公开(公告)号：US11118977B2

公开(公告)日：2021-09-14

申请号：US16608684

申请日：2018-05-09

Applicant: Tokyo Institute of Technology

Inventor： Yukio Kawano ,  Daichi Suzuki

IPC: G01J5/02 ,  G01N21/3581

Abstract: Provided are a terahertz wave detection device and a terahertz wave detection system to execute checking at high speed with high sensitivity and accuracy and to execute omnidirectional inspection without requiring a large checking system. A flexible array sensor (30) includes: a terahertz wave detection element (10) having a flexible single-walled carbon nanotube film (11), and a first electrode (12) and a second electrode (13) disposed to face each other on a two-dimensional plane of the single-walled carbon nanotube film (11); and a flexible substrate (20) having flexibility to support the terahertz wave detection element (10) so as to be freely curved. The flexible substrate (20) is preferably formed in a curved or cylindrical shape, so that the terahertz wave detection elements (10) are arrayed on the flexible substrate 20 formed in a curved or cylindrical shape.

公开(公告)号：US10969335B2

公开(公告)日：2021-04-06

申请号：US16095771

申请日：2017-04-28

Applicant: Tokyo Institute of Technology

Inventor： Yukio Kawano ,  Daichi Suzuki

IPC: G01J3/42 ,  G01J5/04 ,  G01N21/35 ,  H01L51/00 ,  G01N21/3586

Abstract: A terahertz wave detection device includes a low-dimensional electron system material formed on a substrate; and a first electrode and a second electrode opposingly arranged on a two-dimensional plane of the low-dimensional electron system material. The first electrode and the second electrode are made of metals having different thermal conductivity. An 8-element array sensor includes eight terahertz wave detection devices aligned in an array. The terahertz wave detection device includes carbon nanotube film; a first electrode disposed on one side of the carbon nanotube film; and a second electrode disposed on the other side of the carbon nanotube film. The first electrode and the second electrode have different thermal conductivity.