Cold cathode ion source
    1.
    发明授权
    Cold cathode ion source 失效
    冷阴极离子源

    公开(公告)号:US4303865A

    公开(公告)日:1981-12-01

    申请号:US69409

    申请日:1979-08-24

    CPC classification number: H01J49/126 B03B5/26 E02F3/90 E02F7/065 H01J49/025

    Abstract: A plasma discharge ion source for a mass spectrometer, having a magnet forming an axial magnetic field, two cathodes axially spaced in said field and an annular anode between the cathodes. Ions generated by the source emerge via an opening in one cathode and then pass in succession through axially aligned openings in two planar electrodes. The electrode closest said one cathode has a further disc or cone shaped electrode positioned in the opening of that electrode so as to form an annular gap between the peripheries of the disc shaped electrode and opening.Ions from the source opening pass in succession through the annular gap and then through the electrode opening in the electrode furtherest from the source opening. By applying suitable electric potentials to the electrodes ions of an energy above a predetermined level are prevented from passing through the electrodes.A mass spectrometer employing the source is also disclosed this employing an electrostatic ion filter and an ion collector to receive filtered ions from the source via the filter.The collector includes a slow ion deflector arranged to deflect emergent ions from the filter to a collector member of the collector and to which deflector emergent ions of high energy travel directly without such deflection.

    Abstract translation: 用于质谱仪的等离子体放电离子源,其具有形成轴向磁场的磁体,在所述场中轴向间隔开的两个阴极和阴极之间的环形阳极。 由源产生的离子通过一个阴极中的开口出现,然后连续地通过两个平面电极中的轴向对准的开口。 最靠近所述一个阴极的电极具有位于该电极的开口中的另一个圆盘或锥形电极,以便在盘状电极的周边和开口之间形成环形间隙。 来自源极开口的离子通过环形间隙连续通过,然后通过电极开口处离开源极开口的电极开口。 通过向电极施加合适的电位,防止超过预定水平的能量的离子通过电极。 还公开了采用该源的质谱仪,其采用静电离子过滤器和离子收集器以经由过滤器从源接收经过滤的离子。 收集器包括缓慢的离子偏转器,其布置成将来自过滤器的紧急离子偏转到收集器的收集器构件,并且高能量的偏转器出射离子直接行进而没有这种偏转。

    Cold cathode discharge device with grid control
    2.
    发明授权
    Cold cathode discharge device with grid control 失效
    冷阴极放电装置与电网控制

    公开(公告)号:US4247804A

    公开(公告)日:1981-01-27

    申请号:US45460

    申请日:1979-06-04

    Inventor: Robin J. Harvey

    CPC classification number: H01J17/44

    Abstract: A cross-field discharge plasma is used to supply charge carriers for a grid controlled cold cathode discharge device. A dc magnetic field is employed to sustain the crossed-field discharge when the source grid is active. The device comprises an anode, a cathode, a source grid, and in alternate embodiments, additional control grids. Preferably the magnetic field exists only in the source grid-cathode space and penetrates only weakly, or not at all, into other electrode gaps or spaces. The source grid-cathode plasma is effectively a source of charge carriers, electrons or ions, controlled by the source grid current, the anode current being an approximate linear function of source grid current within limits, and/or controllable by adjustment of control grid potentials.

    Abstract translation: 使用交叉场放电等离子体为电网控制的冷阴极放电装置提供电荷载体。 当源栅格有效时,采用直流磁场来维持交叉场放电。 该装置包括阳极,阴极,源栅格,并且在替代实施例中,附加的控制栅格。 优选地,磁场仅存在于源栅极 - 阴极空间中,并且仅仅弱化或根本不渗入其它电极间隙或空间。 源栅极 - 阴极等离子体实际上是由源电网电流控制的电荷载流子,电子或离子源,阳极电流是限制内的源电网电流的近似线性函数,和/或通过调节控制电网电位可控 。

    Plasma panel display device
    4.
    发明授权
    Plasma panel display device 失效
    等离子面板显示设备

    公开(公告)号:US3573531A

    公开(公告)日:1971-04-06

    申请号:US3573531D

    申请日:1968-03-18

    CPC classification number: H01J11/12

    Abstract: A high contrast plasma display device includes transparent and opaque insulator layers spaced and bonded by a plurality of spaced opaque insulator segments forming a plurality of cavities. An insulator substrate having a plurality of spaced conductors on the surface thereof in registry with the cavities and electrical connectors embedded therein is bonded to the opaque insulator layer while a transparent electrode layer is affixed to the transparent insulator layer. An ionizable gas is disposed within the cavities whereby energization of certain conductors alters the device from an opaque to a visual display. Also, the high contrast plasma display device is fabricated by a process which includes affixing the spaced conductor to a substrate, bonding an opaque insulator layer to the substrate and spaced conductors, attaching spaced opaque insulator segments to a transparent insulator layer, bonding the segments to the opaque insulator layer forming cavities in registry with the spaced conductors, affixing a transparent electrode to the transparent insulator layer, and disposing an ionizable gas within the cavities whereby the device appears opaque until energized to provide a visual display.

    Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes

    公开(公告)号:US10109448B2

    公开(公告)日:2018-10-23

    申请号:US13764420

    申请日:2013-02-11

    Abstract: Apparatus for treating products with plasma generated from a source gas. The apparatus includes a vacuum chamber, a plurality of juxtaposed electrodes arranged in adjacent pairs inside the vacuum chamber, and a plasma excitation source electrically coupled with the electrodes. The apparatus may include conductive members extending into the interior of each electrode to establish a respective electrical connection with the plasma excitation source. The apparatus may include a gas distribution manifold and multiple gas delivery tubes coupled with the gas distribution manifold. Each gas delivery tube has an injection port configured to inject the source gas between each adjacent pair of electrodes. The apparatus may further include flow restricting members that operate to partially obstruct a peripheral gap between each adjacent pair of electrodes, which restricts the escape of the source gas from the process chamber between each adjacent pair of electrodes.

    MULTIPLE-ELECTRODE PLASMA PROCESSING SYSTEMS WITH CONFINED PROCESS CHAMBERS AND INTERIOR-BUSSED ELECTRICAL CONNECTIONS WITH THE ELECTRODES

    公开(公告)号:US20130139967A1

    公开(公告)日:2013-06-06

    申请号:US13764420

    申请日:2013-02-11

    Abstract: Apparatus for treating products with plasma generated from a source gas. The apparatus includes a vacuum chamber, a plurality of juxtaposed electrodes arranged in adjacent pairs inside the vacuum chamber, and a plasma excitation source electrically coupled with the electrodes. The apparatus may include conductive members extending into the interior of each electrode to establish a respective electrical connection with the plasma excitation source. The apparatus may include a gas distribution manifold and multiple gas delivery tubes coupled with the gas distribution manifold. Each gas delivery tube has an injection port configured to inject the source gas between each adjacent pair of electrodes. The apparatus may further include flow restricting members that operate to partially obstruct a peripheral gap between each adjacent pair of electrodes, which restricts the escape of the source gas from the process chamber between each adjacent pair of electrodes.

    Unitary electro-optic array device making process
    9.
    发明授权
    Unitary electro-optic array device making process 失效
    单位电子阵列设备制造工艺

    公开(公告)号:US3704512A

    公开(公告)日:1972-12-05

    申请号:US3704512D

    申请日:1968-11-29

    Applicant: IBM

    Inventor: SIEGEL ARTHUR R

    Abstract: An array of electro-optical units in the form of a unitary device is formed. A single electro-optical crystal, such as lithium, niobate, or its equivalent, has a number of parallel slots cut into the body of the crystal. Each slot is filled with an electrically conductive foil that is made to adhere to the walls of the slot using an electrically conductive adhesive. The foils extend beyond the boundaries of the crystal to serve as electrodes.

    Abstract translation: 形成整体装置形式的电光单元阵列。 诸如锂,铌酸盐或其等同物的单一电光晶体具有切割到晶体中的多个平行狭缝。 每个槽都填充有导电箔,其使用导电粘合剂制成粘附到槽的壁上。 箔延伸超出晶体的边界以用作电极。

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