公开(公告)号：US20230196581A1

公开(公告)日：2023-06-22

申请号：US17917872

申请日：2021-04-06

Applicant: TECHINSIGHTS INC.

Inventor： Christopher PAWLOWICZ ,  Michael GREEN ,  Alexander SORKIN ,  Christopher Kumar ANAND ,  Nabil David BASSIM ,  Yasamin SARTIPI

IPC: G06T7/11 ,  G06V10/24 ,  G06V10/74 ,  G01N23/04

CPC classification number: G06T7/11 ,  G06V10/242 ,  G06V10/761 ,  G01N23/04 ,  G06T2207/10061

Abstract: Described are systems and methods for segmenting images which comprise impinging a substrate surface with a particle beam at each of a plurality of sensing locations which define a subset of locations within an area of interest of the substrate surface. An intensity value associated with post-impingement particles resulting from the impinging is measured and the measured intensity based on the intensity value of the sensing location is calculated. For each of a plurality of estimated locations which define a further subset of said area of interest and a corresponding estimated intensity based on at least one of the following corresponding to one or more locations proximal to the estimated location is calculated. The plurality of estimated locations is each segmented based on the corresponding estimated intensity, each of the sensing locations, and based on the corresponding measured intensity, to correspond to one of the plurality of features.