公开(公告)号：US20190339536A1

公开(公告)日：2019-11-07

申请号：US16511136

申请日：2019-07-15

Applicant: Ultratech, Inc.

Inventor： Sergeui Anikitchev

IPC: G02B27/09 ,  H01L21/268 ,  G02B19/00

Abstract: High-efficiency line-forming optical systems and methods that employ a serrated aperture are disclosed. The line-forming optical system includes a laser source, a beam conditioning optical system, a first aperture device, and a relay optical system that includes a second aperture device having the serrated aperture. The serrated aperture is defined by opposing serrated blades configured to reduce intensity variations in a line image formed at an image plane as compared to using an aperture having straight-edged blades.

公开(公告)号：US20150029497A1

公开(公告)日：2015-01-29

申请号：US13953423

申请日：2013-07-29

Applicant: Ultratech, Inc.

Inventor： Sergeui Anikitchev ,  David Gaines

IPC: G01J1/04

CPC classification number: G01J1/0407 ,  G01J1/0414 ,  G01J1/0477 ,  G01J1/4257 ,  G01J2001/0481 ,  G01J2001/4261 ,  G02B5/04 ,  G02B27/108

Abstract: Systems and methods for measuring an intensity characteristic of a light beam are disclosed. The methods include directing the light beam into a prism assembly that includes a thin prism sandwiched by two transparent plates, and reflecting a portion of the light beam by total-internal-reflection surface to an integrating sphere while transmitting the remaining portion of the light beam through the two transparent plates to a beam dump. The method also includes detecting light captured by the integrating sphere and determining the intensity characteristic from the detected light.

Abstract translation: 公开了用于测量光束的强度特性的系统和方法。 所述方法包括将光束引导到棱镜组件中，该棱镜组件包括夹在两个透明板之间的薄棱镜，并且将一部分光束由全内反射表面反射到积分球，同时透射光束的剩余部分 通过两个透明板到一个光束转储。 该方法还包括检测由积分球捕获的光并根据检测到的光确定强度特性。