Hybrid pulsed valve for thin film coating and method
    1.
    发明授权
    Hybrid pulsed valve for thin film coating and method 失效
    混合脉冲阀用于薄膜涂层和方法

    公开(公告)号:US5403617A

    公开(公告)日:1995-04-04

    申请号:US121726

    申请日:1993-09-15

    Inventor: Peter D. Haaland

    Abstract: An apparatus for coating a substrate with a relatively thin, uniform film of a liquid on a substrate with a minimum of waste. The apparatus includes a droplet generator capable of generating droplets of the liquid at a predetermined rate and of a predetermined size, a pulsed gas jet and a computer control which sequentially triggers the droplet generator and gas jet such that droplets are generated, then contacted by the gas jet, which accelerates the droplets and propels the droplets to impact and coat the substrate. In a preferred embodiment of the invention, the droplet size and velocity are selected such that the droplets break up upon impact with the substrate without splashing or rippling. The apparatus and method are ideal for coating semiconductor wafers with a photoresist solution. Droplets with uniform size and controlled trajectories are generated, in one embodiment, with a piezoelectric droplet generator, and then accelerated to precisely defined velocities by the pulsed gas jet toward the surface to be coated. The kinetic energy of the droplets is adjusted to overcome the free energy associated with surface tension on impact. The collision of the droplet thus results in a uniform, thin coating of photoresist or other coating solution which may then be further processed by conventional techniques.

    Abstract translation: 一种用于以最少的废料在基材上用相对薄的液体膜涂覆基材的设备。 该装置包括能够以预定速率和预定尺寸产生液滴的液滴发生器,脉冲气体射流和计算机控制器,其顺序地触发液滴发生器和气体射流,使得产生液滴,然后由 气体喷射,其加速液滴并推动液滴冲击和涂覆基底。 在本发明的一个优选实施例中,选择液滴尺寸和速度使得当液滴冲击时液滴在不飞溅或起皱的情况下分解。 该装置和方法是用光致抗蚀剂溶液涂覆半导体晶片的理想选择。 在一个实施例中,利用压电液滴发生器产生具有均匀尺寸和受控轨迹的液滴,然后通过脉冲气体射流朝向待涂覆的表面加速至精确限定的速度。 调节液滴的动能以克服与冲击时的表面张力相关的自由能。 因此,液滴的碰撞导致光致抗蚀剂或其它涂层溶液的均匀的薄涂层,然后可以通过常规技术进一步加工。

    SYSTEM, DEVICE, AND METHOD FOR MEASUREMENT OF HAND HYGIENE TECHNIQUE
    2.
    发明申请
    SYSTEM, DEVICE, AND METHOD FOR MEASUREMENT OF HAND HYGIENE TECHNIQUE 审中-公开
    手持式卫生技术测量系统,装置和方法

    公开(公告)号:US20170046943A1

    公开(公告)日:2017-02-16

    申请号:US15338009

    申请日:2016-10-28

    Inventor: Peter D. Haaland

    CPC classification number: G08B21/245 A61B90/80 G01P15/18

    Abstract: A device, system, and method for evaluating compliance with a hand hygiene standard using acceleration measurements of the hand or wrist. The method is based on the scalar quantities vigor and/or rocking angle.

    Abstract translation: 用于通过手或手腕的加速度测量来评估手部卫生标准符合性的装置,系统和方法。 该方法基于标量数量和/或摇摆角度。

    Fire suppression systems
    3.
    发明授权

    公开(公告)号:US09242132B2

    公开(公告)日:2016-01-26

    申请号:US11929743

    申请日:2007-10-30

    Abstract: A method of fire suppression may include injecting a reactive agent into a reaction zone to produce a catalytically active species for fire suppression and conveying the catalytically active species to a fire to catalytically interfere with flame chemistry of the fire. Fire in a fuel tank may be suppressed by injecting the reactive agent into a convective flow of a mixture of fuel and oxidizer in a fuel tank, the reactive agent reacting in the fuel tank to release a species which catalytically interferes with flame chemistry to suppress fire in the fuel tank. Fire at an airplane crash may be suppressed by releasing the reactive agent from the container at the crash site to produce an active species to catalytically interfere with a fire at the crash site.

    Labile bromine fire suppressants
    4.
    再颁专利
    Labile bromine fire suppressants 有权
    不溶性溴消防剂

    公开(公告)号:USRE40651E1

    公开(公告)日:2009-03-10

    申请号:US10893705

    申请日:2004-07-16

    CPC classification number: A62D1/0028 A62D1/0014 A62D1/0092

    Abstract: A class of fire suppressant compounds which have labile bromine atoms bound to atoms other than carbon have been discovered to be more effective at suppressing fires than Halon 1211 and Halon 1301. Moreover, this class of fire suppressant compounds hydrolyze or oxidize rapidly in the troposphere and as a consequence thereof, they have minimal ozone depletion potential.

    Abstract translation: 已经发现一类具有与碳以外的原子结合的不稳定溴原子的灭火剂化合物比哈龙1211和哈龙1301更有效地抑制火灾。此外,这类灭火剂化合物在对流层中迅速水解或氧化, 作为其结果,它们具有最小的臭氧消耗潜力。

    Fire Suppression Systems
    5.
    发明申请

    公开(公告)号:US20210394001A1

    公开(公告)日:2021-12-23

    申请号:US17109791

    申请日:2020-12-02

    Abstract: A method of fire suppression may include injecting a reactive agent into a reaction zone to produce a catalytically active species for fire suppression and conveying the catalytically active species to a fire to catalytically interfere with flame chemistry of the fire. Fire in a fuel tank may be suppressed by injecting the reactive agent into a convective flow of a mixture of fuel and oxidizer in a fuel tank, the reactive agent reacting in the fuel tank to release a species which catalytically interferes with flame chemistry to suppress fire in the fuel tank. Fire at an airplane crash may be suppressed by releasing the reactive agent from the container at the crash site to produce an active species to catalytically interfere with a fire at the crash site.

    SYSTEM, DEVICE, AND METHOD FOR MEASUREMENT OF HAND HYGIENE TECHNIQUE
    6.
    发明申请
    SYSTEM, DEVICE, AND METHOD FOR MEASUREMENT OF HAND HYGIENE TECHNIQUE 有权
    手持式卫生技术测量系统,装置和方法

    公开(公告)号:US20160371960A1

    公开(公告)日:2016-12-22

    申请号:US14745754

    申请日:2015-06-22

    Inventor: Peter D. Haaland

    CPC classification number: G08B21/245 A61B90/80 G01P15/18

    Abstract: A device, system, and method for evaluating compliance with a hand hygiene standard using acceleration measurements of the hand or wrist. The method is based on the scalar quantities vigor and/or rocking angle.

    Abstract translation: 用于通过手或手腕的加速度测量来评估手部卫生标准符合性的装置,系统和方法。 该方法基于标量数量和/或摇摆角度。

    Fire suppression systems
    7.
    发明授权
    Fire suppression systems 有权
    消防系统

    公开(公告)号:US07886836B2

    公开(公告)日:2011-02-15

    申请号:US11456548

    申请日:2006-07-10

    Abstract: Fires may be detected and suppressed by placing fire detectors proximate natural flow paths from inlets to outlets of a fire zone. The fire detectors may be placed adjacent, and preferably downstream, of regions, along the flow paths, likely to become flame holding regions during fire in the fire zone. The fire may be suppressed, when detected, by catalytic reaction with species released by a reactive fire suppression agent which may be injected into the fire zone, preferably upstream of the potential flame holding regions.

    Abstract translation: 可以通过将火灾探测器靠近从入口到火区的出口的自然流动路径来检测和抑制火灾。 火灾探测器可以沿着流动路径邻近并且优选地位于下游,在火灾区域的火灾期间可能变成火焰保持区域。 当被检测时,可以通过与可以注入到火区中,优选在潜在的火焰保持区的上游的反应性灭火剂释放的物质的催化反应来抑制火焰。

    Fire suppression systems
    8.
    发明授权
    Fire suppression systems 有权
    消防系统

    公开(公告)号:US07757776B2

    公开(公告)日:2010-07-20

    申请号:US11331524

    申请日:2006-01-12

    Abstract: Reactive fire suppression transport agents may be used to release catalytic fire suppression agents, in reaction zones, which may then be transported by naturally occurring flows paths downstream to the vicinity of flame holding regions for fire suppression for example, in aircraft. The reactive fire suppression agents may be delivered in projectiles.

    Abstract translation: 反应性灭火输送剂可用于释放反应区中的催化灭火剂,然后反应区可以通过例如在飞行器中用于火焰抑制的火焰保持区域附近的自然发生的流动路径被输送。 反应性灭火剂可以在抛射物中递送。

    Solar blind optical filter
    9.
    发明授权
    Solar blind optical filter 失效
    太阳能盲光滤芯

    公开(公告)号:US6126869A

    公开(公告)日:2000-10-03

    申请号:US353436

    申请日:1999-07-15

    Inventor: Peter D. Haaland

    CPC classification number: G02B5/223 G02B5/208

    Abstract: A solar blind optical filter which absorbs solar UV radiation and transmits non-solar UV radiation includes a carrier material and a salt of a dithioic acid of the formula RCS.sub.2.sup.- X.sup.+ wherein R is an a organic substituent that does not absorb ultraviolet light at wavelengths between 260 nanometers and 300 nanometers and X is a counterion. The solar blind optical filters of the present invention are useful for observing non-solar ultraviolet radiation in the presence of solar radiation.

    Abstract translation: 吸收太阳UV辐射并透射非太阳紫外线辐射的太阳能盲板光学滤波器包括载体材料和式RCS2-X +的二硫酸的盐,其中R是不吸收紫外光的有机取代基,其在 260纳米和300纳米,X是抗衡离子。 本发明的太阳能遮光光学滤光器可用于在太阳辐射的存在下观察非太阳紫外线辐射。

    Methods and apparatus for reducing reflection from optical substrates
    10.
    发明授权
    Methods and apparatus for reducing reflection from optical substrates 失效
    减少光学基板反射的方法和装置

    公开(公告)号:US6096371A

    公开(公告)日:2000-08-01

    申请号:US990001

    申请日:1997-12-12

    Abstract: A method of coating optical substrates with anti-reflection (AR) coatings is described. The thickness and composition of the coating is determined by minimizing the product of the Fresnel reflection coefficients for a coating with the angular- and wavelength-dependent sensitivity of the human visual system to minimize the perceived reflectance for the coated article. A compact chamber is evacuated and flushed with chemically inert gas such as argon or nitrogen. One or more molecular precursors are deposited using plasma enhanced chemical vapor deposition (PECVD) to form AR films. Single-layer AR coatings based on fluoropolymer films of controlled thickness, as well as organic, organosilicon, and/or inorganic multilayers are described. Also provided is a method for monitoring film growth optically, using a polarized, light-emitting diode, a polarizing optical filter, and a photodiode. Feedback from the monitor is used to control the precursor flow to produce single layers and multilayers with prescribed anti-reflection properties.

    Abstract translation: 描述了用抗反射(AR)涂层涂覆光学基底的方法。 涂层的厚度和组成通过使用人类视觉系统的角度和波长依赖的灵敏度使涂层的菲涅耳反射系数的乘积最小化来最小化涂层制品的感知反射率来确定。 将紧凑的室抽真空并用化学惰性气体例如氩气或氮气冲洗。 使用等离子体增强化学气相沉积(PECVD)沉积一种或多种分子前体以形成AR膜。 描述了基于受控厚度的氟聚合物膜的单层AR涂层,以及有机,有机硅和/或无机多层。 还提供了使用偏振发光二极管,偏振滤光器和光电二极管光学地监测膜生长的方法。 来自监视器的反馈用于控制前体流以产生具有规定抗反射特性的单层和多层。

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