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公开(公告)号：US20120327248A1
公开(公告)日：2012-12-27
申请号：US13482860
申请日：2012-05-29
Applicant: Klaas TACK , Andy Lambrechts , Luc Haspeslagh
Inventor： Klaas TACK , Andy Lambrechts , Luc Haspeslagh
CPC classification number: G01J3/2823 , G01J3/12 , G01J3/26 , G01J3/2803 , G01J2003/1226 , G01J2003/265 , G01J2003/2806 , G01J2003/2826 , H04N5/332 , H04N5/378
Abstract: An integrated circuit for an imaging system is disclosed. In one aspect, an integrated circuit has an array of optical sensors, an array of optical filters integrated with the sensors and configured to pass a band of wavelengths onto one or more of the sensors, and read out circuitry to read out pixel values from the sensors to represent an image. Different ones of the optical filters are configured to have a different thickness, to pass different bands of wavelengths by means of interference, and to allow detection of a spectrum of wavelengths. The read out circuitry can enable multiple pixels under one optical filter to be read out in parallel. The thicknesses may vary non monotonically across the array. The read out, or later image processing, may involve selection or interpolation between wavelengths, to carry out spectral sampling or shifting, to compensate for thickness errors.
Abstract translation: 公开了一种用于成像系统的集成电路。 在一个方面，集成电路具有光学传感器阵列，与传感器集成的光学滤波器阵列，并被配置为将波长带传递到一个或多个传感器上，并且读出电路以从 传感器来表示图像。 不同的滤光器被配置为具有不同的厚度，以通过干涉传递不同波长的波段，并且允许检测波长谱。 读出电路可以使一个光学滤波器下的多个像素平行读出。 厚度可以在整个阵列上单调变化。 读出或稍后的图像处理可能涉及波长之间的选择或插值，以进行频谱采样或移位，以补偿厚度误差。
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公开(公告)号：US20160252395A1
公开(公告)日：2016-09-01
申请号：US15059715
申请日：2016-03-03
Applicant: IMEC
Inventor： Klaas Tack , Andy Lambrechts , Luc Haspeslagh
CPC classification number: G01J3/2823 , G01J3/12 , G01J3/26 , G01J3/2803 , G01J2003/1226 , G01J2003/265 , G01J2003/2806 , G01J2003/2826 , H04N5/332 , H04N5/378
Abstract: An integrated circuit for an imaging system is disclosed. In one aspect, an integrated circuit has an array of optical sensors, an array of optical filters integrated with the sensors and configured to pass a band of wavelengths onto one or more of the sensors, and read out circuitry to read out pixel values from the sensors to represent an image. Different ones of the optical filters are configured to have a different thickness, to pass different bands of wavelengths by means of interference, and to allow detection of a spectrum of wavelengths. The read out circuitry can enable multiple pixels under one optical filter to be read out in parallel. The thicknesses may vary non-monotonically across the array. The read out, or later image processing, may involve selection or interpolation between wavelengths, to carry out spectral sampling or shifting, to compensate for thickness errors.
Abstract translation: 公开了一种用于成像系统的集成电路。 在一个方面，集成电路具有光学传感器阵列，与传感器集成的光学滤波器阵列，并被配置为将波长带传递到一个或多个传感器上，并且读出电路以从 传感器来表示图像。 不同的滤光器被配置为具有不同的厚度，以通过干涉传递不同波长的波段，并且允许检测波长谱。 读出电路可以使一个光学滤波器下的多个像素平行读出。 厚度可以在阵列之间非单调地变化。 读出或稍后的图像处理可能涉及波长之间的选择或插值，以进行频谱采样或移位，以补偿厚度误差。
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公开(公告)号：US5319441A
公开(公告)日：1994-06-07
申请号：US114287
申请日：1993-09-01
Applicant: Mitsugu Terada , Ken Ohmata , Michito Uehara , Hideaki Shibata , Yasuo Oeda , Yuichiro Terashi
Inventor： Mitsugu Terada , Ken Ohmata , Michito Uehara , Hideaki Shibata , Yasuo Oeda , Yuichiro Terashi
CPC classification number: G01J9/0246 , G01J2003/265
Abstract: A laser light, whose wavelength is to be measured, is introduced into an etalon, a concentric circular interference stripe derived from the etalon is irradiated onto a one-dimensional photodetector array and a diameter of the interference stripe is measured to measure the wavelength of the laser light. Alternatively, if a reference laser light of known wavelength is introduced into the etalon, as described above, a wavelength measurement of extremely high accuracy can be made without being affected by positional deviations of the optical system.
Abstract translation: 将要测量其波长的激光引入标准具中，将衍生自标准具的同心圆形干涉条纹照射到一维光电检测器阵列上，并测量干涉条纹的直径以测量波长 激光灯。 或者，如果将已知波长的参考激光引入标准具，如上所述，可以在不受光学系统的位置偏差的影响的情况下进行极高精度的波长测量。
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Patent Agency Ranking
公开(公告)号：US11733095B2
公开(公告)日：2023-08-22
申请号：US17302217
申请日：2021-04-27
Applicant: IMEC
Inventor： Nicolaas Tack , Andy Lambrechts , Luc Haspeslagh
CPC classification number: G01J3/2823 , G01J3/12 , G01J3/26 , G01J3/2803 , H04N23/11 , H04N25/75 , G01J2003/1226 , G01J2003/265 , G01J2003/2806 , G01J2003/2826
Abstract: A method for calibrating an image sensor begins by illuminating a portion of the image sensor with an input light spectrum, where the input light spectrum includes light of known wavelength and intensity. The method continues by sampling an output for each optical sensor of the image sensor, where each optical sensor is associated with one or more optical filters and where each optical filter being associated with a group of optical filters of a plurality of groups of optical filters. Each optical filter of a group of optical filters is configured to pass light in a different wavelength range and at least some optical filters in different groups of the plurality of groups of optical filters are configured to pass light in substantially a same wavelength range. The method then continues by comparing a sampled output for each optical sensor of the plurality of optical sensors with an expected output and generating a calibration factor for each of at least a subset of the plurality of optical sensors and storing the generated calibration factors in memory.
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公开(公告)号：US20160252396A1
公开(公告)日：2016-09-01
申请号：US15059621
申请日：2016-03-03
Applicant: IMEC
Inventor： Klaas Tack , Andy Lambrechts , Luc Haspeslagh
CPC classification number: G01J3/2823 , G01J3/12 , G01J3/26 , G01J3/2803 , G01J2003/1226 , G01J2003/265 , G01J2003/2806 , G01J2003/2826 , H04N5/332 , H04N5/378
Abstract: An integrated circuit for an imaging system is disclosed. In one aspect, an integrated circuit has an array of optical sensors, an array of optical filters integrated with the sensors and configured to pass a band of wavelengths onto one or more of the sensors, and read out circuitry to read out pixel values from the sensors to represent an image. Different ones of the optical filters are configured to have a different thickness, to pass different bands of wavelengths by means of interference, and to allow detection of a spectrum of wavelengths. The read out circuitry can enable multiple pixels under one optical filter to be read out in parallel. The thicknesses may vary non-monotonically across the array. The read out, or later image processing, may involve selection or interpolation between wavelengths, to carry out spectral sampling or shifting, to compensate for thickness errors.
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公开(公告)号：US09304039B2
公开(公告)日：2016-04-05
申请号：US13482860
申请日：2012-05-29
Applicant: Klaas Tack , Andy Lambrechts , Luc Haspeslagh
Inventor： Klaas Tack , Andy Lambrechts , Luc Haspeslagh
CPC classification number: G01J3/2823 , G01J3/12 , G01J3/26 , G01J3/2803 , G01J2003/1226 , G01J2003/265 , G01J2003/2806 , G01J2003/2826 , H04N5/332 , H04N5/378
Abstract: An integrated circuit for an imaging system is disclosed. In one aspect, an integrated circuit has an array of optical sensors, an array of optical filters integrated with the sensors and configured to pass a band of wavelengths onto one or more of the sensors, and read out circuitry to read out pixel values from the sensors to represent an image. Different ones of the optical filters are configured to have a different thickness, to pass different bands of wavelengths by means of interference, and to allow detection of a spectrum of wavelengths. The read out circuitry can enable multiple pixels under one optical filter to be read out in parallel. The thicknesses may vary non monotonically across the array. The read out, or later image processing, may involve selection or interpolation between wavelengths, to carry out spectral sampling or shifting, to compensate for thickness errors.
Abstract translation: 公开了一种用于成像系统的集成电路。 在一个方面，集成电路具有光学传感器阵列，与传感器集成的光学滤波器阵列，并被配置为将波长带传递到一个或多个传感器上，并且读出电路以从 传感器来表示图像。 不同的滤光器被配置为具有不同的厚度，以通过干涉传递不同波长的波段，并且允许检测波长谱。 读出电路可以使一个光学滤波器下的多个像素平行读出。 厚度可以在整个阵列上单调变化。 读出或稍后的图像处理可能涉及波长之间的选择或插值，以进行频谱采样或移位，以补偿厚度误差。
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公开(公告)号：US5243614A
公开(公告)日：1993-09-07
申请号：US795793
申请日：1991-11-21
Applicant: Hitoshi Wakata , Atsushi Sugitatsu , Hajime Nakatani , Yasushi Minamitani
Inventor： Hitoshi Wakata , Atsushi Sugitatsu , Hajime Nakatani , Yasushi Minamitani
CPC classification number: G01J3/02 , G01J3/0237 , G01J3/26 , H01S3/137 , G01J2001/4493 , G01J2003/265 , H01S3/225
Abstract: A wavelength monitor/stabilizer for narrowly controlling the bandwidth of laser; the monitor/stabilizer uses parameters Q, F or G derived by measuring diameters of interference fringes given by the beam of the wavelength-controlled narrow bandwidth laser e.g. excimer laser and those given by the reference light e.g. of a mercury lamp. The controlling is made by controlling the parameter to be in a predetermined range. An image sensing unit for detecting the interference fringes are splitted into plural image sensors with adjustable distance for enabling more rapid measurement by skipping the in-between part.
Abstract translation: 用于狭窄控制激光带宽的波长监视器/稳定器; 监视器/稳定器使用通过测量由波长控制的窄带宽激光束的波束给出的干涉条纹的直径导出的参数Q，F或G，例如 准分子激光和由参考光给出的那些。 的水银灯。 通过将参数控制在预定范围内来进行控制。 用于检测干涉条纹的图像感测单元被分割成具有可调节距离的多个图像传感器，以通过跳过中间部分来实现更快速的测量。
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公开(公告)号：US5206708A
公开(公告)日：1993-04-27
申请号：US631496
申请日：1990-12-21
Applicant: Gunter Knapp , Bernhard Platzer
Inventor： Gunter Knapp , Bernhard Platzer
CPC classification number: G01J3/36 , G01J3/26 , G01J2003/1226 , G01J2003/265
Abstract: An apparatus for the simultaneous detection of several ranges of wavelengths of polychromatic light radiation, using one detector for each detected range of wavelengths, includes an interference filter which filters the range of wavelengths to be detected out of the polychromatic light beam, and optical elements for guiding the polychromatic light beam to be detected. The optical elements include a first system of mirrors in the path of the incident polychromatic light beam for collimating it in a hollow-cylindrical manner, one mirror of the first system of mirrors being located at the center of the collimated light beam. The optical elements further include a second system of mirrors in the hollow-cylindrically collimated light beam that deflects this light essentially perpendicularly to the conceptual surface of the hollow cylinder and radially to the longitudinal axis of thereof. Photo-detectors associated with the particular deflection mirrors are mounted opposite the second system of mirrors to receive the deflected light. A common interference filter is mounted in the path of the beam between the deflecting mirrors and the photo-detectors, the deflecting mirrors and the associated photo-detectors being pivotable about the interference filter.
Abstract translation: 一种用于同时检测多个波长的多色光辐射的装置，对于每个检测到的波长范围使用一个检测器，包括滤波器，该滤波器对从多色光束中检测的波长范围进行滤波，以及用于 引导待检测的多色光束。 光学元件包括在入射多色光束的路径中的第一镜子系统，用于以中空圆柱形的方式准直它，第一系统镜的一个反射镜位于准直光束的中心。 光学元件还包括在中空圆柱形准直光束中的第二反射镜系统，该光束基本上垂直于中空圆柱体的概念表面并且径向偏转到其纵向轴线。 与特定偏转镜相关联的光电检测器安装在第二反射镜系统对面以接收偏转的光。 常见的干涉滤光器安装在偏转镜与光电检测器之间的光束路径中，偏转镜和相关的光检测器可围绕干涉滤光片转动。
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