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公开(公告)号:US10381503B2
公开(公告)日:2019-08-13
申请号:US15523476
申请日:2015-10-26
Applicant: EMBERION OY
Inventor: Stefano Borini , Alan Colli
IPC: G01J5/04 , G01J5/10 , G01J5/34 , H01L21/04 , H01L29/16 , H01L29/40 , H01L29/423 , H01L29/778 , H01L29/786 , H01L31/113 , H01L31/119 , H01L31/0352
Abstract: An apparatus and method, the apparatus comprising: at least one charged substrate (3); a channel of two dimensional material (5); and at least one floating electrode (7A-C) wherein the floating electrode comprises a first area (10A-C) adjacent the at least one charged substrate, a second area (11A-C) adjacent the channel of two dimensional material and a conductive interconnection (9A-C) between the first area and the second area wherein the first area is larger than the second area and wherein the at least one floating electrode is arranged to control the level of doping within the channel of two dimensional material.
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公开(公告)号:US09905720B2
公开(公告)日:2018-02-27
申请号:US15523475
申请日:2015-10-22
Applicant: EMBERION OY
Inventor: Alan Colli , Stefano Borini
IPC: G01N27/403 , H01L31/113 , H01L31/119 , H01L31/0352
CPC classification number: H01L21/041 , G01J5/046 , G01J5/10 , G01J5/34 , H01L29/1606 , H01L29/404 , H01L29/4238 , H01L29/42384 , H01L29/778 , H01L29/78603 , H01L29/78645 , H01L29/78684 , H01L29/78696 , H01L31/035218 , H01L31/113 , H01L31/119
Abstract: An apparatus and method wherein the apparatus comprises: a sensing material configured to produce a non-random distribution of free charges in response to a parameter; an electric field sensor; a first conductive electrode comprising a first area overlapping the sensing material; an insulator provided between the first conductive electrode and the sensing material; a second electrode comprising a second area adjacent the electric field sensor; and a conductive interconnection between the first conductive electrode and the second conductive electrode.
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