Invention Patent
- Patent Title: THERMOCOMPRESSION BONDING IN INTEGRATED CIRCUIT PACKAGING
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Application No.: CA2024012Application Date: 1990-08-24
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Publication No.: CA2024012A1Publication Date: 1991-02-26
- Inventor: KANG SUNG K , PALMER MICHAEL J , REILEY TIMOTHY C , TOPA ROBERT D
- Applicant: IBM
- Assignee: IBM
- Current Assignee: IBM
- Priority: US39879989 1989-08-25
- Main IPC: B23K20/02
- IPC: B23K20/02 ; B23K20/233 ; B23K33/00 ; H01L21/60 ; H01L21/603
Abstract:
A contact member for thermocompression bonding in integrated circuit packaging has on a conductor end a uniform texture deformable layer with a hardness value in the range of that of soft gold which is approximately 90 on the Knoop scale and with a rough surface morphology having ridges with approximately 1 micrometer modulation frequency and a depth between ridges of from 1/4 to 1/2 that of the average integrated circuit pad. The deformable layer is produced by plating gold in a strong electronegative plating bath within a range of 0.03 to 0.05 mA/sq.cm. current density. Plating apparatus, for plating different areas, with different electronegative conditions, with separate independently powered anodes, is provided.
Public/Granted literature
- CA2024012C THERMOCOMPRESSION BONDING IN INTEGRATED CIRCUIT PACKAGING Public/Granted day:1996-03-05
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