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    Water Cooled, Air Bearing Based Rotating Anode X-ray Illumination Source
    1.
    发明公开
    Water Cooled, Air Bearing Based Rotating Anode X-ray Illumination Source 审中-公开

    公开(公告)号：US20240105414A1

    公开(公告)日：2024-03-28

    申请号：US17950768

    申请日：2022-09-22

    Applicant: KLA Corporation

    Inventor： Michel Pharand

    IPC: H01J35/10

    CPC classification number: H01J35/106 ,  H01J35/1017 ,  F16C33/107

    Abstract: Methods and systems for realizing a high speed, rotating anode based x-ray illumination source suitable for high throughput x-ray metrology are presented herein. A high speed rotating anode includes a water cooled rotating platen supported by radial and thrust air bearings employing cascaded differential pumping. A very high bending stiffness of the rotating assembly is achieved by spacing radial air bearings far apart and locating a rotary motor and thrust bearings between the radial air bearings. The high bending stiffness increases the mechanical stability of the rotating assembly during high speed operation, and thus decreases vibration at the location of impingement of the electron beam on the rotating anode material. In some embodiments, magnetic thrust bearings are employed and the air gap is controlled to maintain a desired gap over an operational range of up to three millimeters.

    ANODE
    2.
    发明申请
    ANODE 审中-公开

    公开(公告)号：US20180075999A1

    公开(公告)日：2018-03-15

    申请号：US15696845

    申请日：2017-09-06

    Applicant: SIEMENS HEALTHCARE GMBH

    Inventor： JOERG FREUDENBERGER ,  ANJA FRITZLER

    IPC: H01J35/12

    CPC classification number: H01J35/12 ,  H01J35/106 ,  H01J2235/1279 ,  H01J2235/1283

    Abstract: An anode has a base member, on which an X-ray active layer is applied. A first cooling circuit with a first cooling medium extends at least in part in the base member beneath the X-ray active layer. A second cooling circuit with a second cooling medium is arranged beneath the first cooling circuit. The anode exhibits distinctly improved thermo mechanical properties.

    Rotating union for a liquid cooled rotating X-ray target
    5.
    发明授权
    Rotating union for a liquid cooled rotating X-ray target 有权
    旋转接头用于液体冷却的旋转X射线靶

    公开(公告)号：US08009805B2

    公开(公告)日：2011-08-30

    申请号：US12480808

    申请日：2009-06-09

    Applicant: Walter John Smith ,  Vance Scott Robinson ,  Aniruddha Dattatraya Gadre ,  Mark Alan Frontera

    Inventor： Walter John Smith ,  Vance Scott Robinson ,  Aniruddha Dattatraya Gadre ,  Mark Alan Frontera

    IPC: H01J35/10

    CPC classification number: H01J35/106 ,  H01J35/101 ,  H01J2235/1006 ,  H01J2235/1204 ,  H01J2235/1208 ,  H01J2235/1266 ,  H01J2235/127

    Abstract: A rotating union for an X-ray target is provided. The rotating union for the X-ray target comprises a housing, a coolant-slinging device comprising a rotating shaft having an inner diameter and an outer diameter, a proximal end and a distal end, and a bore therein, one or more slingers coupled to a proximal end of the rotating shaft; a drain annulus coupled to the one or more slingers, wherein the one or more slingers are configured to direct a coolant to the drain annulus and the drain annulus is configured to direct the coolant through a primary coolant outlet; and a stationary tube having a first end and a second end, wherein at least a portion of the stationary tube is disposed within the bore of the rotating shaft.

    Abstract translation: 提供了用于X射线靶的旋转联接。 用于X射线靶的旋转接头包括壳体，包括具有内径和外径的旋转轴，近端和远端以及其中的孔的冷却剂悬挂装置，一个或多个连杆 旋转轴的近端; 联接到所述一个或多个吊索的排水环，其中所述一个或多个吊索被构造成将冷却剂引导到所述排水环，并且所述排水环被构造成引导所述冷却剂通过主冷却剂出口; 以及具有第一端和第二端的固定管，其中所述固定管的至少一部分设置在所述旋转轴的孔内。

    Rotating anode X-ray tube
    8.
    发明授权
    Rotating anode X-ray tube 有权
    旋转阳极X射线管

    公开(公告)号：US07697665B2

    公开(公告)日：2010-04-13

    申请号：US12469254

    申请日：2009-05-20

    Applicant: Tetsuya Yonezawa ,  Hironori Nakamuta ,  Ryoichi Takahashi ,  Yasuo Yoshii ,  Hitoshi Hattori ,  Yasutaka Ito

    Inventor： Tetsuya Yonezawa ,  Hironori Nakamuta ,  Ryoichi Takahashi ,  Yasuo Yoshii ,  Hitoshi Hattori ,  Yasutaka Ito

    IPC: H01J35/00

    CPC classification number: H01J35/106 ,  H01J2235/1006 ,  H01J2235/1046 ,  H01J2235/108 ,  H01J2235/1204 ,  H01J2235/1262

    Abstract: A rotating anode X-ray tube includes a fixed body having a radial sliding bearing surface and a channel therein through which a coolant flows, a rotor including a discoid large-diameter portion, which has a recess fitted with one end portion of the fixed body with a clearance therebetween and constitutes an anode target, and a small-diameter portion, which has on an inner surface thereof a radial sliding bearing surface which faces the aforesaid radial sliding bearing surface with a clearance, and is united with the large-diameter portion at one end portion thereof, a lubricant filling the clearances, a cathode arranged opposite to the anode target, and a vacuum envelope which contains the fixed body, the rotor, the lubricant and the cathode, and fixes the fixed body at another end portion of the fixed body situated opposite the one end portion of the fixed body fitted in the recess.

    Abstract translation: 旋转阳极X射线管包括具有径向滑动轴承表面的固定体和冷却剂流过的通道，包括盘状大直径部分的转子，其具有与固定体的一个端部配合的凹部 并且构成阳极靶，小直径部分在其内表面上具有与所述径向滑动轴承表面间隙相对的径向滑动轴承表面，并与大直径部分 在其一端部分填充有间隙的润滑剂，与阳极靶相对的阴极，以及包含固定体，转子，润滑剂和阴极的真空外壳，并将固定体固定在另一端部 所述固定体位于与所述凹部中嵌合的所述固定体的一端部相对的位置。

    Convectively cooled x-ray tube target and method of making same
    9.
    发明授权
    Convectively cooled x-ray tube target and method of making same 有权
    对流冷却x射线管靶及其制作方法

    公开(公告)号：US07508916B2

    公开(公告)日：2009-03-24

    申请号：US11608328

    申请日：2006-12-08

    Applicant: Mark A. Frontera ,  Christopher David Unger

    Inventor： Mark A. Frontera ,  Christopher David Unger

    IPC: H01J35/10

    CPC classification number: H01J35/106 ,  H01J35/101

    Abstract: An anode assembly includes a rotatable hub having a rotation axis and having a cooling passage formed therethrough and a ferrofluid seal attached to the rotatable hub, the ferrofluid seal fluidically separating a first volume containing the target from a second volume. A target is attached to the rotatable hub, the target having a rotation axis coincident with the rotation axis of the rotatable hub and having a chamber formed therein fluidically coupled to the cooling passage, the target having a focal track material attached to an outer face of the target.

    Abstract translation: 阳极组件包括具有旋转轴线并且具有穿过其形成的冷却通道的可旋转轮毂和附接到可旋转轮毂的铁磁流体密封件，所述铁磁流体密封件使包含所述靶材的第一容积与第二容积流体分离。 目标附接到可旋转轮毂，目标具有与可旋转轮毂的旋转轴线重合的旋转轴线，并且具有形成在其中流体耦合到冷却通道的腔室，靶材具有连接到 目标。

    CONVECTIVELY COOLED X-RAY TUBE TARGET AND METHOD OF MAKING SAME
    10.
    发明申请
    CONVECTIVELY COOLED X-RAY TUBE TARGET AND METHOD OF MAKING SAME 有权
    连续冷却的X射线管目标及其制造方法

    公开(公告)号：US20080137812A1

    公开(公告)日：2008-06-12

    申请号：US11608328

    申请日：2006-12-08

    Applicant: Mark A. Frontera ,  Christopher David Unger

    Inventor： Mark A. Frontera ,  Christopher David Unger

    IPC: H01J35/00 ,  H01J35/12

    CPC classification number: H01J35/106 ,  H01J35/101

    Abstract: An anode assembly includes a rotatable hub having a rotation axis and having a cooling passage formed therethrough and a ferrofluid seal attached to the rotatable hub, the ferrofluid seal fluidically separating a first volume containing the target from a second volume. A target is attached to the rotatable hub, the target having a rotation axis coincident with the rotation axis of the rotatable hub and having a chamber formed therein fluidically coupled to the cooling passage, the target having a focal track material attached to an outer face of the target.

    Abstract translation: 阳极组件包括具有旋转轴线并且具有穿过其形成的冷却通道的可旋转轮毂和附接到可旋转轮毂的铁磁流体密封件，所述铁磁流体密封件使包含所述靶材的第一容积与第二容积流体分离。 目标附接到可旋转轮毂，目标具有与可旋转轮毂的旋转轴线重合的旋转轴线，并且具有形成在其中流体耦合到冷却通道的腔室，靶材具有连接到 目标。

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