公开(公告)号：US20090060251A1

公开(公告)日：2009-03-05

申请号：US12196383

申请日：2008-08-22

Applicant: Tatsuya MAEDA

Inventor： Tatsuya MAEDA

IPC: H04R9/06 ,  H04R7/02 ,  H04R1/00 ,  H04R11/02

CPC classification number: H04R7/02

Abstract: A loudspeaker diaphragm having a small overall height dimension, in which a dome portion has a sufficient rigidity and which is capable of realizing a stable loudspeaker operation, wherein the loudspeaker diaphragm can realize a desirable sound reproduction without noise, or the like, with a frequency response that is flat over a wide range. In the loudspeaker diaphragm of the present invention, the dome portion includes a concave dome portion formed at a center thereof, a convex dome portion along an outer periphery of the concave dome portion, a plurality of depressed ribs each extending in a radial direction across a boundary between the concave dome portion and the convex dome portion, a voice coil attachment portion along an outer periphery of the convex dome portion, and a plurality of protruding ribs extending in the radial direction across a boundary between the convex dome portion and the voice coil attachment portion, wherein each protruding rib is spaced apart in a circumferential direction from two adjacent depressed ribs.

Abstract translation: 具有小的整体高度尺寸的扬声器隔膜，其中圆顶部分具有足够的刚度并且能够实现稳定的扬声器操作，其中扬声器隔膜可以实现具有频率的无噪声等的期望的声音再现 反应平坦，范围广泛。 在本发明的扬声器隔膜中，圆顶部包括形成在其中心的凹形圆顶部，沿着凹形圆顶部的外周的凸形圆顶部，多个凹凸肋， 凹圆顶部分和凸形圆顶部分之间的边界，沿着凸出的圆顶部分的外周的音圈安装部分和沿径向延伸穿过凸起的圆顶部分和音圈之间的边界的多个突出的肋 附接部分，其中每个突出肋沿圆周方向与两个相邻的凹陷肋间隔开。

公开(公告)号：US20110133080A1

公开(公告)日：2011-06-09

申请号：US12898455

申请日：2010-10-05

Applicant: Chie SHISHIDO ,  Mayuka OOSAKI ,  Mitsugu SATO ,  Hiroki KAWADA ,  Tatsuya MAEDA

Inventor： Chie SHISHIDO ,  Mayuka OOSAKI ,  Mitsugu SATO ,  Hiroki KAWADA ,  Tatsuya MAEDA

IPC: G01N23/225

CPC classification number: H01J37/263 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2826

Abstract: The present invention provides a charged particle beam apparatus used to measure micro-dimensions (CD value) of a semiconductor apparatus or the like which captures images for measurement. For the present invention, a sample for calibration, on which a plurality of polyhedral structural objects with known angles on surfaces produced by the crystal anisotropic etching technology are arranged in a viewing field, is used. A beam landing angle at each position within a viewing field is calculated based on geometric deformation on an image of each polyhedral structural object. Beam control parameters for equalizing the beam landing angle at each position within the viewing field are pre-registered. The registered beam control parameters are applied according to the position of the pattern to be measured within the viewing field when performing dimensional measurement. Accordingly, the present invention provides methods for reducing the variation in the CD value caused by the variation in the electron beam landing angle with respect to the sample with an equal beam landing angle and methods for reducing the instrumental error caused by the difference in the electron beam landing angle between apparatuses.

Abstract translation: 本发明提供一种用于测量捕获用于测量的图像的半导体装置等的微尺寸（CD值）的带电粒子束装置。 对于本发明，使用用于校准的样品，其上在视场中排列有通过晶体各向异性蚀刻技术产生的表面上具有已知角度的多个多面体结构物体。 基于每个多面体结构物体的图像上的几何变形来计算视野内的每个位置处的束着陆角。 用于均衡视场内每个位置的束着陆角的光束控制参数被预先注册。 当进行尺寸测量时，根据待测图案的位置在观察区域中应用登记的光束控制参数。 因此，本发明提供了减少相对于具有相同束着陆角的样品的电子束着角的变化引起的CD值的变化的方法，以及用于减少由电子差异引起的仪器误差的方法 设备之间的束着陆角度。

公开(公告)号：US20090242765A1

公开(公告)日：2009-10-01

申请号：US12264605

申请日：2008-11-04

Applicant: Tatsuya MAEDA

Inventor： Tatsuya MAEDA

IPC: G01N23/00 ,  G06F15/00

CPC classification number: H04N5/76 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/2487 ,  H01J2237/2817 ,  H04N5/772 ,  H04N5/775 ,  H04N5/781 ,  H04N5/907 ,  H04N9/8205

Abstract: It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation process, and confirm details resulting in the error. Upon detecting an error from an abnormality, the scanning electron microscope extracts a sample image lm(t2) obtained by retroceding from a sample image lm(te) stored so as to be associated with time te of error occurrence by a predetermined video quantity (for example, total recording time period t2) previously set and registered by an input-output device, from sample images stored in a recording device while being overwritten, and stores a resultant sample image in another recording device.

Abstract translation: 在扫描电子显微镜中便于执行再现测试的劳动，对执行自动观察过程所引起的问题进行基本分析，并确认导致错误的细节。 扫描电子显微镜从检测到异常的误差时，提取通过从存储的与样品图像lm（te）相反的获得的样本图像lm（t2），以使与出现错误的时间t相关联的预定视频量（对于 例如，由输入 - 输出设备预先设置和登记的总记录时间段t2）从存储在记录设备中的样本图像被重写，并将所得到的样本图像存储在另一个记录设备中。