公开(公告)号：US12163899B2

公开(公告)日：2024-12-10

申请号：US18341339

申请日：2023-06-26

Applicant: Unity Semiconductor

Inventor： Mayeul Durand de Gevigney ,  Guillaume Vienne ,  Kaiss Benhadjsalem

IPC: G01N21/95 ,  G01N21/88

Abstract: A system for optical inspection of a substrate. The system comprises an illumination device defining an inspection area on the substrate, a support to receive the substrate, and a detection device defining a detection area on the substrate. The inspection area is positioned ahead, with respect to the scanning direction, of at least a portion of the detection area.

公开(公告)号：US20240068956A1

公开(公告)日：2024-02-29

申请号：US18341339

申请日：2023-06-26

Applicant: Unity Semiconductor

Inventor： Mayeul Durand de Gevigney ,  Guillaume Vienne ,  Kaiss Benhadjsalem

IPC: G01N21/95 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8845 ,  G01N2201/0846

Abstract: A system for optical inspection of a substrate. The system comprises an illumination device defining an inspection area on the substrate, a support to receive the substrate, and a detection device defining a detection area on the substrate. The inspection area is positioned ahead, with respect to the scanning direction, of at least a portion of the detection area.