公开(公告)号：US20160343549A1

公开(公告)日：2016-11-24

申请号：US15230017

申请日：2016-08-05

Applicant: TRUMPF HUETTINGER SP. Z O.O.

Inventor： Andrzej Gieraltowski ,  Adam Grabowski ,  Piotr Lach ,  Marcin Zelechowski

IPC: H01J37/32 ,  G01R19/165

CPC classification number: H01J37/32944 ,  G01R19/165 ,  H01J37/32128 ,  H01J37/32917 ,  H01J37/32926 ,  H01J37/32935

Abstract: Systems and methods of monitoring a discharge in a plasma process are disclosed. The methods include supplying the plasma process with a periodic power supply signal, determining a first signal waveform in a first time interval within a first period of the power supply signal, determining a second signal waveform in a second time interval within a second period of the power supply signal, the second time interval being at a position within the second period corresponding to a position of the first time interval within the first period, comparing the second signal waveform with a reference signal waveform to obtain a first comparison result, determining that the first comparison result corresponds to a given first comparison result, and in response, time-shifting one of the second signal waveform and the reference signal waveform, and comparing the time-shifted signal waveform with the non-time-shifted signal waveform to obtain a second comparison result.

Abstract translation: 公开了在等离子体工艺中监测放电的系统和方法。 所述方法包括向等离子体处理提供周期性电源信号，在电源信号的第一周期内以第一时间间隔确定第一信号波形，在第二时间间隔内在第二时间段内确定第二信号波形 电源信号，所述第二时间间隔处于与所述第一时段内的所述第一时间间隔的位置对应的所述第二时段内的位置，将所述第二信号波形与参考信号波形进行比较，以获得第一比较结果， 第一比较结果对应于给定的第一比较结果，并且作为响应，对第二信号波形和参考信号波形中的一个进行时移，并且将时移信号波形与非时移信号波形进行比较，以获得 第二个比较结果。

公开(公告)号：US10290477B2

公开(公告)日：2019-05-14

申请号：US15230017

申请日：2016-08-05

Applicant: TRUMPF HUETTINGER SP. Z O.O.

Inventor： Andrzej Gieraltowski ,  Adam Grabowski ,  Piotr Lach ,  Marcin Zelechowski

IPC: H01J37/32 ,  G01R19/165

Abstract: Systems and methods of monitoring a discharge in a plasma process are disclosed. The methods include supplying the plasma process with a periodic power supply signal, determining a first signal waveform in a first time interval within a first period of the power supply signal, determining a second signal waveform in a second time interval within a second period of the power supply signal, the second time interval being at a position within the second period corresponding to a position of the first time interval within the first period, comparing the second signal waveform with a reference signal waveform to obtain a first comparison result, determining that the first comparison result corresponds to a given first comparison result, and in response, time-shifting one of the second signal waveform and the reference signal waveform, and comparing the time-shifted signal waveform with the non-time-shifted signal waveform to obtain a second comparison result.