公开(公告)号：US20100024872A1

公开(公告)日：2010-02-04

申请号：US12521080

申请日：2007-12-05

Applicant: Katsushi Kishimoto ,  Yusuke Fukuoka

Inventor： Katsushi Kishimoto ,  Yusuke Fukuoka

IPC: H01L31/075 ,  H01L21/20 ,  H01L31/0352 ,  B05C11/115

CPC classification number: H01L21/02661 ,  C23C16/4408 ,  C23C16/45557 ,  H01L21/02532 ,  H01L21/02573 ,  H01L21/02592 ,  H01L21/02595 ,  H01L21/0262 ,  H01L31/0747 ,  H01L31/075 ,  H01L31/1804 ,  H01L31/1816 ,  H01L31/202 ,  Y02E10/547 ,  Y02E10/548 ,  Y02P70/521

Abstract: Provided are a semiconductor layer manufacturing method and a semiconductor manufacturing apparatus capable of forming a high quality semiconductor layer even by a single chamber system, with a shortened process time required for reducing a concentration of impurities that exist in a reaction chamber before forming the semiconductor layer. A semiconductor device manufactured using such a method and apparatus is also provided. The present invention relates to a semiconductor layer manufacturing method of forming a semiconductor layer inside a reaction chamber (101) capable of being hermetically sealed, including an impurities removing step of removing impurities inside the reaction chamber (101) using a replacement gas, and a semiconductor layer forming step of forming the semiconductor layer, the impurities removing step being a step in which a cycle composed of a replacement gas introducing step of introducing the replacement gas into the reaction chamber (101) and an exhausting step of exhausting the replacement gas is repeated a plurality of times, the impurities removing step being performed at least before the semiconductor layer forming step.

Abstract translation: 提供了即使通过单室系统也能形成高质量半导体层的半导体层制造方法和半导体制造装置，在形成半导体层之前缩短反应室中存在的杂质浓度所需的缩短处理时间 。 还提供了使用这种方法和装置制造的半导体器件。 本发明涉及一种半导体层制造方法，该半导体层制造方法在能够被气密密封的反应室（101）内部形成半导体层，其包括使用替换气体除去反应室（101）内的杂质的杂质除去步骤，以及 形成半导体层的半导体层形成步骤，杂质除去步骤是将置换气体引入步骤构成的循环，将置换气体引入反应室（101）的排气步骤和排出置换气体的排气步骤的步骤是 重复多次，至少在半导体层形成步骤之前进行杂质去除步骤。

公开(公告)号：US20090197356A1

公开(公告)日：2009-08-06

申请号：US12383623

申请日：2009-03-27

Applicant: Won B. Bang ,  Yen-Kun Victor Wang

Inventor： Won B. Bang ,  Yen-Kun Victor Wang

IPC: C23C16/52 ,  B05C11/115 ,  H01L21/66

CPC classification number: H01L21/67259

Abstract: We have discovered a method of using the vacuum chuck/heater upon which a substrate wafer is positioned to determine whether the wafer is properly placed on the vacuum chuck. The method employs measurement of a rate of increase in pressure in a confined space beneath the substrate. Because the substrate is not hermetically sealed to the upper surface of the vacuum chuck/heater apparatus, pressure from the processing chamber above the substrate surface tends to leak around the edges of the substrate and into the space beneath the substrate which is at a lower pressure. A pressure sensing device, such as a pressure transducer is in communication with a confined volume present beneath the substrate. The rate of pressure increase in the confined volume is measured. If the substrate is well positioned on the vacuum chuck/heater apparatus, the rate of pressure increase in the confined volume beneath the substrate is slow. If the substrate is not well positioned on the vacuum chuck/heater apparatus, the rate of pressure increase is more rapid.

Abstract translation: 我们已经发现了使用真空卡盘/加热器的方法，在该方法上放置基板晶片以确定晶片是否被适当地放置在真空卡盘上。 该方法采用基底下方的限制空间内的压力增加率的测量。 因为基板没有气密地密封到真空卡盘/加热器装置的上表面，所以来自基板表面上方的处理室的压力倾向于在基板的边缘周围泄漏到位于较低压力的基板下方的空间 。 诸如压力传感器的压力感测装置与存在于基底下方的限定体积连通。 测量限制体积内的压力增加率。 如果衬底位于真空吸盘/加热器装置上，则衬底下限制体积内的压力增加速度较慢。 如果基板没有很好地定位在真空吸盘/加热器装置上，则压力增加的速度更快。

公开(公告)号：US20050241177A1

公开(公告)日：2005-11-03

申请号：US11176440

申请日：2005-07-07

Applicant: William Kolb ,  Gary Huelsman

Inventor： William Kolb ,  Gary Huelsman

IPC: B05C3/12 ,  B05C5/02 ,  B05C9/06 ,  B05C9/10 ,  B05C9/12 ,  B05C9/14 ,  B05C11/115 ,  B05C15/00 ,  B05D3/04 ,  F26B3/00 ,  F26B3/34 ,  F26B13/00 ,  F26B13/10 ,  F26B25/00 ,  G03C1/74 ,  G11B5/842

CPC classification number: B05D3/0486 ,  B05C5/0254 ,  B05C9/06 ,  B05C9/10 ,  B05C9/12 ,  B05C9/14 ,  B05C11/115 ,  B05C15/00 ,  F26B13/005 ,  F26B13/10 ,  F26B25/006 ,  G03C1/74 ,  G11B5/842

Abstract: A web coating process and apparatus employing a coating applicator, dryer or curing station and web-handling equipment for conveying the web past the coating applicator and through the dryer. The web is enclosed from at least the coating applicator to the dryer or curing station in a close-coupled enclosure or series of close-coupled enclosures supplied with one or more streams of conditioned gas flowing at a rate sufficient to reduce materially the particle count or change materially a physical property of interest in a close-coupled enclosure.

Abstract translation: 一种幅材涂布方法和装置，其使用涂布施加器，干燥器或固化站以及用于将纸幅传送通过涂布器并通过干燥器的卷筒纸处理设备。 纤维网从至少涂层施用器封闭到紧密耦合的外壳或一系列紧密耦合的外壳中的干燥器或固化站，该外壳或一系列紧密耦合的外壳提供有一个或多个调节气体流，其流速足以实质地减少粒子数，或 在一个紧密耦合的外壳中实质上改变了一个感兴趣的物理属性。

公开(公告)号：US5866064A

公开(公告)日：1999-02-02

申请号：US737797

申请日：1996-12-18

Applicant: Nakamura Teruhisa

Inventor： Nakamura Teruhisa

IPC: F16J15/06 ,  B05C9/14 ,  B05C11/115 ,  C21D1/74 ,  C21D9/56 ,  F27B9/04 ,  F27B9/28 ,  F27D3/00 ,  F27D3/02 ,  F27D99/00

CPC classification number: F27D99/0073 ,  C21D9/565 ,  F27B9/28 ,  F27D3/026 ,  C21D9/561 ,  F27B9/045 ,  F27D2003/0053 ,  F27D2003/0067 ,  F27D2099/0078

Abstract: Elastic rotation rolls can be installed easily at optimal positions, and stable sealing performance can be attained for an extended period of time. Seal discs 47 are disposed at both ends of the roll shaft 46 of each elastic rotation roll 44 in the axial direction thereof. The outer peripheral surface of the seal disc 47 is closely contacted with the arc-shaped contact surface 52 of a sealing side wall 49 to attain sealing performance at each end face of the roll. Even if the seal disc 47 is displaced with respect to the sealing side wall 49, the sealing performance can be maintained. In this way, the structure of the sealing apparatus can be simplified and the elastic rotation rolls can be installed easily.

Abstract translation: PCT No.PCT / JP95 / 01147 Sec。 371日期：1996年12月18日 102（e）日期1996年12月18日PCT提交1995年6月7日PCT公布。 公开号WO96 / 33291 日期1996年10月24日塑料旋转辊可以轻松安装在最佳位置，并可长时间保持稳定的密封性能。 密封盘47设置在各弹性转动辊44的辊轴46的轴向两端。 密封盘47的外周表面与密封侧壁49的弧形接触表面52紧密接触，以在辊的每个端面处获得密封性能。 即使密封盘47相对于密封侧壁49移位，也可以保持密封性能。 以这种方式，可以简化密封装置的结构，并且可以容易地安装弹性旋转辊。

公开(公告)号：US4588616A

公开(公告)日：1986-05-13

申请号：US661913

申请日：1984-10-17

Applicant: Howard K. Menser

Inventor： Howard K. Menser

IPC: B05C11/115 ,  B05D1/18 ,  D06B3/20 ,  B05C3/12

CPC classification number: D21H23/32 ,  D06B3/201 ,  D21H5/0012

Abstract: A pressure saturator for impregnating a substrate with a saturant is disclosed, having a block member with an arcuate, sloping upper surface that is graduated from a relatively deep portion to a relatively shallow portion. Rollers are disposed on each side of the block member for conveying the substrate into and out of the saturator, and a mandrel is disposed between the rollers for guiding the substrate through the saturator. The lower portion of the mandrel is spaced from the block member and extends into the recess formed by the arcuate surface to define a chamber therebetween. The chamber has an inlet and an outlet for admitting the substrate and the saturant, and converges in depth from the inlet region to the outlet region to pressurize the solution and force the saturant into the interstices of the substrate.

Abstract translation: 公开了一种用饱和剂浸渍基底的压力饱和器，其具有一个具有弧形，倾斜的上表面的块状构件，其从相对较深的部分分级至较浅的部分。 辊子设置在块构件的每一侧上，用于将衬底输入和离开饱和器，并且心轴设置在辊之间，用于引导衬底通过饱和器。 心轴的下部与块体间隔开并延伸到由弓形表面形成的凹槽中，以在它们之间形成腔室。 腔室具有入口和出口，用于允许衬底和饱和物，并且从入口区域到出口区域的深度会聚，以加压溶液并将饱和物质压入衬底的间隙。

公开(公告)号：US4270317A

公开(公告)日：1981-06-02

申请号：US126937

申请日：1980-03-04

Applicant: Eugene J. Kurie

Inventor： Eugene J. Kurie

IPC: A61L9/01 ,  B05C3/12 ,  B05C11/115 ,  C23G3/02 ,  B24C3/12 ,  B24C7/00

CPC classification number: C23G3/026 ,  A61L9/01 ,  C23G3/024

Abstract: An apparatus used in the treatment of a sheet of metal without the aid of conventional sprays and flooding nozzles normally used in the application of the metal treating liquid and support rollers and squeeze used for contacting and guiding the sheet of metal through successive baths of the metal treating liquid and preventing the carryover of liquid between the treatment tanks of the apparatus. In the apparatus, a sheet of metal is guided in a horizontal pathway between successive treatment tanks or units having horizontally elongated chambers with two rows of oppositely disposed and horizontally aligned nozzles between which the sheet of metal travels on a liquid bed that is created by the nozzles which are designed to direct streams of liquid, under pressure, against the traveling metal sheet at angles that are substantially less than 90.degree. relative to the plane in which the metal sheet travels. A unique liquid seal and conventional blowoff device are utilized at each opening through which the traveling metal sheet enters and exits the various chambers, as a means of maintaining the liquid within the chamber and preventing it from being carried away by the traveling metal sheet into an adjacent chamber where the appearance of such liquid may have a deleterious affect upon the process being carried out in that particular chamber. The individual units are also free of brushes and other such devices which are normally used to aid in the cleaning of the sheet of metal.

Abstract translation: 一种用于处理金属片的设备，不需要通常用于金属处理液和支撑辊的应用中的常规喷雾和淹水喷嘴的帮助，并且挤压用于通过连续的金属浴接触和引导金属片 处理液体并防止在设备的处理槽之间携带液体。 在该设备中，一片金属在连续的处理槽或具有两排相对布置且水平对准的喷嘴的水平细长室的单元之间的水平通道中被引导，金属板在液体床之间在由液体床 喷嘴，其被设计成相对于金属板行进的平面基本上小于90°的角度，在压力下将液体流引导到行进金属板。 在每个开口处使用独特的液体密封和传统的吹气装置，每个开口通过行进金属板进入和离开各个室，作为将液体保持在室内的手段，并防止其被移动的金属板带入 相邻的室，其中这种液体的出现可能对在该特定室中进行的过程具有有害的影响。 各个单元也没有电刷和其他这样的装置，这些装置通常用于帮助清洁金属片。

公开(公告)号：US3848439A

公开(公告)日：1974-11-19

申请号：US30801472

申请日：1972-11-20

Applicant: KLEINEWEFERS IND CO GMBH

Inventor： LOPATA K

IPC: D06B1/00 ,  D06B1/14 ,  D06B3/10 ,  D06B7/08 ,  D06B15/04 ,  B05C1/10 ,  B05C3/132 ,  B05C11/115

CPC classification number: D06B1/142 ,  D06B1/144

Abstract: A device especially for impregnating and dyeing wide textile webs in a continuous manner, which includes a vacuum device, at least one roller and a liquor receiving container, which when being viewed in the direction of the movement of the textile web to be treated, is located behind said container, said vacuum device comprising a hood extending approximately over the length of said roller and being equipped with a rim-shaped structure along its edge into which is placed an elastic endless sealing strip adapted to be pressed against said roller, the lower section of the hood being immersible into the liquor container.

Abstract translation: 一种特别用于以连续的方式浸渍和染色宽幅织物的装置，其包括真空装置，至少一个辊和液体接收容器，当沿待处理织物网的运动方向观察时， 位于所述容器后面，所述真空装置包括大致在所述辊的长度上延伸的罩，并且沿着其边缘装备有边缘形结构，其中放置有适于压靠所述辊的弹性环形密封条，所述下部 发动机罩的部分可浸入液体容器中。

公开(公告)号：US11266961B2

公开(公告)日：2022-03-08

申请号：US16320849

申请日：2017-07-25

Applicant: ZHENGZHOU SANHUA TECHNOLOGY & INDUSTRY CO., LTD.

Inventor： Hanlu Zuo ,  Yiyang Yu

IPC: B01F15/00 ,  B05C11/11 ,  B44D3/12 ,  B05C11/115 ,  B01F7/16 ,  B01F13/10

Abstract: An agitator lid suitable for different paint pot openings includes a paint outlet mechanism for controlling paint pouring, and at least two compression mechanisms compressing a paint pot with the agitator lid, each compression mechanism involving: a through-hole provided on the agitator lid, a compression rod passing through the through-hole, a sealing sleeve sheathed on the outside of the compression rod, an up-turned edge of the sealing sleeve pressing on the agitator lid, the periphery of the compression rod between the up-turned edge of the sealing sleeve and a handle on an upper end of the compression rod being sheathed with a compression spring, a lower end of the compression rod being a presser foot, a face of the presser foot being a fan ring shape, a vertical face being provided on a connecting line between two arc-shaped lines along the fan ring shape.

公开(公告)号：US09555439B2

公开(公告)日：2017-01-31

申请号：US13964427

申请日：2013-08-12

Applicant: Building Materials Investment Corporation

Inventor： James A. Svec

IPC: B05D1/12 ,  B05D1/30 ,  B05C11/115 ,  B05C19/04 ,  B05C19/06 ,  E04D1/20 ,  E04D1/00

CPC classification number: B05C11/115 ,  B05C19/04 ,  B05C19/06 ,  B05D1/30 ,  B05D2401/00 ,  B05D2401/32 ,  E04D1/20 ,  E04D2001/005 ,  B05D2401/30

Abstract: A high speed granule delivery system and method is disclosed for dispensing granules in intermittent patterns onto a moving asphalt coated strip in the manufacture of roofing shingles. The system includes a granule hopper and a rotationally indexable pocket wheel having an alternating series of pockets and lands formed into the circumference thereof, and which is positioned adjacent a nozzle in the bottom of the hopper. Upper and lower side portions of the pocket wheel define and are exposed to upper and lower extents of a store of granules. A seal on the bottom of the lower extent of the store of granules seals against the raised lands as the wheel is indexed. In use, the pockets of the pocket wheel drive through and are filled with granules in the store of granules. As each pocket is indexed beyond the seal, it is exposed to the moving asphalt coated strip below and its granules fall onto the strip to be embedded in the hot tacky asphalt.

Abstract translation: 公开了一种高速颗粒递送系统和方法，用于在制造屋顶瓦片的情况下以间歇模式将颗粒分配到移动的沥青涂层条带上。 该系统包括颗粒料斗和可旋转定位的凹槽轮，其具有形成在其圆周中的交替的一系列凹穴和平台，并且其位于料斗底部的喷嘴附近。 袋轮的上侧和下侧部分限定并暴露于颗粒储存器的上部和下部。 当砂轮被分度时，颗粒储存器的下部的底部的密封件抵靠凸起的土地部分密封。 在使用中，口袋的口袋驱动穿过，并在颗粒储存器中填充颗粒。 当每个口袋被索引超过密封件时，它暴露在下面的移动的沥青涂层条带上，并且其颗粒落在条上以嵌入热粘沥青中。

公开(公告)号：US09242266B2

公开(公告)日：2016-01-26

申请号：US14360155

申请日：2013-06-28

Applicant: BOE TECHNOLOGY GROUP CO., LTD. ,  BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.

Inventor： Yongshan Zhou ,  Chengtan Zhao ,  Jingpeng Li ,  Haiyun Lin

IPC: B05C11/10 ,  G02F1/13 ,  G02F1/1337 ,  B05C11/115 ,  B05C9/04 ,  B05C9/00

CPC classification number: B05C11/10 ,  B05C9/00 ,  B05C9/04 ,  B05C11/115 ,  G02F1/1303 ,  G02F1/1337

Abstract: An alignment film printing device, configured to improve coating quality of an alignment film, includes at least one printing unit, and the printing unit each includes: a cylinder body with an opening at a bottom and an extract opening on a top; a vacuum extractor connected with the extract opening; a plunger provided inside the cylinder body, and configured to draw the alignment fluid from the opening to the cylinder body; a vacuum tester provided at the extract opening and configured to monitor a vacuum degree inside the cylinder body and above the plunger; a range finder provided inside the cylinder body and configured to monitor a distance from the plunger to a top of the cylinder body; and a control device in signal communication with the vacuum extractor, the vacuum tester and the range finder respectively and configured to control a volume of the alignment fluid drawn into the cylinder body according to test values of the vacuum tester and the range finder.

Abstract translation: 配置为提高取向膜的涂布质量的取向膜印刷装置包括至少一个印刷单元，并且印刷单元各自包括：在底部具有开口的柱体和顶部的提取开口; 与提取开口连接的真空抽吸器; 柱塞，其设置在所述缸体内部，并且构造成将所述对准流体从所述开口抽吸到所述缸体; 设置在所述提取开口处并且构造成用于监测所述缸体内部和所述柱塞上方的真空度的真空测试器; 测距仪，其设置在所述气缸体内并且被构造成监测从所述柱塞到所述气缸体的顶部的距离; 以及与真空抽吸器，真空测试器和测距仪分别信号连通的控制装置，其被配置成根据真空测试仪和测距仪的测试值来控制吸入气缸体中的取向流体的体积。