Invention Grant
- Patent Title: Apparatus and method for controlling doping
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Application No.: US15523476Application Date: 2015-10-26
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Publication No.: US10381503B2Publication Date: 2019-08-13
- Inventor: Stefano Borini , Alan Colli
- Applicant: EMBERION OY
- Applicant Address: FI Espoo
- Assignee: EMBERION OY
- Current Assignee: EMBERION OY
- Current Assignee Address: FI Espoo
- Agency: Squire Patton Boggs (US) LLP
- Priority: EP14191383 20141031; EP15161553 20150330
- International Application: PCT/FI2015/050732 WO 20151026
- International Announcement: WO2016/066897 WO 20160506
- Main IPC: G01J5/04
- IPC: G01J5/04 ; G01J5/10 ; G01J5/34 ; H01L21/04 ; H01L29/16 ; H01L29/40 ; H01L29/423 ; H01L29/778 ; H01L29/786 ; H01L31/113 ; H01L31/119 ; H01L31/0352

Abstract:
An apparatus and method, the apparatus comprising: at least one charged substrate (3); a channel of two dimensional material (5); and at least one floating electrode (7A-C) wherein the floating electrode comprises a first area (10A-C) adjacent the at least one charged substrate, a second area (11A-C) adjacent the channel of two dimensional material and a conductive interconnection (9A-C) between the first area and the second area wherein the first area is larger than the second area and wherein the at least one floating electrode is arranged to control the level of doping within the channel of two dimensional material.
Public/Granted literature
- US20170316941A1 AN APPARATUS AND METHOD FOR CONTROLLING DOPING Public/Granted day:2017-11-02
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