THIN FILM TRANSISTOR WITH TWO-DIMENSIONAL DOPING ARRAY
    3.
    发明申请
    THIN FILM TRANSISTOR WITH TWO-DIMENSIONAL DOPING ARRAY 有权
    具有两维DOPING阵列的薄膜晶体管

    公开(公告)号:US20140159039A1

    公开(公告)日:2014-06-12

    申请号:US14104762

    申请日:2013-12-12

    CPC classification number: H01L29/78696 H01L29/6675 H01L29/78675

    Abstract: A thin film transistor includes: a source region; a drain region; and a polycrystalline thin film active channel region connected to the source region and the drain region, the active channel region comprising grains and being doped with a two-dimensional pattern comprising a plurality of doped regions, the plurality of doped regions each comprising at least portions of a plurality of the grains and at least one grain boundary.

    Abstract translation: 薄膜晶体管包括:源极区; 漏区; 以及连接到源区和漏区的多晶薄膜有源沟道区,所述有源沟道区包含晶粒并掺杂有包括多个掺杂区的二维图案,所述多个掺杂区各自包括至少部分 的多个晶粒和至少一个晶界。

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