公开(公告)号：US11118977B2

公开(公告)日：2021-09-14

申请号：US16608684

申请日：2018-05-09

Applicant: Tokyo Institute of Technology

Inventor： Yukio Kawano ,  Daichi Suzuki

IPC: G01J5/02 ,  G01N21/3581

Abstract: Provided are a terahertz wave detection device and a terahertz wave detection system to execute checking at high speed with high sensitivity and accuracy and to execute omnidirectional inspection without requiring a large checking system. A flexible array sensor (30) includes: a terahertz wave detection element (10) having a flexible single-walled carbon nanotube film (11), and a first electrode (12) and a second electrode (13) disposed to face each other on a two-dimensional plane of the single-walled carbon nanotube film (11); and a flexible substrate (20) having flexibility to support the terahertz wave detection element (10) so as to be freely curved. The flexible substrate (20) is preferably formed in a curved or cylindrical shape, so that the terahertz wave detection elements (10) are arrayed on the flexible substrate 20 formed in a curved or cylindrical shape.

公开(公告)号：US10969335B2

公开(公告)日：2021-04-06

申请号：US16095771

申请日：2017-04-28

Applicant: Tokyo Institute of Technology

Inventor： Yukio Kawano ,  Daichi Suzuki

IPC: G01J3/42 ,  G01J5/04 ,  G01N21/35 ,  H01L51/00 ,  G01N21/3586

Abstract: A terahertz wave detection device includes a low-dimensional electron system material formed on a substrate; and a first electrode and a second electrode opposingly arranged on a two-dimensional plane of the low-dimensional electron system material. The first electrode and the second electrode are made of metals having different thermal conductivity. An 8-element array sensor includes eight terahertz wave detection devices aligned in an array. The terahertz wave detection device includes carbon nanotube film; a first electrode disposed on one side of the carbon nanotube film; and a second electrode disposed on the other side of the carbon nanotube film. The first electrode and the second electrode have different thermal conductivity.

公开(公告)号：US10436632B2

公开(公告)日：2019-10-08

申请号：US16062609

申请日：2016-12-14

Applicant: TOKYO INSTITUTE OF TECHNOLOGY

Inventor： Yukio Kawano

IPC: G01J1/02 ,  G01Q60/22 ,  G01N21/3581

Abstract: A terahertz image measurement device includes a terahertz detection sensor, a magnetic field generating unit, and a measurement control unit. The sensor detects near-field light of terahertz light emitted from a sample. The magnetic field generating unit has a coil disposed around the sample and the sensor, and wound to surround the optical axis of terahertz light irradiated on the sensor, and applies to the sensor a magnetic field generated by allowing an electric current to flow through the coil. The measurement control unit changes a value of the electric current flowing through the coil, sets a strength of the magnetic field to a magnetic field value for which a detection signal level of the terahertz light detected by the sensor increases prominently, and allows the magnetic field value to conform to a specific frequency of the terahertz light.