base plate to a region over the base plate. Lift pins protrude from the base plate and support a bottom substrate surface. A driver can lift/lower the base plate within the inner space.

公开(公告)号：US20230145538A1

公开(公告)日：2023-05-11

申请号：US17679900

申请日：2022-02-24

Applicant: PSK INC.

Inventor： Jong Chan Lee ,  Ju Young Park ,  Jun Young Cho ,  Hyeon Gyeong Shin

IPC: H01J37/32

CPC classification number: H01J37/32715 ,  H01J37/32568 ,  H01J37/32816 ,  H01J2237/20235 ,  H01J2237/334 ,  H01J2237/0206

Abstract: A substrate treating apparatus includes a housing, treating space and support unit to support a substrate, dielectric plate, gas supply unit, and plasma source to generate a plasma and including a top edge electrode above the edge region supported by the support unit and bottom edge electrode below the edge region supported by the support unit, which includes a support plate having an inner space and vacuum hole that communicates with the inner space and sucking the substrate on the top surface. A lift pin assembly can transfer the substrate between an outside transfer unit and the support plate. A decompression unit can apply negative pressure to the inner space. The lift pin assembly includes a base plate and through hole penetrating the base plate to provide negative pressure in a region under the base plate to a region over the base plate. Lift pins protrude from the base plate and support a bottom substrate surface. A driver can lift/lower the base plate within the inner space.