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公开(公告)号：US10468220B1
公开(公告)日：2019-11-05
申请号：US16185358
申请日：2018-11-09
Applicant: iON Technology Solutions
Inventor： Manuel A. Jerez , Carlos F. M. Borges , Amnon Parizat
Abstract: The indirectly heated cathode ion source assembly employs a cathode having a cup shaped body with a base and a cylindrical periphery, a thermal barrier having a plurality of cylindrical foils concentric to the cathode to reduce thermal loss; and a holder receiving the cathode and the thermal barrier in concentric relation.
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