公开(公告)号：US20160299103A1

公开(公告)日：2016-10-13

申请号：US15026953

申请日：2014-10-02

Applicant: PHOTON DYNAMICS INC.

Inventor： Nedal Saleh ,  Daniel Toet ,  Enrique Sterling ,  Ronen Loewinger ,  Sriram Krishnaswami ,  Arie Glazer

IPC: G01N27/70 ,  H01J37/32

CPC classification number: G01N27/70 ,  G01R31/305 ,  H01J33/00 ,  H01J37/3233 ,  H01J37/32449 ,  H01J37/32825 ,  H01J2237/063 ,  H01J2237/164 ,  H01J2237/188 ,  H01J2237/317 ,  H05H2240/10 ,  H05H2245/123

Abstract: An electron-beam induced plasmas is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plasma column traverses the atmospheric space between the plasma source into the atmosphere and the device of interest and acts as an electrical path to the device of interest in such a way that a characteristic electrical signal can be collected from the device. Additionally, by controlling the gases flowing into the plasma column the probe may be used for surface modification, etching and deposition.

Abstract translation: 利用电子束诱导的等离子体来建立与感兴趣的器件的非机械的电接触。 该等离子体源可以被称为大气等离子体源，并且可以被配置为提供非常细的直径和可控特性的等离子体柱。 等离子体柱穿过等离子体源之间的大气空间到大气中和感兴趣的器件，并且作为到目的器件的电通路，使得可以从器件收集特征电信号。 此外，通过控制流入等离子体柱的气体，探针可用于表面改性，蚀刻和沉积。

公开(公告)号：US11335222B2

公开(公告)日：2022-05-17

申请号：US16609653

申请日：2018-06-18

Applicant: PHOTON DYNAMICS, INC.

Inventor： Raul Albert Martin ,  Richard Norio Blythe

IPC: G09G3/00 ,  G01R31/58 ,  G01R31/308

Abstract: A system for inspection of electrical circuits, which electrical circuits include a multiplicity of conductors which are mutually spaced from each other, the system including a voltage driver operative to apply different electrical voltages to a plurality of conductors from among the multiplicity of conductors, which plurality of conductors are in spatial propinquity to each other, a sensor operative to sense at least one characteristic of a test region defined thereby with respect to the electrical circuits, the sensor lacking sufficient spatial resolution to distinguish between the locations of individual ones of the plurality of conductors and a defect indicator responsive to at least one output of the sensor for ascertaining whether a defect exists in the plurality of conductors.

公开(公告)号：US09523714B2

公开(公告)日：2016-12-20

申请号：US14155808

申请日：2014-01-15

Applicant: Photon Dynamics, Inc. ,  Orbotech Ltd.

Inventor： Alexander Kadyshevitch ,  Ofer Kadar ,  Arie Glazer ,  Ronen Loewinger ,  Abraham Gross ,  Daniel Toet

IPC: G01R31/305 ,  G01R1/07 ,  H01J33/00

CPC classification number: G01R1/072 ,  G01R31/305 ,  H01J33/00 ,  H01J2237/164

Abstract: A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.

Abstract translation: 非机械接触信号测量装置包括被测结构上的第一导体和与第一导体接触的气体。 至少一个电子束被引导到气体中，以便在电子束通过气体的气体中引入等离子体。 第二导体与等离子体电接触。 当等离子体被引导到第一导体上时，信号源通过第一导体，等离子体和第二导体耦合到电测量装置。 电测量装置响应于信号源。

公开(公告)号：US20150097592A1

公开(公告)日：2015-04-09

申请号：US14508425

申请日：2014-10-07

Applicant: Photon Dynamics, Inc.

Inventor： Chang Hee Lee ,  James Lee ,  Sung Jin Kim ,  Jongho Lee ,  Michael Sean Cassady ,  Nikolay Mokichev ,  Kent Nguyen ,  Daniel Toet

IPC: G09G3/00 ,  G01R31/44

CPC classification number: G09G3/006 ,  G09G2300/08

Abstract: A method of testing a flat panel display including an array of pixels and a peripheral circuit configured to provide signals to the pixels is disclosed. The method includes applying at least one test signal to the peripheral circuit, acquiring one or more voltage images of the peripheral circuit, and detecting a defect in the peripheral circuit based on the acquired voltage images.

Abstract translation: 公开了一种测试包括像素阵列的平板显示器和被配置为向像素提供信号的外围电路的方法。 该方法包括向外围电路施加至少一个测试信号，获取外围电路的一个或多个电压图像，以及基于所获取的电压图像检测外围电路中的缺陷。

公开(公告)号：US20040188643A1

公开(公告)日：2004-09-30

申请号：US10396760

申请日：2003-03-24

Applicant: Photon Dynamics, Inc.

Inventor： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

IPC: G01V008/00

CPC classification number: G01N21/95623 ,  G01N21/21 ,  G01N2021/1772 ,  G01N2021/8477 ,  G01N2201/0612 ,  G01N2201/0675

Abstract: In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

Abstract translation: 在具有周期结构的平面物体的检查系统中，使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波（OFF）在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查，同时保持高检测灵敏度。

公开(公告)号：US20240112935A1

公开(公告)日：2024-04-04

申请号：US18531653

申请日：2023-12-06

Applicant: Photon Dynamics, Inc.

Inventor： Neil Dang Nguyen ,  Kent Nguyen ,  Kiran Jitendra ,  Inho Chae ,  Gordon Yue

IPC: H01L21/67 ,  G01N21/88 ,  G01R31/26 ,  H01L21/677

CPC classification number: H01L21/67288 ,  G01N21/8851 ,  G01R31/2601 ,  H01L21/67784

Abstract: A system for glass substrate inspection, such as flat patterned media, includes an air table that holds the glass substrate. The air table includes chucks that emit gas as air bearings. A camera is disposed over the air table and moves in a direction across a width of a top surface of the glass substrate. An assembly includes a gripper and a probe bar configured to be transported under the camera. The gripper is configured to grip a bottom surface of the glass substrate opposite the top surface. The probe bar delivers driving signals to the glass substrate through a plurality of probe pins.

公开(公告)号：US20170146567A1

公开(公告)日：2017-05-25

申请号：US15359578

申请日：2016-11-22

Applicant: Photon Dynamics, Inc.

Inventor： Gordon Yue ,  Lloyd Russell Jones ,  Neil Dang Nguyen ,  Kiran Jitendra ,  Kent Nguyen ,  Steven Aochi

IPC: G01R1/067 ,  G09G3/00 ,  G01R1/073

CPC classification number: G01R1/06794 ,  G01R1/06722 ,  G01R1/07307 ,  G01R1/07364 ,  G02F1/1309 ,  G02F1/13458 ,  G09G3/006

Abstract: A probe system for facilitating inspection of a device under test comprising a plurality of panels, the probe system incorporating: a configurable universal probe bar comprising a plurality of probe blocks, the plurality of probe blocks comprising a plurality of probe pins positioned to simultaneously electrically engage a plurality of cell contact pads of the plurality of panels of the device under test to deliver a plurality of electrical test signals; and an alignment system configured to achieve an alignment of the plurality of probe pins with the plurality of the cell contact pads of the plurality of panels of the device under test.

公开(公告)号：US20140266244A1

公开(公告)日：2014-09-18

申请号：US14214958

申请日：2014-03-16

Applicant: Photon Dynamics Inc.

Inventor： Viacheslav MINAEV ,  Raul Albert MARTIN ,  Thomas E. WISHARD ,  Michael Sean CASSADY ,  Jongho LEE ,  Thomas H. BAILEY ,  Sriram KRISHNASWAMI

IPC: G01R31/28

CPC classification number: G09G3/006 ,  G09G3/3611

Abstract: Described are techniques for maintaining reliable and reproducible conditions for panel inspection, i.e. pixel and line defect detection, while at the same time preventing large-scale panel damage. One implementation involves an apparatus for identifying a defect in an electronic circuit incorporating a circuit driving module configured to apply an electrical test signal to the electronic circuit; a defect detection module configured to identify the defect in the electronic circuit based at least on the applied electrical test signal; a signal monitoring module configured to measure the electrical test signal at the electronic circuit; and a control module operatively coupled to the signal monitoring module and the circuit driving module and configured to control at least the circuit driving module based on the electrical test signal measured at the electronic circuit.

Abstract translation: 描述了用于维持面板检查的可靠和可再现的条件的技术，即像素和线缺陷检测，同时防止大规模面板损坏。 一种实施方式涉及一种用于识别电子电路中的缺陷的装置，该电子电路包括被配置为向电子电路施加电测试信号的电路驱动模块; 缺陷检测模块，被配置为至少基于所应用的电测试信号来识别所述电子电路中的缺陷; 信号监测模块，被配置为测量所述电子电路处的电测试信号; 以及控制模块，其可操作地耦合到所述信号监测模块和所述电路驱动模块，并且被配置为基于在所述电子电路处测量的所述电测试信号来至少控制所述电路驱动模块。

公开(公告)号：US20040028113A1

公开(公告)日：2004-02-12

申请号：US10419709

申请日：2003-04-18

Applicant: Photon Dynamics, Inc.

Inventor： Jerry Schlagheck ,  Marc Pastor ,  Marc Levesque ,  Alain Cournoyer

IPC: G01N017/00

CPC classification number: G01N25/72

Abstract: A method for inspecting an object and detecting defects is taught (BGA and Flip-Chip solder joints on a PCB particularly). The method comprises injecting a thermal stimulation on the object; capturing a sequence of consecutive infrared images of the object to record heat diffusion resulting from the heat pulse; comparing the heat diffusion on said object to a reference; and determining whether the object comprises any defects. Also described is a system comprising a mounting for mounting the object; a thermal stimulation module for applying a thermal stimulation to the bottom surface of the object; an infrared camera for capturing infrared images of the object on the top surface of the object to record a change in infrared radiation from the top surface resulting from the thermal stimulation; and a computer for comparing the change in infrared radiation within a region on the top surface to a reference and determining whether the object comprises any defects.

Abstract translation: 教导了一种检测物体和检测缺陷的方法（特别是PCB上的BGA和Flip-Chip焊点）。 该方法包括在物体上注入热刺激; 捕获对象的连续红外图像的序列，以记录由热脉冲引起的热扩散; 将所述物体上的热扩散与参考进行比较; 并确定对象是否包含任何缺陷。 还描述了一种包括用于安装物体的安装件的系统; 用于将热刺激施加到所述物体的底表面的热刺激模块; 用于捕获物体顶表面上的物体的红外图像以记录由热刺激产生的来自顶表面的红外辐射的变化的红外相机; 以及用于将顶表面上的区域中的红外辐射的变化与参考进行比较并确定对象是否包括任何缺陷的计算机。

公开(公告)号：US20170294291A1

公开(公告)日：2017-10-12

申请号：US15512529

申请日：2015-09-17

Applicant: ORBOTECH LTD. ,  PHOTON DYNAMICS, INC.

Inventor： Nedal SALEH ,  Unit B STERLING ,  Daniel TOET ,  Arie GLAZER ,  Ronen LOEWINGER ,  Sriram KRISHNASWAMI

IPC: H01J37/32

CPC classification number: H01J37/32825 ,  H05H2240/10

Abstract: An electron-beam induced plasma is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plasma column traverses the atmospheric space between the plasma source into the atmosphere and the device of interest and acts as an electrical path to the device of interest in such a way that a characteristic electrical signal can be collected from the device. Additionally, by controlling the gases flowing into the plasma column the probe may be used for surface modification, etching and deposition.