公开(公告)号：US20160299103A1

公开(公告)日：2016-10-13

申请号：US15026953

申请日：2014-10-02

Applicant: PHOTON DYNAMICS INC.

Inventor： Nedal Saleh ,  Daniel Toet ,  Enrique Sterling ,  Ronen Loewinger ,  Sriram Krishnaswami ,  Arie Glazer

IPC: G01N27/70 ,  H01J37/32

CPC classification number: G01N27/70 ,  G01R31/305 ,  H01J33/00 ,  H01J37/3233 ,  H01J37/32449 ,  H01J37/32825 ,  H01J2237/063 ,  H01J2237/164 ,  H01J2237/188 ,  H01J2237/317 ,  H05H2240/10 ,  H05H2245/123

Abstract: An electron-beam induced plasmas is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plasma column traverses the atmospheric space between the plasma source into the atmosphere and the device of interest and acts as an electrical path to the device of interest in such a way that a characteristic electrical signal can be collected from the device. Additionally, by controlling the gases flowing into the plasma column the probe may be used for surface modification, etching and deposition.

Abstract translation: 利用电子束诱导的等离子体来建立与感兴趣的器件的非机械的电接触。 该等离子体源可以被称为大气等离子体源，并且可以被配置为提供非常细的直径和可控特性的等离子体柱。 等离子体柱穿过等离子体源之间的大气空间到大气中和感兴趣的器件，并且作为到目的器件的电通路，使得可以从器件收集特征电信号。 此外，通过控制流入等离子体柱的气体，探针可用于表面改性，蚀刻和沉积。

公开(公告)号：US09523714B2

公开(公告)日：2016-12-20

申请号：US14155808

申请日：2014-01-15

Applicant: Photon Dynamics, Inc. ,  Orbotech Ltd.

Inventor： Alexander Kadyshevitch ,  Ofer Kadar ,  Arie Glazer ,  Ronen Loewinger ,  Abraham Gross ,  Daniel Toet

IPC: G01R31/305 ,  G01R1/07 ,  H01J33/00

CPC classification number: G01R1/072 ,  G01R31/305 ,  H01J33/00 ,  H01J2237/164

Abstract: A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.

Abstract translation: 非机械接触信号测量装置包括被测结构上的第一导体和与第一导体接触的气体。 至少一个电子束被引导到气体中，以便在电子束通过气体的气体中引入等离子体。 第二导体与等离子体电接触。 当等离子体被引导到第一导体上时，信号源通过第一导体，等离子体和第二导体耦合到电测量装置。 电测量装置响应于信号源。

公开(公告)号：US20140132299A1

公开(公告)日：2014-05-15

申请号：US14155808

申请日：2014-01-15

Applicant: Photon Dynamics, Inc.

Inventor： Alexander Kadyshevitch ,  Ofer Kadar ,  Arie Glazer ,  Ronen Loewinger ,  Abraham Gross ,  Daniel Toet

IPC: G01R1/07

CPC classification number: G01R1/072 ,  G01R31/305 ,  H01J33/00 ,  H01J2237/164

Abstract: A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.

Abstract translation: 非机械接触信号测量装置包括被测结构上的第一导体和与第一导体接触的气体。 至少一个电子束被引导到气体中，以便在电子束通过气体的气体中引入等离子体。 第二导体与等离子体电接触。 当等离子体被引导到第一导体上时，信号源通过第一导体，等离子体和第二导体耦合到电测量装置。 电测量装置响应于信号源。