公开(公告)号：US20190259172A1

公开(公告)日：2019-08-22

申请号：US16333511

申请日：2017-06-15

Applicant: SCREEN HOLDINGS CO., LTD.

Inventor： Hiroaki KAKUMA ,  Kensuke SAKATA

IPC: G06T7/70 ,  G01V8/10 ,  B05C11/00 ,  B05C5/00 ,  B05D1/00

Abstract: Provided is a technique for detecting whether or not there is a drop of a liquid in a non-supply period. There are performed the steps of: imaging in a non-supply period during which supply of liquid to a target nozzle among one or more nozzles is stopped while allowing an imaging visual field to include a dropping path through which the liquid drops from an opening of the target nozzle; and detecting whether or not there is a drop of the liquid using an imaging result in the imaging step. This enable detecting whether or not there is a drop of the liquid from the target nozzle in a non-supply period during which supply of the liquid toward the target nozzle is stopped.