公开(公告)号：US11933726B2

公开(公告)日：2024-03-19

申请号：US17600475

申请日：2020-03-23

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Syuhei Okada ,  Hiroaki Tanaka

IPC: G01N21/552 ,  G01N21/35

CPC classification number: G01N21/552 ,  G01N21/35

Abstract: A measurement apparatus includes a generator that causes electromagnetic waves to be incident on a sample, a receiver that receives electromagnetic waves reflected by the sample, and a controller that controls the generator and receiver. The sample includes a first layer on which the electromagnetic waves are incident and a second layer stacked on the first layer. The controller detects whether a third layer is present between the first and second layers based on the electromagnetic waves incident on the sample from the generator and the electromagnetic waves received by the receiver. The generator causes the electromagnetic waves to be incident at an angle such that the electromagnetic waves are totally reflected between the first and third layers and/or between the first and second layers.

公开(公告)号：US20220317056A1

公开(公告)日：2022-10-06

申请号：US17707287

申请日：2022-03-29

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Syuhei Okada

IPC: G01N21/88 ,  G01J3/28 ,  G01N21/17

Abstract: A measurement apparatus (10) includes a generator (121) that irradiates electromagnetic waves on a measurement target (M) including a substance that undergoes a structural transition from a first substance with an unstable structure to a second substance with a stable structure due to entry of a foreign substance, a receiver (122) that receives the electromagnetic waves including information on a spectroscopic spectrum of the measurement target (M), and a controller (116) that acquires the measured spectroscopic spectrum based on the electromagnetic waves received by the receiver (122), calculates ratio information between the first substance and the second substance based on the acquired measured spectroscopic spectrum, and generates diagnostic information regarding entry of the foreign substance based on the ratio information.

公开(公告)号：US11781994B2

公开(公告)日：2023-10-10

申请号：US17707287

申请日：2022-03-29

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Syuhei Okada

IPC: G01J3/28 ,  G01N21/88 ,  G01N21/17

CPC classification number: G01N21/8851 ,  G01J3/28 ,  G01N21/17 ,  G01J2003/2859 ,  G01N2021/1738

Abstract: A measurement apparatus (10) includes a generator (121) that irradiates electromagnetic waves on a measurement target (M) including a substance that undergoes a structural transition from a first substance with an unstable structure to a second substance with a stable structure due to entry of a foreign substance, a receiver (122) that receives the electromagnetic waves including information on a spectroscopic spectrum of the measurement target (M), and a controller (116) that acquires the measured spectroscopic spectrum based on the electromagnetic waves received by the receiver (122), calculates ratio information between the first substance and the second substance based on the acquired measured spectroscopic spectrum, and generates diagnostic information regarding entry of the foreign substance based on the ratio information.

公开(公告)号：US20250020588A1

公开(公告)日：2025-01-16

申请号：US18706997

申请日：2022-11-04

Applicant: Yokogawa Electric Corporation

Inventor： Syuhei Okada

IPC: G01N21/552 ,  G01N19/04 ,  G01N21/21 ,  G01N21/3581 ,  G01N21/84

Abstract: A measurement apparatus (20) includes a controller (13) that outputs an electromagnetic wave from an electromagnetic wave output source (7) toward a sample (30) that has a first layer (31) and a second layer (32) adjacent to each other and is subjected to vibration at a predetermined vibration frequency, receives a reflected wave of the electromagnetic wave from a measurement target portion (35) at an interface between the first layer (31) and the second layer (32), calculate a frequency or an amplitude of vibration of the measurement target portion (35) based on the reflected wave, and measure an adhesive strength of the measurement target portion (35) based on the frequency or the amplitude of vibration of the measurement target portion (35) calculated based on the reflected wave.

公开(公告)号：US20220317037A1

公开(公告)日：2022-10-06

申请号：US17707308

申请日：2022-03-29

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Syuhei Okada

IPC: G01N21/3581 ,  G01N21/88

Abstract: A measurement apparatus (10) is for measuring the state of a measurement target (M) that exhibits anomalous dispersion. The measurement apparatus (10) includes a controller (116) that acquires information on a spectroscopic spectrum of the measurement target (M), the spectroscopic spectrum being based on electromagnetic waves that are irradiated on the measurement target (M) and including a first frequency domain in which an effect of anomalous dispersion is observed and a second frequency domain adjacent to the first frequency domain. The controller (116) calculates a state of the measurement target (M) based on the acquired information on the spectroscopic spectrum.