Abstract:
A plasma discharge ion source for a mass spectrometer, having a magnet forming an axial magnetic field, two cathodes axially spaced in said field and an annular anode between the cathodes. Ions generated by the source emerge via an opening in one cathode and then pass in succession through axially aligned openings in two planar electrodes. The electrode closest said one cathode has a further disc or cone shaped electrode positioned in the opening of that electrode so as to form an annular gap between the peripheries of the disc shaped electrode and opening.Ions from the source opening pass in succession through the annular gap and then through the electrode opening in the electrode furtherest from the source opening. By applying suitable electric potentials to the electrodes ions of an energy above a predetermined level are prevented from passing through the electrodes.A mass spectrometer employing the source is also disclosed this employing an electrostatic ion filter and an ion collector to receive filtered ions from the source via the filter.The collector includes a slow ion deflector arranged to deflect emergent ions from the filter to a collector member of the collector and to which deflector emergent ions of high energy travel directly without such deflection.
Abstract:
A cross-field discharge plasma is used to supply charge carriers for a grid controlled cold cathode discharge device. A dc magnetic field is employed to sustain the crossed-field discharge when the source grid is active. The device comprises an anode, a cathode, a source grid, and in alternate embodiments, additional control grids. Preferably the magnetic field exists only in the source grid-cathode space and penetrates only weakly, or not at all, into other electrode gaps or spaces. The source grid-cathode plasma is effectively a source of charge carriers, electrons or ions, controlled by the source grid current, the anode current being an approximate linear function of source grid current within limits, and/or controllable by adjustment of control grid potentials.
Abstract:
Disclosed is a subminiature tunable circuit in modular form and the method of making the modular circuit. A capacitor is mounted on an inductor to form a modular tunable circuit. By appropriate connections, either series or parallel reactive circuits are formed with intermediate tap connections, when desired. The circuit is tuned by changing the value of the capacitor by air abrasion techniques.
Abstract:
A high contrast plasma display device includes transparent and opaque insulator layers spaced and bonded by a plurality of spaced opaque insulator segments forming a plurality of cavities. An insulator substrate having a plurality of spaced conductors on the surface thereof in registry with the cavities and electrical connectors embedded therein is bonded to the opaque insulator layer while a transparent electrode layer is affixed to the transparent insulator layer. An ionizable gas is disposed within the cavities whereby energization of certain conductors alters the device from an opaque to a visual display. Also, the high contrast plasma display device is fabricated by a process which includes affixing the spaced conductor to a substrate, bonding an opaque insulator layer to the substrate and spaced conductors, attaching spaced opaque insulator segments to a transparent insulator layer, bonding the segments to the opaque insulator layer forming cavities in registry with the spaced conductors, affixing a transparent electrode to the transparent insulator layer, and disposing an ionizable gas within the cavities whereby the device appears opaque until energized to provide a visual display.
Abstract:
Apparatus for treating products with plasma generated from a source gas. The apparatus includes a vacuum chamber, a plurality of juxtaposed electrodes arranged in adjacent pairs inside the vacuum chamber, and a plasma excitation source electrically coupled with the electrodes. The apparatus may include conductive members extending into the interior of each electrode to establish a respective electrical connection with the plasma excitation source. The apparatus may include a gas distribution manifold and multiple gas delivery tubes coupled with the gas distribution manifold. Each gas delivery tube has an injection port configured to inject the source gas between each adjacent pair of electrodes. The apparatus may further include flow restricting members that operate to partially obstruct a peripheral gap between each adjacent pair of electrodes, which restricts the escape of the source gas from the process chamber between each adjacent pair of electrodes.
Abstract:
Apparatus for treating products with plasma generated from a source gas. The apparatus includes a vacuum chamber, a plurality of juxtaposed electrodes arranged in adjacent pairs inside the vacuum chamber, and a plasma excitation source electrically coupled with the electrodes. The apparatus may include conductive members extending into the interior of each electrode to establish a respective electrical connection with the plasma excitation source. The apparatus may include a gas distribution manifold and multiple gas delivery tubes coupled with the gas distribution manifold. Each gas delivery tube has an injection port configured to inject the source gas between each adjacent pair of electrodes. The apparatus may further include flow restricting members that operate to partially obstruct a peripheral gap between each adjacent pair of electrodes, which restricts the escape of the source gas from the process chamber between each adjacent pair of electrodes.
Abstract:
Apparatus for cleaning contaminated surfaces such as hydro-carbon contaminant films in high vacuum environments including a plasma discharge housing for allowing a plasma to be generated in an environment having a higher pressure than the surface which is to be cleaned. A ground electrode and a radio frequency electrode partially surround a quartz plasma tube, for the introduction of an ionizable gas therein. These electrodes ionize the gas and help generate the plasma. This plasma flows through a non-constrictive aperture, through the plasma discharge housing and then on to the contaminated surface.
Abstract:
An array of electro-optical units in the form of a unitary device is formed. A single electro-optical crystal, such as lithium, niobate, or its equivalent, has a number of parallel slots cut into the body of the crystal. Each slot is filled with an electrically conductive foil that is made to adhere to the walls of the slot using an electrically conductive adhesive. The foils extend beyond the boundaries of the crystal to serve as electrodes.
Abstract:
In an embodiment, a system is provided that includes an electron gun, a focusing system, and a housing. The electron gun can include a cold cathode electron source and an extraction electrode. The focusing system can be configured to focus a beam of electrons extracted from the electron gun to a focal region. The housing can include the electron gun and extend along a housing axis in the direction of the electron beam. The cold cathode source is configured to emit electrons at a first operating pressure that is higher than a second operating pressure at the focal region of the electron beam.