公开(公告)号：US20240060907A1

公开(公告)日：2024-02-22

申请号：US18340394

申请日：2023-06-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Youngsun Choi ,  Soonyang Kwon ,  Kwangrak Kim ,  Jiwoong Kim ,  Jangryul Park ,  Myungjun Lee

IPC: G01N21/95 ,  G01N21/31

CPC classification number: G01N21/9501 ,  G01N21/31 ,  G01N2201/068 ,  G02B21/248

Abstract: In a focus control method of a spectroscopic measuring apparatus, the spectroscopic measuring apparatus having a first objective lens and a second objective lens equipped with a microsphere is provided. A sample is placed on a stage. A spectrum is obtained while moving the second objective lens vertically downward. A light intensity function that changes with a distance from a sample surface is obtained from the spectrum. A focal position of the second objective lens is determined from a threshold value of the light intensity function.

公开(公告)号：US11320259B2

公开(公告)日：2022-05-03

申请号：US17185270

申请日：2021-02-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kwangrak Kim ,  Soonyang Kwon ,  Jangryul Park ,  Yunje Cho

IPC: G01B11/06 ,  H01L21/66 ,  G01B11/24 ,  H01L21/67

Abstract: A spectroscopic measuring apparatus and method are provided. The apparatus includes a first light source, object, microlens, and imaging lenses, an optical fiber, a spectrometer and a position controller. The object lens to allows light from the first light source to be incident on a stage configured to support a measurement object. The microlens is disposed between the object lens and the stage. The imaging lens images light reflected from the measurement object. The optical fiber has an input terminal disposed on a first image plane of the imaging lens. The spectrometer is disposed at an output terminal of the optical fiber. The position controller controls positions of the object lens, the microlens, and the optical fiber, and adjusts the position of the object lens so that a focus of the object lens is positioned at a virtual image position of a virtual image generated by the microlens.