公开(公告)号：US20150309425A1

公开(公告)日：2015-10-29

申请号：US14432912

申请日：2013-09-27

Applicant: RUDOLPH TECHNOLOGIES, INC.

Inventor： J. Casey Donaher ,  Craig Simpson ,  Peter John Gerard Dufault

IPC: G03F7/20 ,  H02K41/02

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  H02K41/02 ,  H02K41/031 ,  H02K2201/18

Abstract: A planar motor system comprises a platen with a first planar motor component and a stage with a second planar motor component. The stage can move along a first cardinal axis or a second cardinal axis. The planar motor system further comprises a drive system. When the drive system is energized in a first drive configuration, it applies a first force and a second force. The first force and the second force are not parallel to any cardinal axis. A vector sum of the first force and the second force is parallel to the first cardinal axis. When the drive system is energized in a second drive configuration, it applies a third force and a fourth force. The third force and the fourth force are not parallel to any cardinal axis. A vector sum of the third force and the fourth force is parallel to the second cardinal axis.

Abstract translation: 平面电动机系统包括具有第一平面电动机部件的台板和具有第二平面电动机部件的台架。 舞台可以沿第一个主轴或第二个主轴移动。 平面马达系统还包括驱动系统。 当驱动系统在第一驱动配置中通电时，它施加第一力和第二力。 第一力和第二力不平行于任何主轴。 第一力和第二力的矢量和平行于第一个主轴。 当驱动系统在第二驱动配置中通电时，它施加第三力和第四力。 第三力和第四力不平行于任何基数轴。 第三力和第四力的矢量和平行于第二主轴。

公开(公告)号：US09625832B2

公开(公告)日：2017-04-18

申请号：US14432912

申请日：2013-09-27

Applicant: Rudolph Technologies, Inc.

Inventor： J. Casey Donaher ,  Craig Simpson ,  Peter John Gerard Dufault

IPC: H02K41/02 ,  G03F7/20 ,  H02K41/03

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  H02K41/02 ,  H02K41/031 ,  H02K2201/18

Abstract: A planar motor system comprises a platen with a first planar motor component and a stage with a second planar motor component. The stage can move along a first cardinal axis or a second cardinal axis. The planar motor system further comprises a drive system. When the drive system is energized in a first drive configuration, it applies a first force and a second force. The first force and the second force are not parallel to any cardinal axis. A vector sum of the first force and the second force is parallel to the first cardinal axis. When the drive system is energized in a second drive configuration, it applies a third force and a fourth force. The third force and the fourth force are not parallel to any cardinal axis. A vector sum of the third force and the fourth force is parallel to the second cardinal axis.