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公开(公告)号：US20160358829A1
公开(公告)日：2016-12-08
申请号：US15171240
申请日：2016-06-02
Applicant: Tokyo Electron Limited
Inventor： Masato HAYASHI , Kohei NOGUCHI , Kenji IIZUKA , Naruaki IIDA
CPC classification number: H01L22/10 , G01N21/85 , G01N2021/8578 , G03F7/16 , G03F7/162 , H01L21/0273 , H01L21/67253
Abstract: An apparatus includes: measurement flow passage portions as part of a respective plurality of supply paths of fluids to be supplied to a substrate, the measurement flow passage portions constituting measurement regions for measurement of foreign matter in the fluids, and being disposed so as to form a row with each other; a light irradiating unit configured to form an optical path in one of the flow passage portions, the light irradiating unit being shared by the plurality of flow passage portions; a moving mechanism configured to move the light irradiating unit relatively along a direction of arrangement of the flow passage portions to form the optical path within the flow passage portion selected among the plurality of flow passage portions; a light receiving unit including a light receiving element, the light receiving element receiving light transmitted by the flow passage portion; and a detecting unit configured to detect foreign matter in the fluid on a basis of a signal output from the light receiving element. Consequently, the number of necessary light irradiating units can be reduced, and the apparatus can be miniaturized.
Abstract translation: 一种装置，包括：作为供给到基板的流体的多个供给路径的一部分的测定流路部，构成测定流体中异物的测定区域的测量流路部， 相互排列; 光照射单元，被配置为在所述流路部分之一中形成光路，所述光照射单元由所述多个流路部分共享; 移动机构，其构造成沿着所述流路部的配置方向相对移动所述光照射单元，以在所述多个流路部中选择的流路部内形成光路; 光接收单元，其包括受光元件，所述光接收元件接收由所述流路部分透射的光; 以及检测单元，被配置为基于从所述光接收元件输出的信号来检测所述流体中的异物。 因此，可以减少必要的光照射单元的数量，并且可以使该装置小型化。
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2.发明申请公开(公告)号：US20200240891A1
公开(公告)日：2020-07-30
申请号：US16746118
申请日：2020-01-17
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masato HAYASHI , Kohei NOGUCHI , Koudai HIGASHI , Makoto OGATA
Abstract: According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.
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3.发明申请公开(公告)号：US20210247286A1
公开(公告)日：2021-08-12
申请号：US17245220
申请日：2021-04-30
Applicant: TOKYO ELECTRON LIMITED
Inventor： Masato HAYASHI , Kohei NOGUCHI , Koudai HIGASHI , Makoto OGATA
Abstract: According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.
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