Invention Grant
- Patent Title: Scanning electron microscope
-
Application No.: US15902251Application Date: 2018-02-22
-
Publication No.: US10361062B2Publication Date: 2019-07-23
- Inventor: Tatsuru Kuramoto , Yuichiro Ohori , Yoshinori Matsuda , Makoto Aoshima
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2017-032554 20170223
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/244 ; H01J37/10 ; H01J37/147

Abstract:
A scanning electron microscope includes: a liner tube which transmits an electron beam; a scintillator having a through-hole into which the liner tube is inserted; a light guide which guides light generated by the scintillator; a conductive layer provided on a sensitive surface of the scintillator; and a conductive member provided in the scintillator, wherein the shortest distance between the liner tube and the conductive member is shorter than the shortest distance between the liner tube and the conductive layer, a voltage for accelerating electrons is applied to the conductive layer, and the conductive layer and the conductive member have a same potential.
Public/Granted literature
- US20180240644A1 Scanning Electron Microscope Public/Granted day:2018-08-23
Information query