公开(公告)号：US20170016742A1

公开(公告)日：2017-01-19

申请号：US14548237

申请日：2014-11-19

Applicant: The Regents of the University of California

Inventor： Andrei M. Shkel ,  Doruk Senkal ,  Mohammed Ahamed

IPC: G01C25/00 ,  G01C19/5691

CPC classification number: G01C25/00 ,  G01C19/5691

Abstract: A method of making a Coriolis vibratory gyroscope with a three dimensional mushroom resonator element includes defining a cavity in a substrate wafer; bonding a cap wafer onto the substrate over the cavity from which cap wafer the resonator element will be formed; heating the substrate and cap wafer to generate a pressure build-up within the cavity; plastically deforming the cap wafer by the pressure build-up to form the mushroom resonator element having a perimeter around the mushroom resonator element; releasing the three dimensional mushroom resonator element at the perimeter by selectively removing material so that the perimeter of mushroom resonator element is free to vibrate; and disposing a layer of conductive material on the mushroom resonator element to form electrodes thereon for use in driving and sensing vibrations of the mushroom resonator element and its perimeter. A microgyroscope made by such a method is also included within the embodiments.

Abstract translation: 制造具有三维蘑菇谐振器元件的科里奥利振动陀螺仪的方法包括在衬底晶片中限定空腔; 将覆盖晶片结合到衬底上方，该谐振器元件将从该晶圆形成; 加热衬底和盖子晶片以在空腔内产生压力积聚; 通过压力积聚使盖晶片塑性变形，以形成具有围绕蘑菇谐振器元件的周边的伞形谐振元件; 通过选择性地去除材料以使得蘑菇谐振器元件的周边自由振动而在周边释放三维蘑菇谐振器元件; 以及在所述蘑菇谐振器元件上设置一层导电材料以在其上形成用于驱动和感测所述蘑菇谐振器元件及其周边的振动的电极。 通过这种方法制造的微型陀螺仪也包括在实施例中。

公开(公告)号：US20160084654A1

公开(公告)日：2016-03-24

申请号：US14863172

申请日：2015-09-23

Applicant: The Regents of the University of California

Inventor： Doruk Senkal ,  Sergei A. Zotov ,  Andrei M. Shkel

IPC: G01C19/5747 ,  G01C19/5726

CPC classification number: G01C19/5747 ,  G01C19/5726

Abstract: The improvement includes an outer proof mass having a corresponding center of mass; and an inner proof mass having a corresponding center of mass, where the corresponding centers of mass of the outer proof mass and the inner proof mass are approximately co-located. Thus, a double Foucault pendulum is essentially provided in a micromachined gyroscope.

Abstract translation: 该改进包括具有相应质心的外部检验质量块; 以及具有对应质心的内部检验质量块，其中外部质量块和内部质量质量的相应质心大致相同。 因此，基本上在微加工陀螺仪中提供了双重福柯摆。

公开(公告)号：US20150354959A1

公开(公告)日：2015-12-10

申请号：US14734794

申请日：2015-06-09

Applicant: The Regents of the University of California

Inventor： Doruk Senkal ,  Andrei M. Shkel

IPC: G01C19/5684

CPC classification number: G01C19/5684

Abstract: A toroidal ring gyroscope with a robust outer perimeter anchor and a distributed suspension system. The vibrational energy in the design is concentrated towards the innermost ring, and the device is anchored at the outer perimeter. The distributed support structure prevents vibrational motion propagating to the outer anchor, which helps trap the vibrational energy within the gyroscope and provides a Q-factor of >100,000 at a compact size of 1760 μm. Due to the parametric pumping effect, energy added to each mode is proportional to the existing amplitude of the respective mode. As a result, errors associated with finding the orientation of the standing wave and x-y drive gain drift are bypassed. The toroidal ring gyroscope can be fabricated using any standard silicon on insulator process. Due to the high Q-factor and robust support structure, the device can potentially be instrumented in high-g environments that require high angular rate sensitivity.

Abstract translation: 环形环形陀螺仪，具有坚固的外周边锚和分布式悬挂系统。 设计中的振动能量集中在最内圈，并且该装置被固定在外周。 分布式支撑结构防止振动运动传播到外部锚固器，这有助于捕获陀螺仪内的振动能量，并在1760μm的紧凑尺寸下提供> 100,000的Q因子。 由于参数泵送效应，加到每个模式的能量与相应模式的现有幅度成比例。 结果，绕过与寻找驻波方向和x-y驱动增益漂移有关的误差。 环形环形陀螺仪可以使用任何标准的绝缘体上硅工艺制造。 由于高Q因子和坚固的支撑结构，该器件可能会在需要高角速率灵敏度的高g环境中进行测量。

公开(公告)号：US10247554B2

公开(公告)日：2019-04-02

申请号：US14863172

申请日：2015-09-23

Applicant: The Regents of the University of California

Inventor： Doruk Senkal ,  Sergei A. Zotov ,  Andrei M. Shkel

IPC: G01C19/5747 ,  G01C19/5726

Abstract: The improvement includes an outer proof mass having a corresponding center of mass; and an inner proof mass having a corresponding center of mass, where the corresponding centers of mass of the outer proof mass and the inner proof mass are approximately co-located. Thus, a double Foucault pendulum is essentially provided in a micromachined gyroscope.

公开(公告)号：US10167190B2

公开(公告)日：2019-01-01

申请号：US15432880

申请日：2017-02-14

Applicant: The Regents of the University of California

Inventor： Andrei A. Shkel ,  Alexandra Efimovskaya ,  Doruk Senkal

IPC: B81B7/00 ,  B81C1/00 ,  C03B23/035 ,  B81C3/00

Abstract: An apparatus and method for wafer-level hermetic packaging of MicroElectroMechanical Systems (MEMS) devices of different shapes and form factors is presented in this disclosure. The method is based on bonding a glass cap wafer with fabricated micro-glassblown “bubble-shaped” structures to the substrate glass/Si wafer. Metal traces fabricated on the substrate wafer serve to transfer signals from the sealed cavity of the bubble to the outside world. Furthermore, the method provides for chip-level packaging of MEMS three dimensional structures. The packaging method utilizes a micro glass-blowing process to create “bubbleshaped” glass lids. This new type of lids is used for vacuum packaging of three dimensional MEMS devices, using a standard commercially available type of package.

公开(公告)号：US09702728B2

公开(公告)日：2017-07-11

申请号：US14548237

申请日：2014-11-19

Applicant: The Regents of the University of California

Inventor： Andrei M. Shkel ,  Doruk Senkal ,  Mohammed Ahamed

IPC: G01C25/00 ,  G01C19/5691

CPC classification number: G01C25/00 ,  G01C19/5691

Abstract: A method of making a Coriolis vibratory gyroscope with a three dimensional mushroom resonator element includes defining a cavity in a substrate wafer; bonding a cap wafer onto the substrate over the cavity from which cap wafer the resonator element will be formed; heating the substrate and cap wafer to generate a pressure build-up within the cavity; plastically deforming the cap wafer by the pressure build-up to form the mushroom resonator element having a perimeter around the mushroom resonator element; releasing the three dimensional mushroom resonator element at the perimeter by selectively removing material so that the perimeter of mushroom resonator element is free to vibrate; and disposing a layer of conductive material on the mushroom resonator element to form electrodes thereon for use in driving and sensing vibrations of the mushroom resonator element and its perimeter. A microgyroscope made by such a method is also included within the embodiments.

公开(公告)号：US09429428B2

公开(公告)日：2016-08-30

申请号：US14843844

申请日：2015-09-02

Applicant: The Regents of the University of California

Inventor： Andrei Shkel ,  Doruk Senkal

IPC: G01C19/00 ,  G01C19/5691 ,  B81C1/00

CPC classification number: G01C19/5691 ,  B81B2201/0271 ,  B81C1/00238 ,  B81C1/00634

Abstract: A method for fabricating an environmentally robust micro-wineglass gyroscope includes the steps of stacking and bonding of at least an inner glass layer and an outer glass layer to a substrate wafer; plastically deforming the inner glass layer into a mushroom-shaped structure and deforming the outer glass layer into a shield capable of extending over the inner glass layer, while leaving the inner and outer glass layers connectable at a central post location; removing the substrate layer and a portion of the inner glass layer so that a perimeter of the inner glass layer is free; and bonding the deformed inner and outer glass layers to a handle wafer. The resulting structure is an environmentally robust micro-wineglass gyroscope which has a double ended supported central post location for the mushroom-shaped structure of the inner glass layer.

Abstract translation: 一种用于制造环境坚固的微型葡萄酒杯陀螺仪的方法包括将至少内玻璃层和外玻璃层堆叠和结合到基底晶片的步骤; 将内玻璃层塑性变形为蘑菇状结构，并将外玻璃层变形成能够在内玻璃层上延伸的屏蔽，同时使内玻璃层和外玻璃层可连接在中心柱位置; 去除衬底层和内玻璃层的一部分，使得内玻璃层的周边是自由的; 以及将变形的内玻璃层和外玻璃层接合到处理晶片。 所得到的结构是一种环保的微型葡萄酒杯陀螺仪，其具有用于内玻璃层的蘑菇形结构的双端支撑的中心柱位置。

公开(公告)号：US09139417B2

公开(公告)日：2015-09-22

申请号：US13838132

申请日：2013-03-15

Applicant: The Regents of the University of California

Inventor： Alexander A. Trusov ,  Doruk Senkal ,  Andrei M. Shkel

IPC: G01P15/00 ,  B81B3/00 ,  B81C1/00 ,  G01C19/5691

CPC classification number: B81B3/0018 ,  B81B2201/0271 ,  B81C1/00134 ,  B81C1/00634 ,  G01C19/5691

Abstract: A high temperature micro-glassblowing process and a novel inverted-wineglass architecture that provides self-aligned stem structures. The fabrication process involves the etching of a fused quartz substrate wafer. A TSG or fused quartz device layer is then bonded onto the fused quartz substrate, creating a trapped air pocket or cavity between the substrate and the TSG device layer. The substrate and TSG device layer 14 are then heated at an extremely high temperature of approximately 1700° C., forming an inverted wineglass structure. Finally, the glassblown structure is cut or etched from the substrate to create a three dimensional wineglass resonator micro-device. The inverted wineglass structure may be used as a high performance resonator for use as a key element in precision clock resonators, dynamic MEMS sensors, and MEMS inertial sensors.

Abstract translation: 高温微玻璃吹制工艺和提供自对准茎结构的新型倒酒杯结构。 制造工艺涉及对熔融石英衬底晶片的蚀刻。 然后将TSG或熔融石英器件层接合到熔融石英衬底上，在衬底和TSG器件层之间产生截留的气穴或腔。 然后将衬底和TSG器件层14在大约1700℃的极高温度下加热，形成倒置的酒杯结构。 最后，从衬底切割或蚀刻玻璃泡结构，以形成三维酒杯谐振器微器件。 反向酒杯结构可用作高性能谐振器，用作精密时钟谐振器，动态MEMS传感器和MEMS惯性传感器中的关键元件。

公开(公告)号：US10180323B2

公开(公告)日：2019-01-15

申请号：US14734794

申请日：2015-06-09

Applicant: The Regents of the University of California

Inventor： Doruk Senkal ,  Andrei M. Shkel

IPC: G01C19/5684

Abstract: A toroidal ring gyroscope with a robust outer perimeter anchor and a distributed suspension system. The vibrational energy in the design is concentrated towards the innermost ring, and the device is anchored at the outer perimeter. The distributed support structure prevents vibrational motion propagating to the outer anchor, which helps trap the vibrational energy within the gyroscope and provides a Q-factor of >100,000 at a compact size of 1760 μm. Due to the parametric pumping effect, energy added to each mode is proportional to the existing amplitude of the respective mode. As a result, errors associated with finding the orientation of the standing wave and x-y drive gain drift are bypassed. The toroidal ring gyroscope can be fabricated using any standard silicon on insulator process. Due to the high Q-factor and robust support structure, the device can potentially be instrumented in high-g environments that require high angular rate sensitivity.

公开(公告)号：US20160047653A1

公开(公告)日：2016-02-18

申请号：US14843844

申请日：2015-09-02

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： Andrei Shkel ,  Doruk Senkal

IPC: G01C19/5691 ,  B81C1/00

CPC classification number: G01C19/5691 ,  B81B2201/0271 ,  B81C1/00238 ,  B81C1/00634

Abstract: A method for fabricating an environmentally robust micro-wineglass gyroscope includes the steps of stacking and bonding of at least an inner glass layer and an outer glass layer to a substrate wafer; plastically deforming the inner glass layer into a mushroom-shaped structure and deforming the outer glass layer into a shield capable of extending over the inner glass layer, while leaving the inner and outer glass layers connectable at a central post location; removing the substrate layer and a portion of the inner glass layer so that a perimeter of the inner glass layer is free; and bonding the deformed inner and outer glass layers to a handle wafer. The resulting structure is an environmentally robust micro-wineglass gyroscope which has a double ended supported central post location for the mushroom-shaped structure of the inner glass layer.

Abstract translation: 一种用于制造环境坚固的微型葡萄酒杯陀螺仪的方法包括将至少内玻璃层和外玻璃层堆叠和结合到基底晶片的步骤; 将内玻璃层塑性变形为蘑菇状结构，并将外玻璃层变形成能够在内玻璃层上延伸的屏蔽，同时使内玻璃层和外玻璃层可连接在中心柱位置; 去除衬底层和内玻璃层的一部分，使得内玻璃层的周边是自由的; 以及将变形的内玻璃层和外玻璃层接合到处理晶片。 所得到的结构是一种环保的微型葡萄酒杯陀螺仪，其具有用于内玻璃层的蘑菇形结构的双端支撑的中心柱位置。