公开(公告)号：US20240188208A1

公开(公告)日：2024-06-06

申请号：US18553715

申请日：2022-03-28

Applicant: UNIVERSITEIT GENT

Inventor： Yuliia Onyshchenko ,  Mehrnoush Narimisa ,  Nathalie De Geyter ,  Rino Morent

IPC: H05H1/46 ,  B05D1/00 ,  H01J37/32

CPC classification number: H05H1/466 ,  H01J37/32091 ,  H01J37/3244 ,  B05D1/62 ,  H01J2237/3382

Abstract: A device for generating a plasma jet is disclosed. A nozzle of the device comprises an inner, middle and outer channel surrounding each other and electrically insulated from each other. The device is configured for flowing through the inner, middle and outer channel respectively a first ignitable gas, a monomer precursor and a second ignitable gas towards their respective exit openings. A high voltage electrode is arranged in the inner channel for generating a plasma from the first ignitable gas. The nozzle further comprises a nozzle cap enclosing a mixing volume after the exit openings of the inner, middle and outer channel. The nozzle cap is provided with an exit opening after the mixing volume, which exit opening is smaller than the exit opening of the outer channel.