公开(公告)号：US20190327824A1

公开(公告)日：2019-10-24

申请号：US16460509

申请日：2019-07-02

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Manami Taniguchi

IPC: H05H13/00 ,  H05H1/30 ,  H05H7/08

Abstract: A particle acceleration system includes an ion source that generates an ion, an accelerator that accelerates the ion, And a transporting unit that transports the ion from the ion source to the accelerator, in which an attachment angle and an attachment position of the ion source with respect to the transporting unit are able to be adjusted.

公开(公告)号：US11178748B2

公开(公告)日：2021-11-16

申请号：US16460509

申请日：2019-07-02

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Manami Taniguchi

IPC: H05H13/00 ,  H05H1/30 ,  H05H7/08

Abstract: A particle acceleration system includes an ion source that generates an ion, an accelerator that accelerates the ion, And a transporting unit that transports the ion from the ion source to the accelerator, in which an attachment angle and an attachment position of the ion source with respect to the transporting unit are able to be adjusted.

公开(公告)号：US11361934B2

公开(公告)日：2022-06-14

申请号：US16820016

申请日：2020-03-16

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Toshikazu Hiasa ,  Manami Taniguchi

IPC: H01J37/08 ,  H01J37/02 ,  H01J37/063 ,  H01J37/32

Abstract: There is provided an ion source device including a pair of first electrodes for emitting an electron, a second electrode that defines a region in which the electron is enclosed and to which raw material source gas is supplied, between the pair of first electrodes, and that has a hole portion through which an ion generated by collision between the electron and the material gas is extruded, an extraction electrode disposed apart from the second electrode along an extraction direction of the ion extracted from the second electrode so that a potential difference is formed between the second electrode and the extraction electrode, and an intermediate electrode disposed between the second electrode and the extraction electrode. A first potential difference between the second electrode and the intermediate electrode is greater than a second potential difference between the second electrode and the extraction electrode.

公开(公告)号：US20200219695A1

公开(公告)日：2020-07-09

申请号：US16820016

申请日：2020-03-16

Applicant: SUMITOMO HEAVY INDUSTRIES, LTD.

Inventor： Toshikazu Hiasa ,  Manami Taniguchi

IPC: H01J37/08 ,  H01J37/32 ,  H01J37/063 ,  H01J37/02

Abstract: There is provided an ion source device including a pair of first electrodes for emitting an electron, a second electrode that defines a region in which the electron is enclosed and to which raw material source gas is supplied, between the pair of first electrodes, and that has a hole portion through which an ion generated by collision between the electron and the material gas is extruded, an extraction electrode disposed apart from the second electrode along an extraction direction of the ion extracted from the second electrode so that a potential difference is formed between the second electrode and the extraction electrode, and an intermediate electrode disposed between the second electrode and the extraction electrode. A first potential difference between the second electrode and the intermediate electrode is greater than a second potential difference between the second electrode and the extraction electrode.