公开(公告)号：US20240150889A1

公开(公告)日：2024-05-09

申请号：US18502354

申请日：2023-11-06

Applicant: Resonac Corporation

Inventor： Chihiro TAMURA ,  Kengo NOGAMI ,  Kazuyuki YOSHINO

IPC: C23C14/56 ,  B05C13/00

CPC classification number: C23C14/568 ,  B05C13/00

Abstract: Falling of a substrate and deformation or breakage of the substrate are inhibited. A substrate holder includes a hole portion in which a disk-shaped substrate is placed upright, and at least four supporting members attached elastically-deformably on a periphery of the hole portion. Two of the four supporting members support disk-shaped substrate at first- and second-side circumferential end portions of disk-shaped substrate positioned at vertical-direction upper positions of disk-shaped substrate. Remaining two of the four supporting members support disk-shaped substrate at third- and fourth-side circumferential end portions of disk-shaped substrate positioned at vertical-direction lower positions of disk-shaped substrate. Central angle in disk-shaped substrate between either first- or second-side circumferential end portion and uppermost end portion of disk-shaped substrate is from 15° through 40°. Central angle in disk-shaped substrate between either third- or fourth-side circumferential end portion and lowermost end portion of disk-shaped substrate is from 10° through 15°.