公开(公告)号：US07277181B2

公开(公告)日：2007-10-02

申请号：US11123978

申请日：2005-05-06

Applicant: Yaomin Lin

Inventor： Yaomin Lin

IPC: G01B9/02

CPC classification number: G01B11/2441 ,  G01B9/02028 ,  G01B9/02057 ,  G01B9/0209

Abstract: An apparatus for detecting the surface profile of a test object includes a light source, a beam splitter, a reflective component, a sensor, and a computing device. The light source emits a light beam. The beam splitter divides the light beam into reference and probing beams. The reference beam is reflected by the reflective component back to the beam splitter. The reflective component is configured so that components of the reflected reference beam travel at different optical path lengths to the beam splitter. The probing beam is reflected by the test object back to the beam splitter. The beam splitter combines the reflected reference and probing beams to result in a heterodyne light beam. The sensor converts the heterodyne light beam into a corresponding electrical signal. The computing device records the converted electrical signal. A method for detecting the surface profile of the test object is also disclosed.

Abstract translation: 用于检测测试对象的表面轮廓的装置包括光源，分束器，反射部件，传感器和计算装置。 光源发射光束。 光束分束器将光束分成参考和探测光束。 参考光束被反射部件反射回分束器。 反射部件被配置为使得反射参考光束的分量以不同的光路长度行进到分束器。 探测光束被测试对象反射回分束器。 分束器组合反射的参考和探测光束以产生外差光束。 传感器将外差光束转换成相应的电信号。 计算装置记录转换的电信号。 还公开了一种用于检测测试对象的表面轮廓的方法。

公开(公告)号：US20050248770A1

公开(公告)日：2005-11-10

申请号：US11123978

申请日：2005-05-06

Applicant: Yaomin Lin

Inventor： Yaomin Lin

IPC: G01B9/02 ,  G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02028 ,  G01B9/02057 ,  G01B9/0209

Abstract: An apparatus for detecting the surface profile of a test object includes a light source, a beam splitter, a reflective component, a sensor, and a computing device. The light source emits a light beam. The beam splitter divides the light beam into reference and probing beams. The reference beam is reflected by the reflective component back to the beam splitter. The reflective component is configured so that components of the reflected reference beam travel at different optical path lengths to the beam splitter. The probing beam is reflected by the test object back to the beam splitter. The beam splitter combines the reflected reference and probing beams to result in a heterodyne light beam. The sensor converts the heterodyne light beam into a corresponding electrical signal. The computing device records the converted electrical signal. A method for detecting the surface profile of the test object is also disclosed.

Abstract translation: 用于检测测试对象的表面轮廓的装置包括光源，分束器，反射部件，传感器和计算装置。 光源发射光束。 光束分束器将光束分成参考和探测光束。 参考光束被反射部件反射回分束器。 反射部件被配置为使得反射参考光束的分量以不同的光路长度行进到分束器。 探测光束被测试对象反射回分束器。 分束器组合反射的参考和探测光束以产生外差光束。 传感器将外差光束转换成相应的电信号。 计算装置记录转换的电信号。 还公开了一种用于检测测试对象的表面轮廓的方法。

公开(公告)号：US06835933B2

公开(公告)日：2004-12-28

申请号：US10299848

申请日：2002-11-20

Applicant: Yaomin Lin ,  Hau-Wei Wang ,  Ying-Cheun Spring Yeh

Inventor： Yaomin Lin ,  Hau-Wei Wang ,  Ying-Cheun Spring Yeh

IPC: G01N2135

CPC classification number: G01J3/44 ,  G01J3/42 ,  G01J3/4406 ,  G01N21/35 ,  G01N21/64 ,  G01N21/65

Abstract: A spectrum measuring apparatus for measuring infrared, Raman and fluorescence spectra. The spectrum measuring apparatus includes an infrared source, a laser source, an infrared up-conversion object lens, an object lens, a dual color lens, an ocular, a narrow band filter, a visible light image capturing device and a sample pedestal. The infrared spectrum is measured by the infrared up-conversion object lens. The Raman and fluorescence spectra are measured by the object lens.

Abstract translation: 用于测量红外，拉曼和荧光光谱的光谱测量装置。 光谱测量装置包括红外源，激光源，红外上变换物镜，物镜，双色透镜，眼睛，窄带滤光器，可见光图像捕获装置和样品台。 红外光谱由红外上变换物镜测量。 通过物镜测量拉曼和荧光光谱。

公开(公告)号：US06667838B2

公开(公告)日：2003-12-23

申请号：US10145720

申请日：2002-05-16

Applicant: Yaomin Lin ,  Hau-Wei Wang ,  Chieh-Yi Lo

Inventor： Yaomin Lin ,  Hau-Wei Wang ,  Chieh-Yi Lo

IPC: G02B908

CPC classification number: G02B27/0018 ,  G02B5/005

Abstract: The invention provides an optical trapping skirt for adjusting the diameter of a beam passing thereof by varying the aperture. The optical trapping skirt has a body of bell shape and an iris diaphragm of bell shape, wherein the iris diaphragm of bell shape is installed inside the body so as to construct a ring like cavity. The undesired portion of the beam, which is incident on the iris diaphragm, is trapped in the ring like cavity and cannot be escaped. The aperture of the iris diaphragm is adjustable, so the diameter of the beam passing the optical trapping skirt is also controllable.

Abstract translation: 本发明提供了一种光学捕获裙，用于通过改变孔径来调节其通过光束的直径。 光学捕获裙具有钟形体和钟形的虹膜，其中钟形的虹膜隔膜安装在体内，以构成环形腔。 入射在虹膜上的光束的不期望的部分被捕获在环形空腔中，并且不能逸出。 虹膜光阑的孔径是可调节的，因此通过光学捕获裙的光束的直径也是可控的。

公开(公告)号：US07472042B2

公开(公告)日：2008-12-30

申请号：US11486309

申请日：2006-07-14

Applicant: Hung-Chang Chang ,  Yaomin Lin

Inventor： Hung-Chang Chang ,  Yaomin Lin

IPC: G01B11/24 ,  G01B11/00

CPC classification number: G01B11/2441

Abstract: A surface profile measuring method using a broad bandwidth light source illuminating a sample surface and a reference surface through a splitter is provided. By changing a distance between the sample surface and the reference surface with a constant step, an interference diagram with a waveform composed of interference data points depicting a relationship of surface height versus illumination intensity is generated. In the beginning, a first data point with greatest illumination intensity is selected from the interference data points on the waveform. Then, a second data point is selected from the data points on the waveform within a predetermined range centered at the first data point to have the waveform showing best quality of symmetry. Then, a peak of a fringe defined by the second data point and its neighboring data points is estimated by using phase compensating approach.

Abstract translation: 提供了使用通过分离器照射样品表面和参考表面的宽带宽光源的表面轮廓测量方法。 通过以恒定步长改变样品表面和参考表面之间的距离，产生了由描绘表面高度与照射强度的关系的干涉数据点组成的波形的干涉图。 在开始时，从波形上的干扰数据点选择具有最大照明强度的第一数据点。 然后，在以第一数据点为中心的预定范围内的波形上的数据点中选择第二数据点，以使具有最佳对称质量的波形。 然后，通过使用相位补偿方法估计由第二数据点及其相邻数据点限定的条纹的峰值。

公开(公告)号：US20080013101A1

公开(公告)日：2008-01-17

申请号：US11486311

申请日：2006-07-14

Applicant: Yaomin Lin ,  Hung-Chang Chang

Inventor： Yaomin Lin ,  Hung-Chang Chang

IPC: G01B11/02

CPC classification number: G01B11/2441 ,  H01J9/42 ,  H01J9/50 ,  Y02W30/828

Abstract: A repairing method for a surface profile is provided. The intensity on the waveform of the interference diagrams or the existence of envelope on the waveform of the interference diagram are used to decide whether the respected pixel is located in a dark area on the surface profile or not. Then, mark the pixel located in the dark area. Afterward, repair the marked pixel by using the surrounding effective pixels on the surface profile.

Abstract translation: 提供了表面轮廓的修复方法。 使用干涉图的波形上的强度或干涉图的波形上的包络的存在来确定被尊重的像素是否位于表面轮廓上的暗区域中。 然后，标记位于黑暗区域的像素。 之后，通过使用表面轮廓上的周围有效像素来修复标记的像素。

公开(公告)号：US20080013100A1

公开(公告)日：2008-01-17

申请号：US11486309

申请日：2006-07-14

Applicant: Hung-Chang Chang ,  Yaomin Lin

Inventor： Hung-Chang Chang ,  Yaomin Lin

IPC: G01B11/02

CPC classification number: G01B11/2441

Abstract: A surface profile measuring method using a broad bandwidth light source illuminating a sample surface and a reference surface through a splitter is provided. By changing a distance between the sample surface and the reference surface with a constant step, an interference diagram with a waveform composed of interference data points depicting a relationship of surface height versus illumination intensity is generated. In the beginning, a first data point with greatest illumination intensity is selected from the interference data points on the waveform. Then, a second data point is selected from the data points on the waveform within a predetermined range centered at the first data point to have the waveform showing best quality of symmetry. Then, a peak of a fringe defined by the second data point and its neighboring data points is estimated by using phase compensating approach.

Abstract translation: 提供了使用通过分离器照射样品表面和参考表面的宽带宽光源的表面轮廓测量方法。 通过以恒定步长改变样品表面和参考表面之间的距离，产生了由描绘表面高度与照射强度的关系的干涉数据点组成的波形的干涉图。 在开始时，从波形上的干扰数据点选择具有最大照明强度的第一数据点。 然后，在以第一数据点为中心的预定范围内的波形上的数据点中选择第二数据点，以使具有最佳对称质量的波形。 然后，通过使用相位补偿方法估计由第二数据点及其相邻数据点限定的条纹的峰值。

公开(公告)号：US06687051B1

公开(公告)日：2004-02-03

申请号：US10294750

申请日：2002-11-15

Applicant: Hau-Wei Wang ,  Yaomin Lin ,  Ying-Cheun Spring Yeh

Inventor： Hau-Wei Wang ,  Yaomin Lin ,  Ying-Cheun Spring Yeh

IPC: F21V906

CPC classification number: G02B23/12 ,  G01J1/58

Abstract: A microscopic image apparatus for converting infrared light into visible light. The microscopic image apparatus includes a sample stage, an infrared source, an object lens for converting infrared light into visible light, a visible light source, a dichroic mirror, a visible light imaging lens and a visible light image capturing device. The object lens further includes an optical crystal and an infrared object lens. After the infrared source outputs infrared light to a sample placed on the sample stage, the object lens converts infrared light spectrum image into visible light spectrum image. Then, the visible light spectrum image is obtained by the visible light imaging lens and the visible light image capturing device.

Abstract translation: 一种用于将红外光转换成可见光的显微图像装置。 微观图像装置包括样品台，红外源，将红外光转换成可见光的物镜，可见光源，二向色镜，可见光成像透镜和可见光图像捕获装置。 物镜还包括光学晶体和红外物镜。 红外光源将红外光输出到样品台上的样品后，物镜将红外光谱图像转换为可见光光谱图像。 然后，通过可见光成像透镜和可见光图像捕获装置获得可见光光谱图像。